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CN-224226148-U - Multi-finger independent driving type mechanical arm and wafer conveying system

CN224226148UCN 224226148 UCN224226148 UCN 224226148UCN-224226148-U

Abstract

The utility model discloses a multi-finger independent driving type manipulator which comprises a finger assembly, a grading transmission assembly and a driving assembly, wherein the finger assembly comprises a plurality of at least two fingers which are distributed at intervals along the height direction, the grading transmission assembly comprises a plurality of supports which are arranged corresponding to the finger assembly, each support comprises a first end and a second end, the first ends are arranged on the same horizontal reference plane in a coplanar mode, the second ends of the supports are respectively positioned on different height levels, the second ends of the supports are connected with the corresponding fingers, the driving assembly comprises a plurality of driving sources which are horizontally arranged on the same installation plane in parallel, and the power output ends of the driving sources are positioned on the same horizontal plane and are in driving connection with the first ends of the corresponding supports, wherein the driving force of the driving sources is transmitted to the fingers on different height levels through the grading transmission assembly. By adopting the scheme, the thickness of the multi-finger independent driving manipulator is further reduced under the condition of ensuring the conveying capability.

Inventors

  • CHANG ZHIYONG
  • HOU SHUANGMING
  • MENG JUNYAN

Assignees

  • 中科芯微智能装备(沈阳)有限公司

Dates

Publication Date
20260512
Application Date
20250623

Claims (10)

  1. 1. Multi-finger independent driving type manipulator, its characterized in that includes: A finger assembly (1) comprising a plurality of at least two fingers which are distributed at intervals along the height direction; The grading transmission assembly (2) comprises a plurality of brackets which are arranged corresponding to the finger assembly (1), each bracket comprises a first end (211) and a second end (212), the first ends (211) are arranged on the same horizontal datum plane in a coplanar mode, the second ends (212) are respectively positioned at different height levels, and the second ends (212) of each bracket are connected with the corresponding finger; The driving assembly (3) comprises a plurality of driving sources (31) which are horizontally arranged on the same installation plane in parallel, and the power output ends of the driving sources (31) are positioned on the same horizontal plane and are in driving connection with the first ends (211) of the corresponding brackets; wherein the driving force of the driving source (31) is transmitted to the fingers of different height levels via the step transmission assembly (2).
  2. 2. The multi-finger independently driven manipulator of claim 1, wherein the finger assembly (1) comprises a first finger (11), a second finger (12) and a third finger (13), the step transmission assembly (2) comprises a first bracket (21), a second bracket (22) and a third bracket (23), and the driving assembly (3) comprises three groups of driving elements, and the three groups of driving elements are arranged in parallel along a horizontal plane.
  3. 3. The multi-fingered independently driven robot as claimed in claim 2, wherein the driving member comprises: A drive pulley (32) coaxially provided with the power output end of the drive source (31); A transmission belt (34) is arranged between the first idler pulley (33) and the driving belt pulley (32), and the first idler pulley (33) is in transmission connection with the driving belt pulley (32) through the transmission belt (34); a slide rail (35) arranged parallel to a part of the belt (34); And the sliding part (36) is fixedly connected with the driving belt (34) and is in sliding fit with the sliding rail (35) along with the movement of the driving belt (34).
  4. 4. A multi-finger independent driving manipulator according to claim 3, further comprising a second idler wheel (37) symmetrically arranged on both sides of the driving pulley (32) with the first idler wheel (33), wherein the driving pulley (32), the first idler wheel (33) and the second idler wheel (37) form a triangular transmission layout, so that the transmission belt (34) forms a partial parallel transmission section in the extending direction of the sliding rail (35), and the extending direction of the sliding rail (35) is consistent with the trend of the partial parallel transmission section.
  5. 5. The multi-finger independent driving manipulator according to claim 4, further comprising a tension pulley (38) elastically abutting against an outer peripheral surface of the transmission belt (34), an axial direction of the tension pulley (38) being parallel to an axis of the driving pulley (32).
  6. 6. A multi-finger independently driven manipulator according to claim 3, wherein the slide (36) comprises: The clamping block (361) is provided with a profiling channel matched with the section shape of the transmission belt (34), and the inner side and the outer side of the transmission belt (34) are fixedly connected with the inner wall of the profiling channel; a slide block (362) in sliding connection with the slide rail (35); And the moving block (363) is fixedly connected with the sliding block (362), and the moving block (363) is fixedly connected with the first end (211) of the bracket.
  7. 7. The multi-finger independent driving type manipulator according to claim 4, wherein three sets of the driving members are arranged in parallel, wherein the driving source (31) of one set of the driving members is located on one side, and the driving sources (31) of the other two sets of the driving members are arranged in parallel on the other side.
  8. 8. Wafer transfer system comprising a multi-finger independently driven robot as claimed in any of claims 1-7, comprising: A frame assembly (4) which is provided with a protection space (41) for surrounding the multi-finger independent driving type manipulator, wherein a lifting mechanism is arranged in the frame assembly (4) and is used for driving the multi-finger independent driving type manipulator to lift along the height direction; and the rotary driving assembly (5) (3) is connected with the frame assembly (4) and is used for driving the frame assembly (4) to circumferentially rotate around the axis of the frame assembly.
  9. 9. The wafer transfer system of claim 8, wherein the multi-finger independently driven robot has a retracted state in which the multi-finger independently driven robot is positioned within the shielded space (41) and a vertical projected area of the multi-finger independently driven robot does not exceed a base profile of the frame assembly (4).
  10. 10. The wafer transfer system of claim 8, wherein the frame assembly (4) includes two oppositely disposed side shields (42), the side shields (42) extending in a height direction to form guide rails, a chassis (43) fixedly connected to a bottom of the two side shields (42), and a top plate (44) fixedly connected to a top of the two side shields (42).

