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CN-224224199-U - Processing equipment for three-hole ceramic guide rail

CN224224199UCN 224224199 UCN224224199 UCN 224224199UCN-224224199-U

Abstract

The utility model discloses processing equipment for a three-hole ceramic guide rail, which belongs to the field of semiconductor processing equipment and comprises a support frame, a workbench for bearing the three-hole ceramic guide rail, a reciprocating linear cutting assembly and a cutting line of the reciprocating linear cutting assembly, wherein the workbench is movably connected with the support frame through a first driving assembly, the cutting line of the reciprocating linear cutting assembly is used for penetrating through a prefabricated small hole of the three-hole ceramic guide rail, and the reciprocating linear cutting assembly is movably connected with the support frame through a second driving assembly. The reciprocating linear cutting assembly comprises two drivers, two wire wheels and two cutting lines, wherein the fixed ends of the two drivers are connected with the driving end of the second driving assembly, the two wire wheels are correspondingly connected with the driving ends of the two drivers, and the cutting lines are matched with the two wire wheels. The two drivers are axisymmetrically arranged about the workbench, and the two wire wheels are axisymmetrically arranged about the workbench. The utility model has the technical effects that the utility model is convenient for preventing the thin wall between the holes from breaking, and can also improve the processing precision of the holes.

Inventors

  • FU SHUN
  • WANG YIMING
  • GENG JIAN
  • DING DING

Assignees

  • 杭州睿昇半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20250410

Claims (8)

  1. 1. The processing equipment of three hole ceramic guide rail, characterized by includes: A support (1); The workbench (2) is used for bearing the three-hole ceramic guide rail (6), and the workbench (2) is movably connected with the support frame (1) through a first driving component; The reciprocating linear cutting assembly (3), a cutting line (33) of the reciprocating linear cutting assembly (3) is used for penetrating through a prefabricated small hole (61) of the three-hole ceramic guide rail (6), and the reciprocating linear cutting assembly (3) is movably connected with the support frame (1) through a second driving assembly.
  2. 2. A machining apparatus for three-hole ceramic guide rails according to claim 1, characterized in that the reciprocating wire cutting assembly (3) comprises: The fixed ends of the two drivers (31) are connected with the driving end of the second driving assembly; The two wire wheels (32), the two wire wheels (32) are correspondingly connected with the driving ends of the two drivers (31), and the cutting wires (33) are matched with the two wire wheels (32).
  3. 3. A machining device for three-hole ceramic guide rails according to claim 2, characterized in that two of the drivers (31) are arranged axisymmetrically with respect to the table (2) and two of the wire wheels (32) are arranged axisymmetrically with respect to the table (2).
  4. 4. A machining apparatus for a three-hole ceramic rail according to any one of claims 1 to 3, further comprising: a groove (21) arranged on the workbench (2); And the fixing component (4) is in sliding locking fit with the groove (21), and the fixing component (4) is used for abutting against the three-hole ceramic guide rail (6).
  5. 5. The machining equipment for the three-hole ceramic guide rail according to claim 4, wherein the fixing assembly (4) comprises a fixing block (41) and a plurality of fasteners (42), the fixing block (41) is in sliding fit with the groove (21), the fixing block (41) is used for abutting against the three-hole ceramic guide rail (6), and the fasteners (42) are in threaded connection with the fixing block (41) and abut against the workbench (2).
  6. 6. The processing device of the three-hole ceramic guide rail according to claim 5, wherein the groove (21) is in a dovetail shape, one end of the fixed block (41) is connected with a dovetail (43), and the dovetail (43) and the dovetail are in sliding fit.
  7. 7. A machining device for three-hole ceramic rails according to any of the claims 1-3, characterized by further comprising several studs (5) each connected to the support frame (1).
  8. 8. The processing device of the three-hole ceramic guide rail according to claim 7, further comprising a plurality of anti-slip pads, wherein the anti-slip pads are correspondingly connected with one ends of the legs (5) far away from the supporting frame (1).

