CN-224223704-U - Spare part processing frock for semiconductor trade tail gas processing apparatus

Abstract

The utility model discloses a part processing tool for a tail gas treatment device in the semiconductor industry, which is characterized by comprising a working bottom plate, wherein a driving motor is arranged on the working bottom plate, a screw is arranged at the output end of the driving motor, a movable seat is sleeved outside the screw, an auxiliary driving platform is arranged on the movable seat, a rotary platform is arranged on the auxiliary driving platform, a workpiece positioning seat and a workpiece adjusting seat are arranged on the rotary platform, and a rotary clamp is arranged on one side of the workpiece adjusting seat. The workpiece positioning seat and the workpiece adjusting seat can be used for adapting to workpieces with different sizes and different lengths, and meanwhile, the whole equipment moves integrally instead of independently, so that the workpieces are not damaged, and the application range is wide.

Inventors

• FENG KUNPENG

Assignees

• 张家港市大正电器成套设备有限公司

Dates

Publication Date

20260512

Application Date

20250610

Claims (6)

1. 1. The utility model provides a spare part processing frock for semiconductor trade tail gas processing apparatus, its characterized in that, including work bottom plate (1), be provided with driving motor (2) on work bottom plate (1), the output of driving motor (2) is provided with screw rod (3), screw rod (3) outside cover is equipped with removes seat (4), be provided with auxiliary drive platform (5) on removing seat (4), be provided with rotary platform (6) on auxiliary drive platform (5), be provided with work piece positioning seat (7) and work piece adjustment seat (8) on rotary platform (6), work piece adjustment seat (8) one side is provided with rotary fixture (9).
2. 2. The spare part processing tool for the semiconductor industry tail gas treatment device according to claim 1, wherein moving rails (10) are arranged on the working bottom plate (1) at two sides of the screw rod (3), limiting metal plates (11) are arranged on the outer sides of the moving rails (10), and the moving seats (4) are arranged on the moving rails (10) at two sides and grooves matched with the limiting metal plates (11) are formed in the two sides.
3. 3. The component processing tool for the tail gas treatment device in the semiconductor industry according to claim 1, wherein the rotary platform (6) is provided with a limit track through hole (12), and the workpiece positioning seat (7) and the workpiece adjusting seat (8) are arranged in the limit track through hole (12).
4. 4. The spare part processing frock for semiconductor trade tail gas processing apparatus according to claim 1, characterized in that, work piece adjustment seat (8) is including removing casing (81), be provided with lift cylinder (82) in removing casing (81), the output of lift cylinder (82) is provided with lifter plate (83), be connected with on lifter plate (83) through main shaft (84) and place seat (85) and place seat (86) postly, be provided with auxiliary shaft (87) on lifter plate (83) in the both sides of main shaft (84), auxiliary shaft (87) and main shaft (84) all run through remove casing (81).
5. 5. The component processing tool for the tail gas treatment device in the semiconductor industry as claimed in claim 1, wherein protruding positioning through holes (13) are formed in two sides of the working bottom plate (1).
6. 6. The component processing tool for the tail gas treatment device in the semiconductor industry as claimed in claim 1, wherein blocking seats (14) are arranged on two sides of the screw (3).

Description

Spare part processing frock for semiconductor trade tail gas processing apparatus Technical Field The utility model relates to the technical field of tail gas treatment device processing, in particular to a part processing tool for a tail gas treatment device in the semiconductor industry. Background Tail gas is generated in the process of semiconductor processing, such as welding, cutting and the like, a specific tail gas treatment device is needed for treatment, a pipeline is used as a most common part in the tail gas treatment device to play an important role in the whole equipment, and a positioning device at the bottom is needed for positioning and fixing the device for subsequent treatment in the process of processing the pipeline, such as cutting, polishing or rotating, so that the general positioning device only has a fixing effect, and cannot realize range transfer and cannot adapt to pipelines with various specifications. Disclosure of utility model The utility model aims to solve the technical problem of providing a part processing tool for a tail gas treatment device in the semiconductor industry, which can adapt to workpieces with different sizes and different lengths by utilizing a workpiece positioning seat and a workpiece adjusting seat, and meanwhile, the whole equipment moves integrally instead of independently, so that the workpiece cannot be damaged, and the application range is wide. In order to solve the technical problems, the utility model provides a part processing tool for a tail gas treatment device in the semiconductor industry, which comprises a working bottom plate, wherein a driving motor is arranged on the working bottom plate, a screw is arranged at the output end of the driving motor, a movable seat is sleeved outside the screw, an auxiliary driving platform is arranged on the movable seat, a rotating platform is arranged on the auxiliary driving platform, a workpiece positioning seat and a workpiece adjusting seat are arranged on the rotating platform, and a rotating clamp is arranged on one side of the workpiece adjusting seat. Further, the working bottom plate is provided with moving tracks on two sides of the screw, limiting metal plates are arranged on the outer sides of the moving tracks, the moving seats are arranged on the moving tracks on two sides, and grooves matched with the limiting metal plates are formed in two sides of the moving seats. Further, a limit track through hole is formed in the rotary platform, and the workpiece positioning seat and the workpiece adjusting seat are arranged in the limit track through hole. Further, the workpiece adjusting seat comprises a movable shell, a lifting air cylinder is arranged in the movable shell, a lifting plate is arranged at the output end of the lifting air cylinder, a front placement seat and a rear placement seat are connected to the lifting plate through a main shaft, auxiliary shafts are arranged on the lifting plate at two sides of the main shaft, and the auxiliary shafts and the main shaft penetrate through the movable shell. Further, protruding positioning through holes are formed in two sides of the working bottom plate. Further, blocking seats are arranged on two sides of the screw. The device has the advantages that when the device is used, the driving motor drives the screw to rotate, so that the movable seat on the outer side of the screw is driven to move forwards and backwards, the auxiliary driving platform drives the rotary platform to rotate, so that the transverse position and the rotation position of the tool can be adjusted, the workpiece positioning seat is used for initially bearing the workpiece, the workpiece adjusting seat can be matched with the workpiece positioning seat in height to realize the bearing of the workpiece, the rotary clamp on the side face is used for clamping and fixing the workpiece, the workpiece positioning seat and the workpiece adjusting seat can be used for adapting to workpieces with different sizes and different lengths, and meanwhile, the whole device integrally moves instead of independently moves, so that the workpiece cannot be damaged, and the application range is wide. Drawings Fig. 1 is a schematic view of the overall structure of the present utility model. Fig. 2 is a schematic view of a workpiece adjustment seat according to the present utility model. The reference numerals in the drawing indicate that 1, a working bottom plate, 2, a driving motor, 3, a screw rod, 4, a moving seat, 5, an auxiliary driving platform, 6, a rotating platform, 7, a workpiece positioning seat, 8, a workpiece adjusting seat, 81, a moving shell, 82, a lifting cylinder, 83, a lifting plate, 84, a main shaft, 85, a pre-arranged seat, 86, a post-arranged seat, 87, an auxiliary shaft, 9, a rotating clamp, 10, a moving track, 11, a limiting sheet metal, 12, a limiting track through hole, 13, a positioning through hole, 14 and a blocking seat. Detailed Description The present utility mo