CN-224226126-U - Probe card handling mechanism

CN224226126UCN 224226126 UCN224226126 UCN 224226126UCN-224226126-U

Abstract

The utility model relates to a probe card carrying mechanism which comprises a support, wherein a clamping and releasing device is movably arranged on the support, a movable driving device is arranged between the support and the clamping and releasing device, the movable driving device comprises a linkage table, a vertical driving piece is arranged between the linkage table and the support in a vertically lifting manner, one end of the first plane plate is rotatably arranged on the top end surface of the linkage table, a first driving piece is arranged between the linkage table and the first plane plate, one end of the second plane plate is rotatably arranged on the bottom end surface of the other end of the first plane plate, a second driving piece is arranged between the first plane plate and the second plane plate, and the probe card can be carried quickly, stably and accurately without avoiding for many times during carrying.

Inventors

WANG SHIRUI
FAN ZHIKUN
KUAI AIWEI

Assignees

厦门特仪科技有限公司

Dates

Publication Date: 20260512
Application Date: 20250513

Claims (8)

1. A probe card carrying mechanism is characterized by comprising: The device comprises a bracket, wherein a clamping and releasing device is movably arranged on the bracket, and a movable driving device is arranged between the bracket and the clamping and releasing device; The movable driving device is used for driving the clamping and releasing device to move to a loading table in the case rapidly, stably and accurately so that the clamping and releasing device clamps the probe card on the loading table, and driving the clamping and releasing device to move to a placing table in the case, which is positioned at one side above the loading table, rapidly, stably and accurately so that the clamping and releasing device releases the probe card on the placing table after the clamping and releasing device clamps the probe card on the loading table; The movable driving device comprises a linkage table, a first plane plate, a second plane plate, a third plane plate and a fourth plane plate, wherein the linkage table is vertically lifted and arranged above the support, a vertical driving piece is arranged between the linkage table and the support, one end of the first plane plate is rotatably arranged on the top end face of the linkage table, a first driving piece is arranged between the linkage table and the first plane plate, one end of the second plane plate is rotatably arranged on the bottom end face of the other end of the first plane plate, a second driving piece is arranged between the first plane plate and the second plane plate, one end of the third plane plate is rotatably arranged on the bottom end face of the other end of the second plane plate, a third driving piece is arranged between the second plane plate and the third plane plate, one end of the fourth plane plate is rotatably arranged on the bottom end face of the other end of the third plane plate, and a fourth driving piece is arranged between the third plane plate and the fourth plane plate.
2. The probe card handling mechanism of claim 1, wherein the vertical drive is a vertical linear module.
3. The probe card handling mechanism of claim 1, wherein the first drive member, the second drive member, the third drive member, and the fourth drive member are DO motors.
4. The probe card handling mechanism of claim 1, wherein the clamping and releasing device comprises a bidirectional driving member arranged on the fourth panel, two clamping and releasing blocks are arranged on the bidirectional driving member, and the clamping and releasing blocks are connected with the bidirectional driving member through a connecting frame.
5. The probe card handling mechanism of claim 4, wherein the bi-directional driving member is a bi-directional telescoping motor or a bi-directional telescoping cylinder.
6. The probe card handling mechanism of claim 4, wherein the inner wall of the clip release block is provided with a stabilizing member.
7. The probe card handling mechanism of claim 6, wherein the stabilizing member comprises a mating groove disposed on an inner wall of the clip release block, and a stability enhancing layer disposed in the mating groove.
8. The probe card handling mechanism of claim 7, wherein the stability augmentation layer is a lightweight foam elastic rubber layer with slip resistance and wear resistance.

Description

Probe card handling mechanism Technical Field The utility model relates to the field of probe card conveying mechanisms, in particular to a probe card conveying mechanism. Background The probe card is a key tool in semiconductor testing, and is mainly used for a wafer testing link to serve as an interface between a tester and chips on a wafer. The wafer test is required to be performed in the case, and the probe card on the loading table in the case is transported to the placing table in the case on the side above the loading table by the probe card transporting mechanism in the case. The existing probe card conveying mechanism can convey the probe card on the loading table in the case to the placing table in the case, which is positioned on one side above the loading table, but the probe card is required to be avoided for a plurality of times during conveying, so that the probe card cannot be conveyed rapidly, stably and accurately in a limited space, and the use is not facilitated. It is an object of the present utility model to design a probe card handling mechanism against the above-described problems of the prior art. Disclosure of utility model The present utility model is directed to a probe card transporting mechanism, which can effectively solve at least one of the problems of the prior art. The technical scheme of the utility model is as follows: A probe card handling mechanism comprising: The device comprises a bracket, wherein a clamping and releasing device is movably arranged on the bracket, and a movable driving device is arranged between the bracket and the clamping and releasing device; The movable driving device is used for driving the clamping and releasing device to move to a loading table in the case rapidly, stably and accurately so that the clamping and releasing device clamps the probe card on the loading table, and driving the clamping and releasing device to move to a placing table in the case, which is positioned at one side above the loading table, rapidly, stably and accurately so that the clamping and releasing device releases the probe card on the placing table after the clamping and releasing device clamps the probe card on the loading table; The movable driving device comprises a linkage table, a first plane plate, a second plane plate, a third plane plate and a fourth plane plate, wherein the linkage table is vertically lifted and arranged above the support, a vertical driving piece is arranged between the linkage table and the support, one end of the first plane plate is rotatably arranged on the top end face of the linkage table, a first driving piece is arranged between the linkage table and the first plane plate, one end of the second plane plate is rotatably arranged on the bottom end face of the other end of the first plane plate, a second driving piece is arranged between the first plane plate and the second plane plate, one end of the third plane plate is rotatably arranged on the bottom end face of the other end of the second plane plate, a third driving piece is arranged between the second plane plate and the third plane plate, one end of the fourth plane plate is rotatably arranged on the bottom end face of the other end of the third plane plate, and a fourth driving piece is arranged between the third plane plate and the fourth plane plate. Further, the vertical driving piece is a vertical linear module. Further, the first driving member, the second driving member, the third driving member and the fourth driving member are all DO motors. Further, the clamping and releasing device comprises a bidirectional driving piece which is arranged on the fourth panel, two clamping and releasing blocks are arranged on the bidirectional driving piece, and the clamping and releasing blocks are connected with the bidirectional driving piece through a connecting frame. Further, the bidirectional driving piece is a bidirectional telescopic motor or a bidirectional telescopic cylinder. Further, the inner wall of the clamping release block is provided with a stabilizing piece. Further, the stability distribution part comprises a matching groove, the matching groove is arranged on the inner wall of the clamping and releasing block, and a stability enhancement layer is arranged on the inner wall of the clamping and releasing block and positioned in the matching groove. Further, the stability enhancing layer is a light foaming elastic rubber layer with slip resistance and wear resistance. Accordingly, the present invention provides the following effects and/or advantages: 1) The movable driving device is used for driving the clamping device to clamp the probe card on the loading table after the clamping device clamps the probe card on the loading table, and then drives the clamping device to move to the placing table on one side above the loading table in the machine case quickly, stably and accurately so that the clamping device releases the probe card on the placing table, and unde