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CN-224223924-U - Clamping mechanism, mechanical arm and transfer robot

CN224223924UCN 224223924 UCN224223924 UCN 224223924UCN-224223924-U

Abstract

The application relates to the technical field of clamping mechanisms and discloses a clamping mechanism, a mechanical arm and a transfer robot, wherein the clamping mechanism comprises a supporting arm and a clamping jaw device, a first motor is arranged on the supporting arm, and the supporting arm is used for being connected with the mechanical arm; the clamping jaw device comprises a mounting bracket, a second motor and a clamping jaw assembly, wherein one end of the mounting bracket is connected with the first motor, the first motor is used for driving the clamping jaw device to rotate relative to the supporting arm, the clamping jaw assembly is arranged at the other end of the mounting bracket and comprises a first clamping jaw and a second clamping jaw, the second motor is arranged in the mounting bracket and is used for driving the first clamping jaw and the second clamping jaw to be close to each other or far away from each other. The application aims to solve the technical problems that a mechanical arm cannot swing flexibly in a small space, the clamping difficulty is high, and the carrying efficiency of a carrying robot is low.

Inventors

  • XU JIN
  • BIAN XU
  • ZHANG TAO
  • HUANG BAISHEN
  • ZHENG KAIYU
  • Zhan Yonghuang

Assignees

  • 湖州优艾智合机器人科技有限公司

Dates

Publication Date
20260512
Application Date
20250427

Claims (11)

  1. 1. The utility model provides a mechanism is got to clamp, is applied to transfer robot, transfer robot includes the arm, its characterized in that, it includes to press from both sides to get the mechanism: the support arm is provided with a first motor and is used for being connected with the mechanical arm; the clamping jaw device comprises a mounting bracket, a second motor and a clamping jaw assembly, one end of the mounting bracket is connected with the first motor, and the first motor is used for driving the clamping jaw device to rotate relative to the supporting arm; The clamping jaw assembly is arranged at the other end of the mounting bracket and comprises a first clamping jaw and a second clamping jaw, the second motor is arranged in the mounting bracket and used for driving the first clamping jaw and the second clamping jaw to be close to or far away from each other.
  2. 2. The gripping mechanism of claim 1 wherein the support arm includes a first arm body and a second arm body, the first arm body being spaced apart from the second arm body, at least a portion of the mounting bracket extending between the first arm body and the second arm body; The first arm body or the second arm body is provided with a shell, the first motor is installed in the shell, and a main shaft of the first motor extends from the inside of the shell to the position between the first arm body and the second arm body and is assembled and fixed with the installation support.
  3. 3. The clamping mechanism according to claim 2, wherein the shell is arranged on the second arm body, and a mounting groove is formed in one side of the first arm body facing the second arm body, or the shell is arranged on the first arm body, and a mounting groove is formed in one side of the second arm body facing the first arm body; the mounting bracket is provided with a rotating shaft, the rotating shaft is fixedly assembled with the main shaft of the first motor, and the rotating shaft is partially and rotatably connected in the mounting groove.
  4. 4. The clamping mechanism of claim 2, wherein a limiting member is disposed between the first arm and the second arm, the limiting member being disposed on the first arm or the second arm, and the limiting member being configured to limit a rotation range of the clamping jaw device relative to the support arm.
  5. 5. The gripping mechanism of claim 2, wherein a position sensor is disposed between the first arm and the second arm, the position sensor being disposed on the first arm or the second arm, the position sensor being configured to detect whether the jaw device is located at an initial position.
  6. 6. The gripping mechanism of claim 1 wherein the jaw device comprises a first drive block, a second drive block, a first transmission member and a second transmission member, the first drive block and the second drive block being drivingly connected to the second motor; one end of the first transmission piece, which is close to the second transmission piece, is fixedly connected with the first driving block, and one end of the first transmission piece, which is far away from the second transmission piece, is fixedly connected with the first clamping jaw; One end of the second transmission piece, which is close to the first transmission piece, is fixedly connected with the second driving block, and one end of the second transmission piece, which is far away from the first transmission piece, is fixedly connected with the second clamping jaw.
  7. 7. The clamping mechanism of claim 1, wherein the mounting bracket is further provided with a material detection device for detecting whether material exists in front of the first clamping jaw and the second clamping jaw.
  8. 8. The clamping mechanism of claim 1, wherein the support arm is further provided with a weight, the weight being disposed at an end of the support arm remote from the jaw assembly.
  9. 9. The gripping mechanism of claim 1 wherein the support arm is further provided with identification means for identifying coded information of the material.
  10. 10. A robotic arm comprising a robotic arm body and a gripping mechanism according to any one of claims 1 to 9, the robotic arm body being connected to the support arm.
  11. 11. A transfer robot comprising a robot body and the robot arm according to claim 10, wherein the robot arm is connected to the robot body.

