CN-224222967-U - Ceramic substrate adsorbs tool and laser drilling machine

CN224222967UCN 224222967 UCN224222967 UCN 224222967UCN-224222967-U

Abstract

The utility model discloses a ceramic substrate adsorption jig and a laser drilling machine, wherein the ceramic substrate adsorption jig comprises a base and an adsorption plate arranged on the base, a plurality of first adsorption holes and second adsorption holes are formed in the top of the adsorption plate, the first adsorption holes are positioned in the middle area of the adsorption plate, the second adsorption holes are positioned in the edge area of the adsorption plate, a first inner cavity and a second inner cavity are formed in the adsorption plate, the first inner cavity is communicated with the first adsorption holes, the second inner cavity is communicated with the second adsorption holes, the first inner cavity is provided with a first interface for connecting external low negative pressure equipment, and the second inner cavity is provided with a second interface for connecting external high negative pressure equipment. The utility model can avoid the middle area of the ceramic substrate from downwards sinking and deforming, ensure that the ceramic substrate can not generate edge tilting or displacement in the processing process, and improve the processing precision.

Inventors

ZHOU JIANHONG
ZHANG WEI
ZHANG LI
DENG CHAO
Ye Zonghui
WANG CHONG
MO XIAOHUI
Fang Yanyang

Assignees

深圳市圭华智能科技有限公司

Dates

Publication Date: 20260512
Application Date: 20260407

Claims (10)

1. The utility model provides a pottery base plate adsorbs tool, its characterized in that, is in including base, setting adsorption plate on the base, a plurality of first adsorption holes and second adsorption holes have been seted up at the adsorption plate top, a plurality of first adsorption holes are located the middle zone of adsorption plate, a plurality of second adsorption holes are located the marginal zone of adsorption plate, first inner chamber and second inner chamber have been seted up to the inside of adsorption plate, first inner chamber and a plurality of first adsorption holes intercommunication, the second inner chamber with a plurality of second adsorption holes intercommunication, first inner chamber has the first interface that is used for connecting outside low negative pressure equipment, the second inner chamber has the second interface that is used for connecting outside high negative pressure equipment.
2. The ceramic substrate adsorption jig according to claim 1, wherein the adsorption plate has a rectangular top view, a plurality of first adsorption holes are distributed in a rectangular array, and a plurality of second adsorption holes are distributed in a zigzag array.
3. The fixture of claim 2, wherein the plurality of second adsorption holes form a plurality of groups of zigzag arrays with different sizes to accommodate ceramic substrates of different specifications.
4. The ceramic substrate adsorption jig according to claim 3, wherein the second inner cavity comprises a plurality of back-shaped air suction channels, each back-shaped air suction channel corresponds to the second adsorption holes of a group of back-shaped arrays, each back-shaped air suction channel is respectively and correspondingly communicated with at least one second interface arranged on the side part of the adsorption plate, and each back-shaped air suction channel is respectively located at different heights inside the adsorption plate.
5. The ceramic substrate adsorption jig according to claim 1, wherein a first groove is formed in the top of the base, a second groove is formed in the bottom of the adsorption plate, the first groove and the second groove are matched to form the first inner cavity, and the first interface is arranged on the base and is communicated with the first groove.
6. The ceramic substrate adsorption jig according to claim 5, wherein the base is provided with a dust extraction block, a dust extraction channel is arranged in the dust extraction block, one end of the dust extraction channel is communicated with external dust extraction equipment, and an auxiliary channel is arranged in the base and is used for communicating the first groove and the dust extraction channel.
7. The ceramic substrate adsorption jig according to claim 6, wherein the number of the adsorption plates is four, the four adsorption plates are distributed on the base in a rectangular array, the number of the auxiliary channels is two, and each auxiliary channel is respectively communicated with the air suction channel and the two first grooves.
8. The ceramic substrate adsorption jig according to claim 1, wherein the adsorption plate is further provided with a plurality of auxiliary adsorption holes, the plurality of auxiliary adsorption holes are communicated with the first inner cavity, and the plurality of auxiliary adsorption holes are distributed at intervals with the plurality of second adsorption holes.
9. The ceramic substrate adsorption jig of claim 1, wherein the base is further provided with a calibration block.
10. A laser drilling machine comprising the ceramic substrate adsorption jig according to any one of claims 1 to 9.

