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CN-224223580-U - Grinding and finishing device and chemical mechanical polishing equipment

CN224223580UCN 224223580 UCN224223580 UCN 224223580UCN-224223580-U

Abstract

The application discloses a grinding and trimming device and chemical mechanical polishing equipment. The liquid leakage detection device arranged in the dressing arm body is connected with the control unit, and when liquid leakage occurs in the dressing arm body, the liquid leakage detection device detects and transmits signals to the control unit to trigger an alarm mechanism, so that an operator takes measures before the damage of core components such as a motor is caused by liquid, and equipment maintenance requirements and downtime caused by the damage of the components are reduced.

Inventors

  • LIN YONG

Assignees

  • 广州增芯科技有限公司

Dates

Publication Date
20260512
Application Date
20250526

Claims (10)

  1. 1. An abrasive finishing device, comprising: A base; The trimming arm body is fixedly arranged above the base at one end; The cover plate is arranged at the top of the trimming arm body and is in sealing connection with the trimming arm body; The liquid leakage detection device is arranged in the trimming arm body and is connected with the control unit; And the trimming execution unit is arranged below the other end of the trimming arm body.
  2. 2. The abrasive finishing device of claim 1, wherein the cover plate is a pitched roof cover plate having a top portion that slopes downwardly from the center to the periphery.
  3. 3. The abrasive finishing device of claim 2, wherein the surface of the pitched roof plate is inclined at an angle of 45 degrees to 70 degrees.
  4. 4. The abrasive finishing device of claim 1, wherein the cover plate is a planar cover plate.
  5. 5. The abrasive finishing device of claim 1, wherein said cover plate is coupled to said finishing arm body by a plurality of screws, said abrasive finishing device comprising a plurality of screw caps disposed over said screws, covering and sealing the screw holes.
  6. 6. The abrasive finishing device of claim 1, wherein a seal is disposed between the cover plate and the finishing arm body.
  7. 7. The abrasive finishing device of claim 1, wherein the weeping detection device comprises: The liquid leakage detection belt is arranged on at least one of the inner wall and the bottom of the trimming arm body; And the signal transmission line is connected with the liquid leakage detection belt and is connected with the control unit.
  8. 8. The abrasive finishing device of claim 7, wherein the control unit comprises: the user input/output interface is connected with the signal transmission line; The signal processing unit is arranged in the control unit, and the input end of the signal processing unit is connected with the user input/output interface; The alarm indicator is connected with the output end of the signal processing unit, the alarm indicator is arranged on the control unit, and the alarm indicator comprises a visual indicator lamp and a sound generator.
  9. 9. The abrasive finishing device of claim 1, wherein a motor is mounted in said base, and wherein said finishing arm body is provided with: The rotating shaft is rotatably arranged in the trimming arm body and used for driving the grinding trimming head to rotate, and the grinding trimming head is positioned at one end of the trimming executing unit, which is opposite to the trimming arm body; The belt is connected with the motor in the base and the rotating shaft in the trimming arm body and is used for transmitting the power of the motor to the rotating shaft; The air pipe is arranged in the trimming arm body, one end of the air pipe is connected with an air source, the other end of the air pipe is connected with a lifting mechanism in the trimming execution unit, and the lifting mechanism is used for controlling the lifting action of the grinding trimming head; And the rotating speed sensor is adjacent to the rotating shaft and is connected with the control unit.
  10. 10. A chemical mechanical polishing apparatus comprising the abrasive finishing device according to any one of claims 1 to 9.

Description

Grinding and finishing device and chemical mechanical polishing equipment Technical Field The application relates to the technical field of semiconductor manufacturing, in particular to a grinding and trimming device and chemical mechanical polishing equipment. Background In the field of semiconductor fabrication, chemical Mechanical Polishing (CMP) processes are a critical step in the chip production process. In the related art, a polishing dressing apparatus (i.e., a polishing dressing arm 10, as shown in fig. 1) of a CMP polishing machine includes a dressing arm body 12 and a cover plate 11 positioned thereabove. When the water curtain device 13 of the CMP polishing machine washes the polishing finishing arm 10, water can accumulate on the cover plate 11, and the accumulated water is easy to splash on the polishing pad in the polishing process, so that the stability of the polishing rate is affected. Meanwhile, since water is present on the cover plate 11, the water is easily permeated into the inside of the dressing arm body 12, which may cause damage to the motor of the grinding dressing arm 10 and cause an increase in equipment maintenance requirements and downtime. Therefore, a solution to the problems in the related art is required. Disclosure of utility model An object of the present application is to provide an abrasive finishing device and a chemical mechanical polishing apparatus to solve the problems in the related art. In order to solve the problems, according to a first aspect of the present application, an embodiment of the present application provides a polishing and dressing device, which includes a base, a dressing arm body, a cover plate, a leakage detection device, and a dressing execution unit, wherein one end of the dressing arm body is fixedly arranged above the base, the cover plate is arranged at the top of the dressing arm body and forms a sealing connection with the dressing arm body, the cover plate is made of transparent materials, the leakage detection device is arranged inside the dressing arm body, the leakage detection device is connected with a control unit, and the dressing execution unit is arranged below the other end of the dressing arm body. In some possible embodiments, the cover plate is a pitched roof cover plate, the top of which slopes downward from the center to the periphery. In some possible embodiments, the surface of the pitched roof panel is inclined at an angle of 45 degrees to 70 degrees. In some possible embodiments, the cover plate is a planar cover plate. In some possible embodiments, the cover plate is connected to the dressing arm body by a plurality of screws, and the abrasive dressing apparatus includes a plurality of screw caps disposed over the screws, covering and sealing the screw holes. In some possible embodiments, a sealing ring is provided between the cover plate and the conditioning arm body. In some possible embodiments, the liquid leakage detection device comprises a liquid leakage detection belt arranged on at least one of the inner wall and the bottom of the trimming arm body, and a signal transmission line connected with the liquid leakage detection belt and connected with the control unit. In some possible embodiments, the control unit comprises a user input/output interface, a signal processing unit and an alarm indicator, wherein the user input/output interface is connected with the signal transmission line, the signal processing unit is arranged in the control unit, the input end of the signal processing unit is connected with the user input/output interface, the alarm indicator is connected with the output end of the signal processing unit, and the alarm indicator comprises a visual indicator lamp and a sound generator and is arranged on the control unit. In some possible embodiments, a motor is arranged in the base, a rotating shaft is arranged in the trimming arm body and is used for driving a grinding trimming head to rotate, the grinding trimming head is positioned at one end of the trimming executing unit, which is opposite to the trimming arm body, a belt is connected with the motor in the base and the rotating shaft in the trimming arm body and is used for transmitting the power of the motor to the rotating shaft, an air pipe is arranged in the trimming arm body, one end of the air pipe is connected with an air source, the other end of the air pipe is connected with a lifting mechanism in the trimming executing unit, the lifting mechanism is used for controlling the lifting action of the grinding trimming head, and a rotating speed sensor is adjacent to the rotating shaft and is connected with the control unit. According to a second aspect of the present application, an embodiment of the present application provides a chemical mechanical polishing apparatus including the abrasive finishing device of any one of the preceding claims. According to the grinding and trimming device provided by the embodiment of the application,