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CN-224225637-U - Storage box and annealing device

CN224225637UCN 224225637 UCN224225637 UCN 224225637UCN-224225637-U

Abstract

The application discloses a storage box and an annealing device, and belongs to the field of superconducting quantum chip manufacturing. The storage box comprises a body, and a first channel and a second channel which are arranged on the body. Wherein the first channel extends inwardly from the main surface of the body and has an expansion portion and a contraction portion, and the second channel, which communicates with the first channel, extends from an inner wall of a portion of the first channel. The storage box can be used for storing probes used in the process of measuring the Josephson junction resistance, so that the probes can be replaced more flexibly and conveniently in measuring equipment, and further the complex operation of measuring the Josephson junction resistance is reduced, and the measuring precision is improved.

Inventors

  • HUANG RUI
  • TIAN XIN
  • YANG HUI
  • JIA ZHILONG

Assignees

  • 本源量子计算科技（合肥）股份有限公司

Dates

Publication Date
20260512
Application Date
20250604

Claims (10)

  1. 1. A storage case, characterized by comprising: a body having a major surface defining first and second directions that define the major surface and are perpendicular to each other, and a third direction perpendicular to the major surface; A first channel extending from the main surface to the inside along a third direction and having an expansion portion and a contraction portion distributed in the first direction, and A second channel in communication with the first channel is recessed from the inner wall of the expansion in a second direction.
  2. 2. The case according to claim 1, wherein the constriction is an elongated strip-like structure; And/or, the inner wall of the expansion part is arc-shaped; and/or, along a third direction, the expansion part is convexly provided with a limiting wall away from the inner wall of the main surface.
  3. 3. The case according to claim 1, wherein the width of the expanded portion measured in the second direction is greater than the width of the contracted portion measured in the second direction; And/or the height of the expansion portion measured along the first direction is smaller than the height of the contraction portion measured along the first direction.
  4. 4. The case of claim 1, wherein the depth of the second channel is less than the depth of the first channel in the third direction.
  5. 5. The case of claim 1 or 4, wherein in the third direction, the depth of the expansion portion is equal to the depth of the contraction portion.
  6. 6. The case according to claim 1, wherein the second passages are arranged in pairs and are recessed in a second direction from opposite inner walls of the expansion portion, respectively.
  7. 7. The cartridge of claim 6, wherein the two second channels in a pair are mirror symmetrically disposed.
  8. 8. The cartridge of claim 1, wherein the first and second channels are arranged in pairs to form a channel group, and the body is provided with a plurality of pairs of channel groups.
  9. 9. The cartridge of claim 8, wherein the plurality of pairs of channel groups are arranged in an array of rows and columns, and wherein the channel groups of a single column but different rows are offset.
  10. 10. An annealing apparatus, comprising: A laser annealer for annealing the josephson junction; and, the storage box according to any one of claims 1 to 7, provided in the laser annealing instrument.

Description

Storage box and annealing device Technical Field The application belongs to the field of quantum information, in particular to the field of manufacturing superconducting quantum chips, and particularly relates to a storage box and an annealing device. Background In the process of manufacturing superconducting quantum chips, one important process is the manufacture of superconducting qubits. The key step is to determine that the resistance of the manufactured Josephson junction meets the design requirements. There is therefore a need for josephson junction resistance measurements and when the measurements determine that the resistance does not meet the design expectations, an annealing process in vacuum is required. Accordingly, a second measurement is also required after annealing to verify the resistance value after annealing. There is thus frequent operation and thus an increase in the difficulty of operation, and the accuracy of the measurement is also affected by frequent removal and placement of the josephson junctions. Disclosure of utility model Examples of the present application provide a storage box, and an annealing device. The scheme can be used for conveniently annealing the Josephson junction, and the resistance correction operation of the Josephson junction is simplified and the operation difficulty is reduced by feeding back and verifying the annealing process and parameters through the measurement result. The exemplary embodiment of the present application is implemented as follows. In a first aspect, an example of the present application discloses a storage case. It comprises the following steps: a body having a major surface defining first and second directions that define the major surface and are perpendicular to each other, and a third direction perpendicular to the major surface; a first channel extending from the main surface to the inside along a third direction and having an expansion portion and a contraction portion distributed in the first direction, and A second channel, which communicates with the first channel, is recessed from the inner wall of the expansion portion in a second direction. According to some examples of the application, the constriction is of an elongated strip-like structure and/or the inner wall of the expansion is curved and/or the inner wall of the expansion remote from the main surface is provided with a limiting wall protruding in a third direction. According to some examples of the application, the width of the expansion measured in the second direction is greater than the width of the contraction measured in the second direction, and/or the height of the expansion measured in the first direction is less than the height of the contraction measured in the first direction. According to some examples of the application, in the third direction, the depth of the second channel is less than the depth of the first channel. According to some examples of the application, in the third direction, the depth of the expansion portion is equal to the depth of the contraction portion. According to some examples of the application, the second channels are arranged in pairs and are recessed in a second direction from opposite inner walls of the expansion, respectively. According to some examples of the application, the two second channels of the pair are arranged mirror symmetrically. According to some examples of the application, the first channels and the second channels are configured in pairs to form a channel group, and the body is provided with a plurality of pairs of channel groups. According to some examples of the application, the pairs of channel groups are arranged in an array of rows and columns, and the channel groups of the same column but different rows are arranged in an offset manner. In a second aspect, examples of the present application disclose an annealing apparatus. The annealing device comprises a laser annealing instrument for annealing the Josephson junction, and a storage box as described above, and the storage box is arranged in the laser annealing instrument. The beneficial effects are that: The magazine of the present examples may be fixed by its body or mounted in an annealing device for annealing the josephson junction (e.g. a laser annealer, may have means for measuring the resistance of the josephson junction by a probe) in order to change the probe when required. In this way, after annealing the josephson junction, it is not necessary to remove the josephson junction, but rather the resistance of the josephson junction can be measured continuously in the laser annealing device, so that it can be determined whether the annealing has been performed correctly or whether the desired annealing effect has been achieved on the basis of the measured values obtained. In particular, when the measurement result does not reach the desired annealing effect, it is also convenient to immediately continue the re-annealing. By the method, the annealing