CN-224222263-U - Be used for abluent device of silicon chip box

CN224222263UCN 224222263 UCN224222263 UCN 224222263UCN-224222263-U

Abstract

The utility model discloses a device for cleaning a silicon wafer box. The device comprises a complete machine support, a manipulator, a box support and a box support separating mechanism, wherein one end of the complete machine support is provided with a box support positioning clamping groove and a box support separating mechanism, the manipulator is arranged at the other end of the complete machine support and used for disassembling and assembling a box cover, the box support is of a split type structure and comprises a box fixing support and a box compressing support arranged at the top of the box fixing support, a fixing support space of the box and the box cover is formed by the box fixing support and the box compressing support, and the box support separating mechanism is provided with two box compressing support clamping jaws which are respectively arranged at two sides of the box support and used for disassembling and assembling the box compressing support on the box fixing support. The utility model has higher benefits in the aspects of improving the working efficiency and the stability of the cleaning equipment, avoids pollution caused by manual operation, and avoids other risks caused by manual operation.

Inventors

YU YADI
WANG YUE
KU LIMING
YU XINGRUI
LI YAODONG
YAN ZHIRUI

Assignees

山东有研艾斯半导体材料有限公司

Dates

Publication Date: 20260512
Application Date: 20250411

Claims (8)

1. A device for cleaning a silicon wafer box is characterized by comprising a complete machine bracket, a mechanical arm, a wafer box bracket and a wafer box bracket separating mechanism, wherein, The mechanical arm is arranged at the other end of the whole machine support and is used for disassembling and installing the box cover; The box support is of a split structure and comprises a box fixing support and a box pressing support positioned at the top of the box fixing support, and a fixing support space of the box and the box cover is formed by the box fixing support and the box pressing support; The film box support separating mechanism is provided with two clamping jaws of the film box pressing support, which are respectively arranged on two sides of the film box support and used for disassembling and installing the film box pressing support on the film box fixing support.
2. The apparatus of claim 1, wherein the cassette compression bracket is provided with a plurality of posts by which force is applied to the cassette and the cassette cover.
3. The apparatus for cleaning a silicon wafer cassette according to claim 2, wherein the cassette pressing bracket is provided with a plurality of different sizes of the posts corresponding to the cassette and the cassette cover, respectively.
4. A device for cleaning a silicon wafer cassette according to claim 2 or 3, wherein the cassette fixing support is provided with a cassette positioning block and a cassette cover positioning block, wherein the cassette positioning block is matched with a corresponding jack post to fix the cassette, and the cassette cover positioning block is matched with a corresponding jack post to fix the cassette cover.
5. The device for cleaning a silicon wafer cassette according to claim 1, wherein the cassette pressing bracket is provided with a fastening pin, and the fastening pin is used for fixing the cassette pressing bracket and the cassette fixing bracket.
6. The apparatus for cleaning a silicon wafer cassette as defined in claim 5 wherein the cassette pressing bracket clamping jaw is provided with a pin opening/closing means for opening or locking a fastening pin of the cassette pressing bracket.
7. The apparatus of claim 1, wherein the robot is provided with a clamping mechanism that mates with the lid aperture.
8. The apparatus for cleaning a silicon wafer cassette according to claim 7, wherein the robot is a multi-axis robot, automatically opens the cassette cover according to actual needs, separates the cassette cover from the cassette and places the cassette cover on the cassette fixing bracket, and removes the cassette cover from the cassette fixing bracket, covers the cassette cover, and closes the cassette cover.

Description

Be used for abluent device of silicon chip box Technical Field The utility model relates to a device for cleaning a silicon wafer box, and belongs to the field of semiconductor manufacturing. Background In the semiconductor silicon wafer manufacturing industry, in order to ensure the cleanliness of the surface of a silicon wafer, the introduction of external pollution sources is avoided while the cleanliness of a silicon wafer body is ensured. The silicon wafer box is used as a carrier for carrying the whole process of processing the silicon wafer, and the cleanliness degree plays a vital role for the cleanliness of the silicon wafer. During the processing of silicon wafers, the wafer cassette typically needs to be cleaned prior to use. Generally, when a wafer box is cleaned, a silicon wafer box cover and a silicon wafer box are required to be separated manually and put into a silicon wafer box cleaning device for cleaning. In the cleaning process of the silicon wafer box, the silicon wafer box cover and the silicon wafer box are usually separated manually, and the silicon wafer box cover are respectively and directly placed on a goods shelf for airing after cleaning. The manual operation instability usually leads to a pollution source again, in addition, the silicon chip box and the silicon chip box cover support are usually fixed by using nonmetallic bolts such as PEEK and PVC, the screwing force in the manual screwing process cannot be completely consistent, the risk that the silicon chip box or the silicon chip box cover falls off can be caused due to insufficient screwing force, the bolt is broken due to excessive screwing force, broken wires are required to be taken out, productivity is affected, and pollution is inevitably introduced when a broken wire taking tool is used. Disclosure of Invention In view of the defects or shortcomings in the process that a silicon wafer box cover and a silicon wafer box are manually operated and separated in the current silicon wafer box cleaning process and placed on a silicon wafer box cleaning support, and then the silicon wafer box and the silicon wafer box cover are dried by manpower respectively, the utility model aims to provide a device for cleaning the silicon wafer box, which is capable of avoiding pollution caused by manual operation, improving the cleaning cleanliness of the silicon wafer box and avoiding other risks caused by manual operation. In order to achieve the above purpose, the present utility model adopts the following technical scheme: The device for cleaning the silicon wafer box comprises a complete machine bracket, a mechanical arm, a wafer box bracket and a wafer box bracket separating mechanism, wherein, The mechanical arm is arranged at the other end of the whole machine support and is used for disassembling and installing the box cover; The box support is of a split structure and comprises a box fixing support and a box pressing support positioned at the top of the box fixing support, and a fixing support space of the box and the box cover is formed by the box fixing support and the box pressing support; The film box support separating mechanism is provided with two clamping jaws of the film box pressing support, which are respectively arranged on two sides of the film box support and used for disassembling and installing the film box pressing support on the film box fixing support. Further, a plurality of jack posts are arranged on the clamping support of the wafer box, and acting force is applied to the wafer box and the box cover through the jack posts. Further, the cartridge pressing bracket is provided with a plurality of jack posts with different sizes, which respectively correspond to the cartridge and the cartridge cover. Further, a box positioning block and a box cover positioning block are arranged on the box cover fixing support, wherein the box cover positioning block is matched with the corresponding jack post to fix the box, and the box cover positioning block is matched with the corresponding jack post to fix the box cover. Further, a fastening pin shaft is arranged on the film box pressing support, and the fixing between the film box pressing support and the film box fixing support is achieved through the fastening pin shaft. Further, the manipulator is provided with a clamping mechanism matched with the hole of the box cover. Further, the manipulator is a multi-axis manipulator, automatically opens the box cover according to actual needs, separates the box cover from the box cover and places the box cover on the box cover fixing support, and removes the box cover from the box cover fixing support, and closes the box cover on the box cover. Further, a pin opening/closing device is arranged on the clamping jaw of the clamping bracket of the wafer box and is used for opening or locking a fastening pin of the clamping bracket of the wafer box. The utility model has the advantages that: According to the device for cleaning th