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CN-224226167-U - Turnover equipment for glass substrate

CN224226167UCN 224226167 UCN224226167 UCN 224226167UCN-224226167-U

Abstract

The utility model provides turnover equipment for a glass substrate, which comprises a moving system and a turnover system, wherein the moving system comprises a moving mechanism and a lifting carrier mounted on the moving mechanism, the moving mechanism drives the lifting carrier to move to any position in a turnover position or a avoidance position of the turnover system, the lifting carrier comprises a thimble assembly capable of penetrating the surface of the lifting carrier and realizing lifting, the thimble assembly comprises a plurality of thimbles arranged at intervals, the turnover system comprises a tooth fork assembly capable of turning a certain angle along an axis parallel to the surface of the lifting carrier, and the tooth fork assembly comprises a plurality of adsorption lifting tooth forks which are parallel to the surface of the lifting carrier and matched with the interval space between the thimbles. The utility model can conveniently and rapidly finish the transferring and turning process without complex transferring and turning equipment.

Inventors

  • ZHENG HAILONG
  • MA DA
  • CHAI XINYU

Assignees

  • 苏州精濑光电有限公司

Dates

Publication Date
20260512
Application Date
20250516

Claims (10)

  1. 1. The turnover equipment for the glass substrate is characterized by comprising a moving system and a turnover system, wherein the moving system comprises a moving mechanism and a lifting carrier (4) arranged on the moving mechanism, the moving mechanism drives the lifting carrier (4) to move to any position in a turnover position or a avoidance position of the turnover system, the lifting carrier (4) comprises thimble assemblies which can penetrate through the surface of the lifting carrier and realize lifting, the thimble assemblies comprise a plurality of thimbles (400) which are arranged at intervals, the turnover system comprises a tooth fork assembly (11) which can turn a certain angle along an axis parallel to the surface of the lifting carrier (4), and the tooth fork assembly (11) comprises a plurality of adsorption lifting tooth forks (110) which are parallel to the surface of the lifting carrier (4) and matched with the interval space between the thimbles (400).
  2. 2. The turnover device of the glass substrate according to claim 1, wherein the turnover system further comprises a lifting module (12) and a rotating module (13) mounted on the lifting module (12) for realizing turnover, the turnover angle of the fork assembly (11) is controlled to be +/-180 degrees, the rotating module (13) comprises a rotating servo motor (130) mounted along the extending direction of the adsorption lifting fork (110), and the output end of the rotating servo motor (130) is connected with the fork assembly (11).
  3. 3. The apparatus for turning over a glass substrate according to claim 2, wherein the rotation module (13) further comprises a blocking member for limiting the rotation angle of the fork assembly (11) within a certain range.
  4. 4. A turnover device for glass substrates according to claim 3, characterized in that the fork assembly (11) further comprises a mounting part (1101) and a fork connecting part (1102) which are rotatably connected, the lifting module (12) is connected with the mounting part (1101), the output end of the rotary servo motor (130) is connected with the middle part of the fork connecting part (1102), one end of the suction lifting fork (110) is connected with the fork connecting part (1102), the suction lifting fork (110) is hollow inside and provided with a plurality of uniformly distributed first vacuum sucking discs (1103), the rotating module (13) further comprises a fine adjusting part (133), the blocking part controls the turnover angle of the fork assembly (11) to be 0-190 degrees, the fine adjusting part (133) controls the rotation angle of the fork assembly (11) to be 180 degrees, and the fine adjusting part (133) comprises a sensing part (1331) arranged on the fork assembly (11) and a plurality of sensing parts (1332) arranged on the mounting part (1101).