Description

Processing equipment for three-hole ceramic guide rail Technical Field The utility model relates to semiconductor processing equipment, in particular to processing equipment for a three-hole ceramic guide rail. Background The three-hole ceramic guide rail is a semiconductor device for supporting and guiding wafers to pass through different processing stations, and has the advantage of good stability. Related three-hole ceramic guide rails are generally processed through hydrostatic forming, but related hydrostatic forming is limited by the characteristic of thin walls among holes, so that the thin walls among holes are easily broken, and the machining precision of the holes is also easily low. Disclosure of utility model The utility model aims to provide the processing equipment for the three-hole ceramic guide rail, which is convenient for preventing the thin wall between holes from breaking and improving the processing precision of the holes. The technical scheme is as follows: A processing apparatus for a three-hole ceramic rail, comprising: a support frame; The workbench is used for bearing the three-hole ceramic guide rail and is movably connected with the support frame through a first driving component; The cutting line of the reciprocating linear cutting assembly is used for penetrating through the prefabricated small holes of the three-hole ceramic guide rail, and the reciprocating linear cutting assembly is movably connected with the supporting frame through a second driving assembly. Optionally, the reciprocating wire cutting assembly includes: the fixed ends of the two drivers are connected with the driving end of the second driving assembly; The two wire wheels are correspondingly connected with the driving ends of the two drivers, and the cutting wires are matched with the two wire wheels. Optionally, the two drivers are axisymmetrically arranged with respect to the workbench, and the two wire wheels are axisymmetrically arranged with respect to the workbench. Optionally, the method further comprises: the groove is arranged on the workbench; And the fixing component is matched with the groove in a sliding locking manner and is used for abutting against the three-hole ceramic guide rail. Optionally, fixed subassembly includes fixed block and a plurality of fastener, the fixed block with recess sliding fit, the fixed block be used for with three hole ceramic guide rail conflict, a plurality of the fastener all with fixed block threaded connection, and all with the workstation conflict. Optionally, the shape of recess is the dovetail, the one end of fixed block is connected with the dovetail, the dovetail with the dovetail sliding fit. Optionally, the device further comprises a plurality of posts which are connected with the supporting frame. Optionally, the support frame further comprises a plurality of anti-slip pads, wherein the anti-slip pads are correspondingly connected with one ends of the legs far away from the support frame. The cutting line processing device has the beneficial effects that the reciprocating linear cutting assembly is started, the cutting line moves reciprocally along the X direction, the first driving assembly is started, the workbench and the three-hole ceramic guide rail are sequentially driven to move along the Y direction, so that the short side of the square macropore can be conveniently processed, the second driving assembly is started again, the cutting line moves along the Z direction, the long side of the square macropore can be conveniently processed, the prefabricated small holes are further processed into the square macropore, the other two prefabricated small holes are processed into the square macropore in the same way, and in conclusion, the cutting line is adopted for processing the square macropore, so that the thin wall between holes can be conveniently prevented from being broken, and the processing precision of the holes can be improved. Drawings FIG. 1 is one of the structural diagrams of a processing apparatus for a three-hole ceramic rail according to embodiment 1 of the present utility model; FIG. 2 is a second block diagram of a three-hole ceramic rail processing apparatus according to embodiment 1 of the present utility model; FIG. 3 is a third block diagram of a three-hole ceramic rail processing apparatus according to embodiment 1 of the present utility model; FIG. 4 is a partial view of FIG. 3A; FIG. 5 is a block diagram of a three-hole ceramic rail of example 1 of the present utility model; 1, a supporting frame, 2, a workbench, 21, a groove, 3, a reciprocating linear cutting assembly, 31, a driver, 32, a wire wheel, 33, a cutting wire, 4, a fixing assembly, 41, a fixing block, 42, a fastener, 43, a dovetail, 5, a leg, 6, a three-hole ceramic guide rail, 61, a prefabricated small hole, 62 and a square large hole. Detailed Description In order to make the technical scheme of the utility model clearer, the utility model is further described in