CN-224225970-U - Film coating support conveying system

CN224225970UCN 224225970 UCN224225970 UCN 224225970UCN-224225970-U

Abstract

The utility model discloses a film coating bracket conveying system which comprises a vacuum chamber, a grabbing component, a suspension bracket, a conveyor and a transfer mechanism. The vacuum chamber is provided with openings at two ends, one end is provided with a bin inlet, the other end is provided with a bin outlet, the suspension bracket is arranged between the grabbing component and the vacuum chamber, and the conveyor and the suspension bracket are arranged in a straight line to form a production line. The transfer mechanism comprises two transfer carts and an adaptive ground rail, which are respectively arranged at the bin inlet and the bin outlet of the vacuum chamber. The grabbing assembly comprises a manipulator, a fixture tool and a fixture plate, wherein the fixture tool comprises a clamping plate, two ends of the clamping plate are respectively provided with a fixed clamping groove and a sliding clamping groove, clamping cylinders are arranged at the bottoms of the sliding clamping grooves, and two limiting cylinders are symmetrically arranged on the longitudinal direction of the clamping plate. The utility model designs the vacuum chamber with two open ends, adopts the pipeline type conveying mechanism outdoors and forms a closed transmission chain by matching with the transfer trolley. This process greatly improves the efficiency and quality of use of the device.

Inventors

DANG YAJUN
CHEN XIN
ZHAO XUEZHENG
GAO JUNZHENG

Assignees

南阳清水科技有限公司

Dates

Publication Date: 20260512
Application Date: 20250530

Claims (4)

1. A film coating bracket conveying system is characterized by comprising a vacuum chamber, a grabbing component, a hanging bracket, a conveyor and a transfer mechanism, wherein two ends of the vacuum chamber are provided with openings, one end of the vacuum chamber is provided with a bin inlet, the other end of the vacuum chamber is provided with a bin outlet, the hanging bracket is arranged between the grabbing component and the vacuum chamber, the conveyor and the hanging bracket are arranged in a straight line, the transfer mechanism comprises an adaptive transfer vehicle A, a ground rail A, a transfer vehicle B and a ground rail B, the ground rail A is arranged at one end of the bin inlet of the vacuum chamber, and the ground rail B is arranged at one end of the bin outlet of the vacuum chamber.
2. A film plating rack transport system according to claim 1, wherein the number of the hanging racks is two, which are respectively arranged at both sides of the conveyor, and a rotation mechanism is provided at the top of the hanging racks.
3. The coating bracket conveying system according to claim 1, wherein the grabbing assembly comprises a manipulator, a fixture tool and a fixture plate for placing a coating workpiece, the fixture tool comprises a clamping plate, a fixed clamping groove and a sliding clamping groove are respectively arranged at two ends of the clamping plate, a clamping cylinder is arranged at the bottom of the sliding clamping groove, and the clamping plate is connected with the manipulator.
4. The coating bracket conveying system according to claim 3, wherein the clamping plate is a U-shaped metal plate, two limiting cylinders are symmetrically arranged in the longitudinal direction of the clamping plate, and the jig plate is rectangular, and upper and lower ends of the jig plate are provided with through holes for hanging.

Description

Film coating support conveying system Technical Field The utility model relates to the technical field of sputtering coating, in particular to a coating bracket conveying system. Background In the sputtering coating process, the target is positioned in the middle of the vacuum chamber, and the workpiece to be coated is placed on a cylindrical support of the vacuum chamber, so that the cylindrical support needs to rotate at a high speed in the process that the target is sputtered towards the surface of the material, and the surface of the material is uniformly coated with a film. Along with the rapid development of the vacuum coating industry, the requirements of clients on coating efficiency are higher and higher, and the conveying and transferring of the coating bracket traditionally uses a reciprocating type warehouse entry (one end of which is open) and warehouse exit mechanism, so that the frequent air suction and air discharge of the vacuum chamber can not be avoided, and the time waste is too much. There is a need for a new mechanism to replace the traditional, inefficient delivery system. Disclosure of utility model In view of the above problems, an object of the present utility model is to provide a high-efficiency coating bracket conveying system to improve production efficiency. In order to achieve the above purpose, the utility model adopts the following technical scheme: A film coating bracket conveying system comprises a vacuum chamber, a grabbing component, a suspension bracket, a conveyor and a transfer mechanism, wherein two ends of the vacuum chamber are opened, one end of the vacuum chamber is a warehouse inlet, the other end of the vacuum chamber is a warehouse outlet, the suspension bracket is arranged between the grabbing component and the vacuum chamber, the conveyor and the suspension bracket are arranged in a straight line, the transfer mechanism comprises an adaptive transfer vehicle A and a ground rail A, a transfer vehicle B and a ground rail B, the ground rail A is arranged at one end of the warehouse inlet of the vacuum chamber, and the ground rail B is arranged at one end of the warehouse outlet of the vacuum chamber. Further, the two suspension brackets are respectively arranged at two sides of the conveyor, and a rotating mechanism is arranged at the top of the suspension brackets. The grabbing assembly comprises a manipulator, a fixture tool and a fixture plate for placing a coated workpiece, wherein the fixture tool comprises a clamping plate, a fixed clamping groove and a sliding clamping groove are respectively arranged at two ends of the clamping plate, a clamping cylinder is arranged at the bottom of the sliding clamping groove, and the clamping plate is connected with the manipulator. The clamping plate is a U-shaped metal plate, two limiting cylinders are symmetrically arranged in the longitudinal direction of the clamping plate, the jig plate is rectangular, and through holes for hanging are formed in the upper end and the lower end of the jig plate. Compared with the prior art, the vacuum chamber has the beneficial effects that the vacuum chamber is designed to be opened at two ends, one end of the vacuum chamber is provided with the bin inlet, and the other end of the vacuum chamber is provided with the bin outlet. The outdoor conveying mechanism with pipeline is adopted, a movable transfer trolley is designed at the warehouse entry position, a film coating bracket is conveyed in by moving a transfer trolley handle when entering the warehouse, a movable transfer trolley is also designed at the warehouse exit, and the film coating bracket is connected out when exiting the warehouse and then is in butt joint with an outdoor pipeline to form a closed transmission chain. This process greatly improves the efficiency and quality of use of the device. Drawings FIG. 1 is a schematic diagram of a film plating rack transport system according to the present utility model; FIG. 2 is a schematic view of the structure of the hanger bracket and conveyor of the present utility model; FIG. 3 is an enlarged view at A in FIG. 2; FIG. 4 is a schematic view of a manipulator according to the present utility model; FIG. 5 is a schematic structural view of the fixture tool of the present utility model; fig. 6 is a front view of the jig plate of the present utility model. Detailed Description The technical scheme of the utility model is clearly and completely described below with reference to the accompanying drawings and the specific embodiments. Example 1: Referring to fig. 1, the present embodiment provides a film coating rack conveying system, which includes a vacuum chamber 10, a grabbing assembly 20, a suspension rack 30, a conveyor 40 and a transfer mechanism. The vacuum chamber is provided with openings at two ends, one end is provided with a bin inlet 11, the other end is provided with a bin outlet 12, and the bin inlet and the bin outlet are respectively provided with a sealing d