CN-224224220-U - Silicon ingot transverse cutting type wire cutting machine

CN224224220UCN 224224220 UCN224224220 UCN 224224220UCN-224224220-U

Abstract

The utility model provides a silicon ingot transverse cutting type wire cutting machine which comprises a frame, a bearing table and a wire cutting mechanism, wherein an X-direction feeding mechanism is arranged on the frame, the wire cutting mechanism comprises a cutting metal wire and two groups of transverse cutting winding mechanisms, a winding and unwinding mechanism is further arranged on the frame, the cutting metal wire is led out from one side of the winding and unwinding mechanism, and is wound by the other side of the winding and unwinding mechanism after passing through an auxiliary transverse cutting guide wheel, a transverse cutting supporting wheel and a main transverse cutting guide wheel of the other side of the transverse cutting winding mechanism. The utility model has reasonable structural design, the cutting metal wire is provided with a vertical cutting winding station and a transverse cutting winding station, a plurality of feeding modes are integrated on the same wire cutting machine, and after the wire cutting machine is matched with the winding station, the wire cutting machine can realize a plurality of purposes of transversely cutting, longitudinally cutting, upper and lower end surface skin cutting, circumferential side skin cutting, angle staggered longitudinal cutting and the like on a silicon ingot, thereby expanding the application range of the wire cutting machine and simultaneously reducing the input cost of machinery.

Inventors

XIA YUN
CHEN XIAOTU

Assignees

常州首嘉精密制造有限公司

Dates

Publication Date: 20260512
Application Date: 20250408

Claims (9)