Description

Multi-finger independent driving type mechanical arm and wafer conveying system Technical Field The utility model relates to the technical field of semiconductor wafer transmission equipment, in particular to a multi-finger independent driving type mechanical arm and a wafer transmission system. Background In the field of semiconductor manufacturing and precision electronic device processing, wafer handling is a key link for connecting each process unit, and the degree of automation and handling precision are directly related to the production yield and the production line efficiency. In the face of smaller process nodes and higher cleanliness requirements, the traditional manual or semi-automatic conveying mode is difficult to meet the requirements of modern large-scale and continuous production, and an automatic conveying manipulator is a core device commonly adopted in the industry. At present, most of automatic wafer handling manipulators on the market adopt driving structures which are arranged in parallel in the height direction so as to realize multi-finger independent operation. In order to ensure that each finger can be independently grasped and placed, the driving element and the transmission mechanism are often intensively installed on the same installation surface, so that the thickness of the whole machine is increased, the vertical space is occupied greatly, and the movement stroke and the flexibility of the manipulator in the height direction are further limited. Meanwhile, the thick structure brings a plurality of inconveniences to the modularized integration and subsequent maintenance of the equipment. In addition, along with the continuous improvement of the requirements of industries on the cooperative transportation of the multi-finger manipulators, the compact space utilization and the high-precision transmission of the manipulators, the existing manipulators are difficult to maintain a sufficient movement range in a limited installation height, and on the other hand, the precise transmission of power in the multi-finger operation process and the controllable positioning error are ensured. To date, no molding solution has been available that can meet both of these requirements without increasing the overall thickness. Accordingly, there is a need for a multi-finger independently driven robot and wafer transfer system that addresses the above-described problems of the prior art. Disclosure of utility model The utility model aims to provide a multi-finger independent driving type mechanical arm and a wafer conveying system, so that the thickness of the multi-finger independent driving type mechanical arm is reduced under the condition of ensuring the conveying capability. In order to achieve the above purpose, the technical scheme of the utility model is as follows: a multi-finger independently driven manipulator comprising: the finger assembly comprises a plurality of at least two fingers which are distributed at intervals along the height direction; The grading transmission assembly comprises a plurality of brackets which are arranged corresponding to the finger assembly, each bracket comprises a first end and a second end, the first ends are arranged on the same horizontal datum plane in a coplanar mode, the second ends are respectively positioned at different height levels, and the second end of each bracket is connected with the corresponding finger; the driving assembly comprises a plurality of driving sources which are horizontally arranged on the same installation plane in parallel, and the power output ends of the driving sources are positioned on the same horizontal plane and are in driving connection with the first ends of the corresponding brackets; Wherein the driving force of the driving source is transmitted to the fingers of different height levels through the step transmission assembly. The multi-finger independent driving type manipulator has the advantages that all driving sources are horizontally arranged on the same installation plane in parallel, so that the multi-finger independent driving type manipulator avoids superposition of driving units in the height direction, the thickness of the mechanism is obviously reduced, meanwhile, the power of each driving source is directly transmitted to finger assemblies with different heights by means of the grading transmission bracket, the horizontal expansion and synchronization operation capacity of the multi-finger on each layer is ensured, and larger vertical stroke is released, so that the high-precision and multi-layer wafer carrying requirement is realized. Further, the finger assembly comprises a first finger, a second finger and a third finger, the grading transmission assembly comprises a first bracket, a second bracket and a third bracket, and the driving assembly comprises three groups of driving pieces which are arranged in parallel along a horizontal plane. Further, the driving member includes: The driving belt w