Description

Ceramic substrate adsorbs tool and laser drilling machine Technical Field The utility model relates to the technical field of ceramic substrate drilling equipment, in particular to a ceramic substrate adsorption jig and a laser drilling machine. Background Ceramic substrates are widely used as package substrates and heat dissipation substrates for electronic components because of their excellent insulation, heat resistance, thermal conductivity, and coefficient of thermal expansion matching with chips. In the process of manufacturing a ceramic substrate, particularly in precision machining such as laser drilling, cutting or bonding, it is necessary to fix the ceramic substrate to a jig on a work table of a machining apparatus to prevent the ceramic substrate from being displaced or deformed during the machining process, thereby ensuring the machining precision. The existing laser drilling equipment generally adopts a vacuum adsorption jig to fix the ceramic substrate. Specifically, the vacuum adsorption jig generally comprises a base and an adsorption plate, wherein dense adsorption holes are formed in the surface of the adsorption plate, and a single vacuum air cavity communicated with all the adsorption holes is formed in the adsorption plate. During operation, the single air cavity is pumped through the external vacuum equipment, so that negative pressure is generated in the adsorption holes, and the ceramic substrate placed on the adsorption plate is adsorbed and fixed. However, since a single air cavity structure is employed, the adsorption force of the entire adsorption plate surface is uniform. When a plurality of ceramic substrates with smaller thickness, larger area or fragile material are fixed, the middle area of the ceramic substrate is easy to bend downwards, and the edge of the ceramic substrate is easy to tilt, so that the adsorption is unstable, the processing precision is affected, and even the inside of the ceramic substrate is stressed to cause fragmentation. Disclosure of utility model In order to overcome the defects in the prior art, the utility model provides the ceramic substrate adsorption jig and the laser drilling machine, which can prevent the middle area of the ceramic substrate from being deformed by downward sinking, ensure that the ceramic substrate cannot generate edge tilting or displacement in the processing process, and improve the processing precision. The technical scheme adopted for solving the technical problems is as follows: The utility model provides a pottery base plate adsorbs tool, is in including base, setting adsorption plate on the base, a plurality of first adsorption holes and second adsorption holes have been seted up at the adsorption plate top, a plurality of first adsorption holes are located the middle zone of adsorption plate, a plurality of the second adsorption holes are located the marginal zone of adsorption plate, first inner chamber and second inner chamber have been seted up to the inside of adsorption plate, first inner chamber with a plurality of first adsorption holes intercommunication, the second inner chamber with a plurality of second adsorption holes intercommunication, first inner chamber has the first interface that is used for connecting outside low negative pressure equipment, the second inner chamber has the second interface that is used for connecting outside high negative pressure equipment. As a further improvement of the technical scheme, the overlooking projection of the adsorption plate is rectangular, a plurality of first adsorption holes are distributed in a rectangular array, and a plurality of second adsorption holes are distributed in a zigzag array. As a further improvement of the technical scheme, a plurality of second adsorption holes form a plurality of groups of zigzag arrays with different sizes so as to adapt to ceramic substrates with different specifications. As a further improvement of the above technical solution, the second inner cavity includes a plurality of back-shaped air suction channels, each back-shaped air suction channel corresponds to a group of back-shaped array of the second adsorption holes, each back-shaped air suction channel is correspondingly communicated with at least one second interface arranged at the side of the adsorption plate, and each back-shaped air suction channel is located at different heights inside the adsorption plate. As a further improvement of the technical scheme, the top of the base is provided with a first groove, the bottom of the adsorption plate is provided with a second groove, the first groove is matched with the second groove to form the first inner cavity, and the first interface is arranged on the base and communicated with the first groove. As a further improvement of the technical scheme, the base is provided with the dust extraction matching block, the dust extraction matching block is internally provided with the air extraction channel, one end of the air ext