Description

Clamping mechanism, mechanical arm and transfer robot Technical Field The application relates to the technical field of clamping mechanisms, in particular to a clamping mechanism, a mechanical arm and a transfer robot. Background In the semiconductor manufacturing industry, a wafer cassette is a carrier for carrying and protecting wafers, and stability of the wafer cassette is related to quality of the wafers during handling operations. Traditional wafer box handling mode mainly relies on manual operation, and intensity of labour is big, and is inefficiency, receives the influence of human factor moreover, increases the risk that the wafer damaged. In the related art, a wafer cassette is carried by a carrying robot including a robot arm, the robot arm being provided at its end with a gripping mechanism for gripping the wafer cassette. Because the clamping mechanism is fixedly connected with the mechanical arm, the clamping direction of the clamping mechanism can be adjusted only by rotating the mechanical arm, and the mechanical arm can swing greatly when performing complex multi-axis linkage. But the mechanical arm cannot swing flexibly in a smaller space, so that the clamping difficulty is high, and the carrying efficiency of the robot is reduced. Disclosure of utility model The application aims to provide a clamping mechanism, a mechanical arm and a transfer robot, which are used for solving the technical problems that the mechanical arm cannot swing flexibly in a small space, the clamping difficulty is high, and the transfer efficiency of the transfer robot is low. In a first aspect, the present application provides a gripping mechanism applied to a transfer robot, the transfer robot including a mechanical arm, the gripping mechanism including: the support arm is provided with a first motor and is used for being connected with the mechanical arm; the clamping jaw device comprises a mounting bracket, a second motor and a clamping jaw assembly, one end of the mounting bracket is connected with the first motor, and the first motor is used for driving the clamping jaw device to rotate relative to the supporting arm; The clamping jaw assembly is arranged at the other end of the mounting bracket and comprises a first clamping jaw and a second clamping jaw, the second motor is arranged in the mounting bracket and used for driving the first clamping jaw and the second clamping jaw to be close to or far away from each other. In the clamping mechanism, the supporting arm comprises a first arm body and a second arm body, wherein the first arm body and the second arm body are arranged at intervals, and at least part of the mounting bracket extends between the first arm body and the second arm body; The first arm body or the second arm body is provided with a shell, the first motor is installed in the shell, and a main shaft of the first motor extends from the inside of the shell to the position between the first arm body and the second arm body and is assembled and fixed with the installation support. In the clamping mechanism, the shell is arranged on the second arm body, and one side of the first arm body, which faces the second arm body, is provided with a mounting groove; the mounting bracket is provided with a rotating shaft, the rotating shaft is fixedly assembled with the main shaft of the first motor, and the rotating shaft is partially and rotatably connected in the mounting groove. In the clamping mechanism, a limiting piece is arranged between the first arm body and the second arm body, the limiting piece is arranged on the first arm body or the second arm body, and the limiting piece is used for limiting the rotation range of the clamping jaw device relative to the supporting arm. In the clamping mechanism, a position sensor is arranged between the first arm body and the second arm body, the position sensor is arranged on the first arm body or the second arm body, and the position sensor is used for detecting whether the clamping jaw device is positioned at an initial position or not. In the clamping mechanism, the clamping jaw device comprises a first driving block, a second driving block, a first transmission piece and a second transmission piece, wherein the first driving block and the second driving block are in transmission connection with the second motor; one end of the first transmission piece, which is close to the second transmission piece, is fixedly connected with the first driving block, and one end of the first transmission piece, which is far away from the second transmission piece, is fixedly connected with the first clamping jaw; One end of the second transmission piece, which is close to the first transmission piece, is fixedly connected with the second driving block, and one end of the second transmission piece, which is far away from the first transmission piece, is fixedly connected with the second clamping jaw. In the clamping mechanism, the mounting bracket is further provided wit