CN-224225966-U - Aerial track structure and aerial carrier system

Abstract

The utility model discloses an aerial track structure and an aerial carrier system, wherein the aerial track structure comprises a first track body and a second track body which are parallel, have the same height and are arranged at intervals, a protective cover which is connected to two sides of the first track body and the second track body and covers the upper parts of the first track body and the second track body and has a U-shaped cross section is arranged between the first track body and the second track body, and the protective cover, the first track body and the second track body enclose a running channel for a running mechanism of the aerial carrier to move in. According to the utility model, the space above the first track body and the second track body is wrapped by the protective cover, so that the dust accumulation on the first track body and the second track body cannot be blown down by wind blown out by the fan filter unit, adverse effects caused by scattering dust to a process area are effectively avoided, and the cleanliness of a clean room is improved.

Inventors

• GUO MING
• ZHOU YONGFU
• WEN RENHAO

Assignees

• 苏州新施诺半导体设备股份有限公司

Dates

Publication Date

20260512

Application Date

20250526

Claims (10)

1. 1. The aerial track structure comprises a first track body and a second track body which are parallel, have the same height and are arranged in a gap, and is characterized in that a protective cover which is connected to two sides of the first track body and the second track body and covers the upper parts of the first track body and the second track body is U-shaped in cross section, and the protective cover and the first track body and the second track body enclose a running channel for a running mechanism of an aerial carrier to move in.
2. 2. The overhead track structure of claim 1 wherein the first track body and the second track body are connected to the ceiling bottom by a set of adjustment assemblies for leveling and raising the first track body and the second track body.
3. 3. The aerial track structure of claim 2, wherein the adjusting assembly comprises a cross beam which is arranged above the first track body and the second track body in a crossing manner, two adjusting rods which are respectively corresponding to the first track body and the second track body are connected to the cross beam, connecting pieces are arranged on the adjusting rods in a height-adjustable manner, one connecting piece is connected to the outer side of the first track body, and the other connecting piece is connected to the outer side of the second track body.
4. 4. The aerial track structure of claim 3 wherein the shield is coupled to the connector.
5. 5. The overhead track structure of claim 3 wherein the vertical portions of the two connectors are spaced from the first track body and the second track body, and the two side panels of the shield are positioned at the spacing between the vertical portions of the two connectors and the first track body and the second track body.
6. 6. The overhead track structure of claim 1 wherein the shield connects the first and second track bodies by a set of U-shaped fasteners, the two side connections of the U-shaped fasteners being connected outside of the first and second track bodies.
7. 7. The overhead track structure of claim 6 wherein the top and side panels of the shield are connected to the two side connections and top panels of the U-shaped mount.
8. 8. The overhead rail structure of any one of claims 1-7, wherein the first rail body and the second rail body are further provided with a running mechanism detection assembly, the running mechanism detection assembly comprises an outer cover fixed on the first rail body and the second rail body, and the outer cover is integrally connected with the protective cover.
9. 9. The overhead track structure of claim 8 wherein the housing has a detector for detecting at least an outer diameter of a road wheel of the running gear.
10. 10. An overhead trolley system comprising an overhead track structure as claimed in any one of claims 1 to 9.

Description

Aerial track structure and aerial carrier system Technical Field The utility model relates to the field of automatic material conveying, in particular to an aerial track structure and an aerial carrier system. Background Overhead hoist transport vehicles (Overhead Hoist Transport, OHT) are one of the most important stand-alone devices in AMHS systems, and are mainly used for receiving instructions from an upper control system and moving to a designated position to complete loading or unloading of wafer cassettes (Front Opening Unified Pod, FOUPs). One commonly used OHT system is disclosed in the patent document with the grant publication CN 117131884B. In this structure, dust deposit (including but not limited to, wheel of overhead carrier and rail abrasion) exists on the rail, and because the rail top is uncovered, and the clean room can be provided with a Fan Filter Unit (FFU) for cleaning air in the clean room, when the Fan Filter Unit blows down from the roof, the air current can blow down the dust deposit on the rail, pollute the process area, and cause adverse effect. Disclosure of utility model The utility model aims to solve the problems in the prior art and provides an aerial track structure and an aerial carrier system. The aim of the utility model is achieved by the following technical scheme: The aerial track structure comprises a first track body and a second track body which are parallel, have the same height and are arranged in a clearance way, wherein a protective cover which is connected to two sides of the first track body and covers the upper side of the first track body and the upper side of the second track body and has a U-shaped cross section is arranged between the first track body and the second track body, and the protective cover and the first track body and the second track body enclose into an operation channel for a travelling mechanism of an aerial carrier to move in. Preferably, the first rail body and the second rail body are connected to the bottom of the ceiling through a group of adjusting components for leveling and heightening the first rail body and the second rail body. Preferably, the adjusting component comprises a cross beam which is arranged above the first track body and the second track body in a crossing manner, two adjusting rods which are respectively corresponding to the first track body and the second track body are connected to the cross beam, connecting pieces are arranged on the adjusting rods in a height-adjustable manner, one connecting piece is connected to the outer side of the first track body, and the other connecting piece is connected to the outer side of the second track body. Preferably, a gap is kept between the vertical parts of the two connecting pieces and the first rail body and the second rail body, and the two side plates of the protective cover are positioned at the gap between the vertical parts of the two connecting pieces and the first rail body and the second rail body. Preferably, the protective cover is connected with the connecting piece. Preferably, the protection cover is connected with the first rail body and the second rail body through a group of U-shaped fixing pieces, and two side connecting parts of the U-shaped fixing pieces are connected with the outer sides of the first rail body and the second rail body. Preferably, the top plate and the two side plates of the protective cover are connected with the two side connecting parts and the top plate of the U-shaped fixing piece. Preferably, the first track body and the second track body are further provided with a running mechanism detection assembly, the running mechanism detection assembly comprises an outer cover fixed on the first track body and the second track body, and the outer cover is connected with the protective cover into a whole. Preferably, a detecting instrument for detecting at least the outer diameter of the travelling wheel of the travelling mechanism is arranged in the outer cover. An aerial carrier system comprising an aerial track structure as defined in any one of the preceding claims. The technical scheme of the utility model has the advantages that: according to the utility model, the space above the first track body and the second track body is wrapped by the protective cover, so that the dust accumulation on the first track body and the second track body cannot be blown down by wind blown out by the fan filter unit, adverse effects caused by scattering dust to a process area are effectively avoided, and the cleanliness of a clean room is improved. The first track body and the second track body are connected with the ceiling through the adjusting component, so that the height adjustment and the leveling of the first track body and the second track body can be conveniently carried out, and the assembly and the debugging of the system are facilitated. The protection cover is connected with the adjusting component and the U-shaped fixing piece, so that