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CN-224223650-U - Rotatable multi-object electrostatic chuck

CN224223650UCN 224223650 UCN224223650 UCN 224223650UCN-224223650-U

Abstract

The utility model discloses a rotatable multi-object electrostatic chuck which comprises a base plate, a baffle plate arranged in the base plate, a fluted disc arranged above the baffle plate, a connecting frame arranged between the baffle plate and the fluted disc, and a cover plate arranged above the connecting frame and connected with the fluted disc, wherein the baffle plate is provided with at least six adsorption cabins and a conductive groove, a driven tooth and a ball are arranged between the two adsorption cabins, at least one driven tooth in the baffle plate is provided with a driving motor, a plurality of conductive sheets are arranged on the inner wall of the conductive groove, the simultaneous adsorption and release of a plurality of objects are realized through the design of the adsorption cabins in the baffle plate, the problem that the traditional electrostatic chuck can only treat a single object is solved, the meshing of the fluted disc and the driven tooth is realized, the rotation function of the chuck is realized, and the problems that the traditional electrostatic chuck cannot rotate and adjust the rotation angle are solved through the driving motor.

Inventors

  • LI XIAN

Assignees

  • 无锡互创芯微半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20250423

Claims (6)

  1. 1. The electrostatic chuck capable of rotating multiple objects is characterized by comprising a base plate, a baffle plate arranged in the base plate, a fluted disc arranged above the baffle plate, a connecting frame arranged between the baffle plate and the fluted disc, and a cover plate arranged above the connecting frame and connected with the fluted disc; The separation plate is provided with at least six adsorption cabins and a conductive groove, and a driven tooth and a ball are arranged between the two adsorption cabins; A power supply cabin penetrating through the fluted disc is arranged in the conductive groove, and a plurality of metal contacts which are correspondingly contacted with the conductive sheets are arranged on the outer wall of the power supply cabin; The fluted disc is provided with a rolling groove in rolling fit with the balls, and the connecting frame is also provided with the balls in rolling fit with the rolling groove.
  2. 2. The electrostatic chuck of claim 1, wherein said frame has threaded holes for connection to said separator plates and said cover plate has threaded holes for connection to said toothed plates.
  3. 3. The electrostatic chuck of claim 1, wherein said toothed plate is engaged with driven teeth, said drive motor is mounted in a recess defined in said separator plate, and said recess defines a heat dissipating aperture extending through said separator plate and said base plate.
  4. 4. The electrostatic chuck of claim 1, wherein the chuck comprises an electrode layer, a dielectric layer, and a heating element, all of which are connected to the conductive sheet.
  5. 5. The electrostatic chuck of claim 1, wherein the frame is threadably coupled to the spacer and is in rolling engagement with the toothed plate, and wherein the cover is threadably coupled to the toothed plate.
  6. 6. An electrostatic chuck for a rotatable multi-object according to claim 1, wherein the plurality of conductive strips are individually electrically connected to the electrode layer, the dielectric layer and the heating element within the chuck.

Description

Rotatable multi-object electrostatic chuck Technical Field The utility model relates to the technical field of electrostatic chucks, in particular to a rotatable multi-object electrostatic chuck. Background The electrostatic chuck is used as a common adsorption device and is widely applied to the fields of semiconductor manufacturing, precision machining, automatic production lines and the like. The working principle is that an object is fixed on the surface of the sucker through electrostatic adsorption force, and the sucker has the advantages of no mechanical contact, no pollution, simplicity and convenience in operation and the like. However, the conventional electrostatic chuck generally can only absorb and release a single object, and cannot process multiple objects at the same time, which is inefficient in application scenarios where multiple objects need to be handled at the same time, such as multiple workpiece processing, multiple object handling, and the like. The conventional electrostatic chuck cannot perform rotation or rotation angle adjustment after adsorbing an object, which results in difficulty in meeting high precision requirements in applications requiring accurate adjustment of the position or angle of the object, such as precise assembly, optical element adjustment, and the like. Due to the lack of rotation and angle adjusting functions, the placement angle and the placement position of an object are often inaccurate in the adsorption and release processes of the traditional electrostatic chuck, and the precision of subsequent processing or assembly is affected. In order to solve the above problems, there is a need for an electrostatic chuck capable of simultaneously sucking a plurality of objects, having a rotation and angle adjusting function, and precisely controlling the position and angle of the objects. Disclosure of utility model The utility model aims to provide an electrostatic chuck capable of rotating multiple objects, so as to solve the problems in the prior art. The technical scheme is that the electrostatic chuck capable of rotating multiple objects comprises: the device comprises a base plate, a baffle plate arranged in the base plate, a fluted disc arranged above the baffle plate, a connecting frame arranged between the baffle plate and the fluted disc, and a cover plate arranged above the connecting frame and connected with the fluted disc; The separation plate is provided with at least six adsorption cabins and a conductive groove, and a driven tooth and a ball are arranged between the two adsorption cabins; A power supply cabin penetrating through the fluted disc is arranged in the conductive groove, and a plurality of metal contacts which are correspondingly contacted with the conductive sheets are arranged on the outer wall of the power supply cabin; The fluted disc is provided with a rolling groove in rolling fit with the balls, and the connecting frame is also provided with the balls in rolling fit with the rolling groove. In a further embodiment, the connecting frame is provided with a threaded hole connected with the partition plate, and the cover plate is also provided with a threaded hole connected with the fluted disc. In a further embodiment, the fluted disc is meshed with the driven tooth, the driving motor is installed at a groove formed in the partition plate, and a heat dissipation hole penetrating through the partition plate and the base plate is formed in the groove. In a further embodiment, an electrode layer, a dielectric layer and a heating element are sequentially installed in the adsorption cabin, and the electrode layer, the dielectric layer and the heating element are all connected with the conductive sheet. In a further embodiment, the connecting frame is in threaded connection with the partition plate and in rolling fit with the fluted disc, and the cover plate is in threaded connection with the fluted disc. In a further embodiment, a plurality of conductive strips are individually electrically connected to the electrode layer, the dielectric layer and the heating element within the adsorption chamber. The utility model discloses a rotatable multi-object electrostatic chuck, which realizes simultaneous adsorption and release of multiple objects through the design of a plurality of adsorption cabins in a partition plate, solves the problem that the traditional electrostatic chuck can only process single objects, realizes the rotation function of the chuck through the engagement of a fluted disc and driven teeth, and solves the problem that the traditional electrostatic chuck can not rotate and adjust the angle through a driving motor; The independent power supply and control of each adsorption cabin are realized through the independent conductive sheet design, the flexibility and the accuracy of the sucker are improved, the driving motor drives the driven teeth to rotate along the fluted disc, the rotation function of the sucker is realized, t