1. The transverse cutting type wire cutting machine for the silicon ingot is characterized by comprising a frame, a bearing table and a wire cutting mechanism, wherein the silicon ingot is arranged on the bearing table; An X-direction feeding mechanism is arranged on the frame and drives the bearing table to linearly translate along the horizontal direction; The wire cutting mechanism comprises a cutting metal wire and two groups of transverse cutting winding mechanisms, and the two groups of transverse cutting winding mechanisms are symmetrically arranged relative to the X-direction feeding mechanism; The machine frame is provided with winding and unwinding mechanisms corresponding to each group of transverse winding mechanisms respectively, and the ends of the cut metal wires are wound by the corresponding side winding and unwinding mechanisms; Each group of transverse winding mechanism comprises a main transverse guide wheel, an auxiliary transverse guide wheel and a plurality of transverse supporting wheels, wherein the radial planes of the main transverse guide wheel and the auxiliary transverse guide wheel are parallel to the feeding direction of the X-direction feeding mechanism and are rotatably arranged relative to the machine frame; The cutting metal wire is led out from the winding and unwinding mechanism at one side, and is wound by the winding and unwinding mechanism at the other side after passing through the auxiliary transverse cutting guide wheel, the transverse cutting supporting wheel and the main transverse cutting guide wheel of the transverse cutting winding mechanism at the other side.
2. The silicon ingot transverse cutting line cutting machine as set forth in claim 1, wherein the frame is provided with a Z-direction feeding mechanism for driving the cutting mechanism to rise and fall; The Z-direction feeding mechanism comprises a Z-direction linear guide rail, a Z-direction sliding block, a Z-direction lifting workbench and a Z-direction feeding driving mechanism, wherein the Z-direction linear guide rail is arranged on the frame along the height direction, the Z-direction sliding block is arranged on the Z-direction linear guide rail in a sliding manner, the Z-direction lifting workbench is fixed on the Z-direction sliding block, the Z-direction feeding mechanism drives the Z-direction sliding block to move along the Z-direction linear guide rail, the transverse cutting winding mechanism comprises transverse cutting brackets, the transverse cutting brackets are respectively fixed on the outer side end surfaces of the Z-direction lifting workbench, and the main transverse cutting guide wheels, the transverse cutting support wheels and the auxiliary transverse cutting guide wheels are all arranged on the transverse cutting brackets on corresponding sides in a rotating manner.
3. The silicon ingot transverse cutting type wire cutting machine of claim 2, wherein each group of transverse cutting winding mechanisms corresponding to the Z-direction lifting workbench is further provided with a vertical cutting winding mechanism respectively, each group of vertical cutting winding mechanisms comprises a main vertical cutting guide wheel and an auxiliary vertical cutting guide wheel, the main vertical cutting guide wheel and the auxiliary vertical cutting guide wheel are both rotationally connected to the front end surface of the lifting workbench, and the auxiliary vertical cutting guide wheel is positioned above the main vertical cutting guide wheel; The transverse cutting winding mechanism is matched with the vertical cutting winding mechanism, and the cut metal wire is provided with two winding stations, namely a transverse cutting winding station and a vertical cutting winding station; The transverse cutting winding station is used for leading out a cut metal wire from a winding and unwinding mechanism at one side, continuously passing through an auxiliary transverse cutting guide wheel, a transverse cutting supporting wheel and a main transverse cutting guide wheel of the transverse cutting winding mechanism at the side after passing through an auxiliary vertical cutting guide wheel and a main vertical cutting guide wheel of the vertical cutting winding mechanism at the side, and then winding by a winding and unwinding mechanism at the other side after passing through the main transverse cutting guide wheel, the transverse cutting supporting wheel and the auxiliary transverse cutting guide wheel of the transverse cutting winding mechanism at the other side; And the vertical cutting winding station is used for leading out the cut metal wire from the winding and unwinding mechanism at one side, and winding the cut metal wire by the winding and unwinding mechanism at the other side after passing through the auxiliary vertical cutting guide wheel and the main vertical cutting guide wheel of the vertical cutting winding mechanism at the other side.
4. A transverse cutting machine for silicon ingots is characterized in that the winding and unwinding mechanism comprises a winding and unwinding motor, a winding and unwinding wire storage cylinder and a winding and unwinding wire guide wheel set, wherein the winding and unwinding wire storage cylinder is arranged at the output end of the winding and unwinding motor in a transmission manner, one end of a cutting metal wire is fixed with the winding and unwinding wire storage cylinder and is wound on the winding and unwinding wire storage cylinder, and the other end of the cutting metal wire is connected with the corresponding tensioning mechanism through the corresponding side after passing through the winding and unwinding wire guide wheel set and is wound.
5. The silicon ingot transverse cutting machine as set forth in claim 4, wherein the tensioning mechanism comprises a tensioning guide wheel, a tension arm rocker and a tensioning servo motor, the tensioning servo motor is fixed on the frame, one end of the tension arm rocker is fixed at the output end of the tensioning servo motor, the other end of the tension arm rocker is rotatably provided with the tensioning guide wheel, and the cutting steel wire connected with the winding and unwinding mechanism is wound with the auxiliary vertical cutting guide wheel at the corresponding side under the tensioning support of the tensioning guide wheel.
6. The silicon ingot transverse cutting machine as set forth in claim 5, wherein the winding and unwinding guide wheel group comprises an upper longitudinal guide wheel, a lower longitudinal guide wheel and a transverse guide wheel which are sequentially arranged, wherein the upper longitudinal guide wheel, the lower longitudinal guide wheel and the transverse guide wheel are arranged from top to bottom in the height direction, and the section of the cut metal wire between two adjacent guide wheels is distributed at 90 degrees.
7. A silicon ingot transverse cutting line cutting machine as set forth in claim 6, wherein a deviation rectifying device is further provided between the winding and unwinding mechanism and the winding and unwinding guide wheel group at each side, the deviation rectifying device comprises a deviation rectifying wheel, and the cut metal line between the winding and unwinding wire storage cylinder and the upper longitudinal guide wheel is contacted with and guided and supported by the deviation rectifying wheel.
8. The silicon ingot transverse cutting machine as set forth in claim 1, wherein the X-direction feeding mechanism comprises X-direction linear guide rails, X-direction sliding blocks, X-direction servo motors, horizontal moving ball screws and a rotary workbench, the X-direction linear guide rails are distributed on the machine frame in pairs along the horizontal direction, each X-direction linear guide rail is provided with the X-direction sliding block in a sliding manner, the horizontal moving ball screws are arranged on the machine frame in parallel with the X-direction linear guide rails through supporting seats, the X-direction servo motors are arranged on the machine frame, the output ends of the X-direction servo motors are in transmission connection with the horizontal moving ball screws, the X-direction sliding blocks are matched with the horizontal moving ball screws, the rotary workbench is fixed with the X-direction sliding blocks, and the bearing table is arranged on the rotary workbench.
9. The silicon ingot transverse cutting line cutting machine of claim 1, wherein the rotary workbench comprises a workbench base, a rotary motor, a driving gear and a rotary gear, the rotary motor is fixed on the workbench base, the rotary gear and the driving gear are respectively arranged on the workbench base in a rotating mode, the output end of the rotary motor is in transmission connection with the driving gear and drives the driving gear to rotate, the driving gear is in transmission connection with the rotary gear, and the bearing table is fixed on the upper end face of the rotary gear.

