CN-224223918-U - Grabbing manipulator compatible with various silicon wafer boxes

Abstract

The application discloses a grabbing manipulator compatible with various silicon wafer boxes, which comprises a supporting seat, wherein a supporting arm with adjustable height is arranged on the supporting seat, a cantilever bottom plate is arranged at the upper end of the supporting arm, two groups of cantilever assembly seats with adjustable distances are arranged on the cantilever bottom plate and driven by a multi-stage power driving assembly arranged on the supporting seat, a connecting arm is arranged at the front end of the cantilever assembly seat, and a box hanging bracket hand for clamping the silicon wafer boxes is arranged at one end of the connecting arm far away from the cantilever assembly seat. Compared with the prior art, the grabbing manipulator provided by the application has the advantages that higher operation efficiency, accuracy and flexibility are provided in the process of carrying the silicon wafer boxes, the operation risk is reduced, and the silicon wafer cleaning machine is more efficient and reliable when processing the silicon wafer boxes with different specifications.

Inventors

• WANG YUNFEI
• JIA SHIJIE
• WEI SHOUCHONG
• WANG CONGYANG

Assignees

• 磐石创新(江苏)电子装备有限公司

Dates

Publication Date

20260512

Application Date

20230918

Claims (5)

1. 1. The utility model provides a can compatible multiple silicon wafer box snatch manipulator, includes supporting seat (1), its characterized in that, be equipped with highly adjustable support arm (2) on supporting seat (1), the upper end of support arm (2) is equipped with cantilever bottom plate (3), be equipped with two sets of distance adjustable cantilever assembly seat (4) and cantilever assembly seat (4) on cantilever bottom plate (3) by the multistage power drive assembly drive of setting on supporting seat (1), the front end of cantilever assembly seat (4) is equipped with linking arm (5), the one end that cantilever assembly seat (4) was kept away from to linking arm (5) is equipped with box stores pylon hand (7) that are used for pressing from both sides tight silicon wafer box (6).
2. 2. The grabbing manipulator compatible with multiple silicon wafer cassettes according to claim 1, wherein two linear guide rails (8) are oppositely arranged on the cantilever bottom plate (3), and bottoms of the two cantilever assembly seats (4) are respectively connected with the two linear guide rails (8) in a sliding mode through linear sliding blocks (9).
3. 3. The grabbing manipulator of claim 1 or 2, wherein the multi-stage power driving assembly is an electric telescopic cylinder (10), and the output end of the electric telescopic cylinder (10) is fixedly connected with the cantilever assembly seat (4).
4. 4. A gripping robot compatible with multiple silicon wafer cassettes according to claim 3, wherein a plurality of position switches (11) are arranged on the cantilever base plate (3) side by side, and a position switch sensing piece (12) matched with the position switches (11) is arranged on one side of each cantilever assembly seat (4).
5. 5. The grabbing manipulator compatible with multiple silicon wafer cassettes according to claim 1, wherein the inside of the supporting seat (1) is provided with an installation cavity (13), the bottom end of the supporting seat (1) is provided with an opening, the bottom end of the supporting arm (2) penetrates through the opening and is in sliding fit with the opening, the installation cavity (13) is rotationally provided with a longitudinally arranged transmission screw (14), the bottom end of the transmission screw (14) is driven by a driving motor (15) arranged at the bottom of the supporting seat (1), the back surface of the bottom of the supporting arm (2) is also connected with a lifting plate (16), and a transmission screw (17) in threaded fit with the transmission screw (14) is arranged on the lifting plate (16).

Description

Grabbing manipulator compatible with various silicon wafer boxes Technical Field The application relates to the technical field of silicon wafer production, in particular to a grabbing manipulator compatible with various silicon wafer boxes. Background In the existing silicon wafer box conveying process, the silicon wafer cleaning machine can clean silicon wafers with various specifications such as 4 inches, 6 inches and 8 inches, and when the boxes with other specifications are replaced each time, the boxes with the sizes can be clamped only by replacing mechanical hangers with different sizes, so that the time is long, the replacement process is long, and if the installation is not in accordance with the requirements, the silicon wafers in the chip boxes are easy to clamp, or the boxes are too loose to fall off. Disclosure of utility model In order to overcome the technical defects, the application provides the grabbing manipulator compatible with various silicon wafer boxes, so that the manipulator can rapidly switch different opening and closing intervals, in other words, the manipulator can rapidly grab silicon wafer boxes with different sizes, and the grabbing action is accurate to operate. According to the application, the grabbing manipulator compatible with various silicon wafer boxes comprises a supporting seat, wherein a supporting arm with adjustable height is arranged on the supporting seat, a cantilever bottom plate is arranged at the upper end of the supporting arm, two groups of cantilever assembly seats with adjustable distances are arranged on the cantilever bottom plate and driven by a multi-stage power driving assembly arranged on the supporting seat, a connecting arm is arranged at the front end of the cantilever assembly seat, and a box hanging bracket hand for clamping the silicon wafer boxes is arranged at one end of the connecting arm far away from the cantilever assembly seat. Preferably, two linear guide rails are oppositely arranged on the cantilever bottom plate, and the bottoms of the two cantilever assembly seats are respectively connected with the two linear guide rails in a sliding manner through linear sliding blocks. Preferably, the multistage power driving assembly is an electric telescopic cylinder, and the output end of the electric telescopic cylinder is fixedly connected with the cantilever assembly seat. Preferably, the cantilever bottom plate is provided with a plurality of position switches side by side, and one side of each cantilever assembly seat is provided with a position switch sensing piece matched with the position switch. Preferably, the inside of supporting seat is the installation cavity, be equipped with the opening on the supporting seat and the bottom of support arm pass the opening and with opening sliding fit, the installation intracavity rotates and is equipped with the drive lead screw of longitudinal arrangement, the bottom of drive lead screw is through setting up the driving motor drive in the supporting seat bottom, the back of support arm bottom still is connected with lifter plate and is equipped with on the lifter plate with drive lead screw thread fit's transmission nut. Compared with the prior art, the grabbing manipulator compatible with various silicon wafer boxes has the advantages that: 1. The grabbing manipulator can clamp silicon wafer boxes with various specifications without replacing mechanical hangers with different sizes, so that the time and effort of a switching process are reduced, and the operation efficiency is improved. 2. The silicon wafer box can be accurately positioned and clamped by the manipulator through the position switch and the multi-stage power driving assembly, so that the accurate clamping of silicon wafer boxes with different sizes is ensured, and the risk of clamping errors is reduced. 3. The height of the silicon wafer box can be adjusted by the manipulator according to the requirement, so that the silicon wafer box is suitable for different working environments and requirements, and the height-adjustable performance is beneficial to flexibly coping with different situations in the operation process. In general, the grabbing manipulator provided by the application provides higher operation efficiency, accuracy and flexibility in the process of carrying the silicon wafer boxes, reduces operation risks, and ensures that the silicon wafer cleaning machine is more efficient and reliable when processing silicon wafer boxes with different specifications. Drawings Fig. 1 is a schematic structural view of a gripping robot compatible with a plurality of silicon wafer cassettes according to the present application. Fig. 2 is a schematic view of a partially enlarged structure of a cantilever base plate in a gripping robot compatible with a plurality of silicon wafer cassettes according to the present application. Fig. 3 is a schematic view of a front panel of a gripper robot removing support base compatible with a p