Description

Silicon ingot transverse cutting type wire cutting machine Technical Field The utility model relates to the technical field of wire cutting machines, in particular to a silicon ingot transverse cutting machine. Background In the production of silicon wafers, silicon ingots are grown through processes such as a Czochralski method or a directional solidification method, and then the silicon ingots are subjected to further steps such as squaring, cutting and the like, so that the silicon wafers meeting production requirements are processed. When the existing silicon ingot is produced, a large-sized polycrystalline silicon ingot is cut into a small cuboid shape by using a squarer, so that subsequent processes of cutting, grinding, chamfering, slicing and the like are facilitated. Because various problems exist in the growth of the silicon ingot, various defects (such as cracks, scratches, pollution and the like) possibly generated on the surface and various defects possibly exist in the internal crystal structure of the silicon ingot, and the defects can influence the performance and quality of the silicon wafer, the defective parts are required to be removed through skin cutting, the parts with poor crystal structures can be removed through skin cutting, the silicon wafer obtained through subsequent cutting is ensured to have higher quality, the silicon wafer with more complete crystal structure and more stable performance is obtained, the breakage rate of the silicon wafer caused by the surface defects is reduced, and the yield of the whole production process is improved. Meanwhile, the surface of the silicon ingot after the skin is cut is smoother and smoother, which is beneficial to the subsequent cutting, grinding, polishing and other processing processes, and has important significance in reducing the production cost of the silicon wafer and improving the production efficiency of the silicon wafer. The existing silicon ingot squaring machine generally adopts a diamond wire cutting technology, and the diamond wire is driven by a motor to cut a silicon ingot in a horizontal or vertical direction through a series of guide wheels and cutting wheels. Depending on the cutting mode and the apparatus structure, the ingot squarer may be classified into various types, for example, a horizontal feeding mode, a vertical feeding mode, and the like. Different feed directions correspond to different types of squarers respectively. When the silicon ingot needs to be cut in the vertical direction and the horizontal direction respectively, different squarers are needed, equipment investment is large, and production cost is high. Therefore, how to design a wire cutting machine, and integrate the squaring functions of vertical cutting and horizontal cutting at the same time becomes a problem to be solved. Disclosure of utility model The utility model aims to solve the technical problems that the utility model provides a silicon ingot transverse cutting line cutting machine which has a double-winding station design, can respectively vertically cut and horizontally cut a silicon ingot through switching of winding stations, and can further realize the skin cutting processing operation of the silicon ingot in processing. The technical scheme includes that the silicon ingot transverse cutting machine comprises a frame, a bearing table and a tangent line mechanism, wherein the silicon ingot is arranged on the bearing table, an X-direction feeding mechanism is arranged on the frame and drives the bearing table to linearly translate along the horizontal direction, the tangent line mechanism comprises a cutting metal wire and two groups of transverse winding mechanisms, the two groups of transverse winding mechanisms are symmetrically arranged relative to the X-direction feeding mechanism, a winding and unwinding mechanism is arranged on the frame corresponding to each group of transverse winding mechanisms respectively, the end part of the cutting metal wire is wound by the corresponding side winding and unwinding mechanism, each group of transverse winding mechanisms comprises a main transverse guide wheel, an auxiliary transverse guide wheel and a plurality of transverse support wheels, the radial planes of the main transverse guide wheel and the auxiliary transverse guide wheels are parallel to the feeding direction of the X-direction feeding mechanism and are rotatably arranged relative to the frame, the plurality of transverse support wheels are rotatably arranged relative to the frame, the transverse guide wheels are sequentially arranged between the main transverse guide wheels and the auxiliary transverse guide wheels, the radial planes of the transverse guide wheels are perpendicular to the feeding direction of the X-direction feeding mechanism, the cutting metal wire is led out from one side winding mechanism through the winding and unwinding mechanism, the corresponding side transverse winding mechanism, each transverse w