  5. 5. The turnover equipment of the glass substrate according to claim 1, wherein the thimble assembly of the jacking carrier (4) comprises a first thimble group (41) and a second thimble group (42), the number of the thimbles (400) of the first thimble group (41) and the number of the thimbles (400) of the second thimble group (42) are 3-7 and are arranged in a straight line, the first thimble group (41) and the second thimble group (42) are arranged in parallel and opposite to each other and are respectively used for supporting two side edges of the glass substrate, the surface of the jacking carrier (4) is subjected to black hard oxidation treatment, one side of the jacking carrier (4) is provided with an L-shaped positioning piece (403) and a linear positioning piece (404), the number of the adsorption lifting fork (110) is 3-7, and the adsorption lifting fork (110) and the thimbles (400) are arranged at intervals when the jacking carrier (4) moves to a turnover position of the turnover system.
  6. 6. The turnover equipment of a glass substrate according to claim 5, wherein a first side sensor (405) is further arranged in the middle of the jacking carrier (4), at least two groups of first ejector pin groups (41) are arranged on one side of the first side sensor (405) along the radial direction, at least two groups of second ejector pin groups (42) are arranged on the other side of the first side sensor (405) along the radial direction, the distance between the adjacent first ejector pin groups (41) and the adjacent second ejector pin groups (42) is 150-200mm, the distance between the adjacent two first ejector pin groups (41) or the adjacent two second ejector pin groups (42) is 100-150mm, the distance between the two ejector pins (400) in the same first ejector pin group (41) or the same second ejector pin group (42) is 100-150mm, and the ejector pins (400) comprise second vacuum chucks (401) arranged at the top ends and ejector pins (402) connected with the second vacuum chucks (401).
  7. 7. The turnover equipment of a glass substrate according to claim 6, wherein the jacking carrier (4) comprises an adsorption platform (40), the adsorption platform (40) comprises a first adsorption area provided with a plurality of first adsorption holes (406) and a second adsorption area provided with a plurality of second adsorption holes (407), the first adsorption area and the second adsorption area are connected with a switching valve (408), the first adsorption holes (406) are linearly arranged on two sides of each of the first ejector pin group (41) and the second ejector pin group (42), the second adsorption holes (407) are linearly arranged on the outer side of the first adsorption area along the circumferential direction of the adsorption platform (40), and the second adsorption holes (407) are at least arranged in two rows along the radial direction of the adsorption platform (40).
  8. 8. The turnover equipment of glass substrates according to claim 7, wherein the jacking carrier (4) further comprises a mounting platform (43), the adsorption platform (40) and the ejector pin assembly are mounted on the mounting platform (43), the mounting platform (43) comprises a gas distribution plate (409) communicated with the ejector pins (402) and used for gas circulation during vacuumizing, the mounting platform (43) further comprises a rotary driving assembly (410), a first driving assembly (411) and a second driving assembly (412), the first driving assembly (411) and the second driving assembly (412) comprise a mounting plate (4110), two guide wire rails (4111) and a sliding table module (4112), the guide wire rails (4111) are mounted on the mounting plate (4110), the sliding table module (4112) is mounted on the guide wire rails (4111), the first ejector pin group (41) is mounted on the sliding table module (4112) of the first driving assembly (411), the second group (42) is mounted on the second driving assembly (412) to rotate along the jacking carrier (410) shaft (4).
  9. 9. The turnover device of glass substrates according to claim 1, wherein the moving mechanism comprises a base, a Y-axis module (5) installed on the base and an X-axis module (6) installed on the Y-axis module (5), the jacking carrier (4) is installed on the X-axis module (6), the X-axis module (6) comprises an X-axis linear motor (601) and an X-axis rail (602), the Y-axis module (5) is a double-drive mechanism and comprises two Y-axis linear motors (501) arranged in parallel and Y-axis rails (502) positioned on two sides of each Y-axis linear motor (501).
  10. 10. The turnover device of glass substrates according to claim 9, wherein mounting holes of the X-axis rail (602) and the Y-axis rail (502) are mounted in an encrypted manner, adjusting mechanisms are arranged on two sides of the X-axis rail (602) and the Y-axis rail (502), each adjusting mechanism is composed of a plurality of adjusting units (7) uniformly distributed along the extending directions of the X-axis rail (602) and the Y-axis rail (502), each adjusting unit (7) mainly comprises a pushing column (701) and a pressing screw (702), an inclined surface (703) is arranged at the head of each pressing screw (702), and when the pressing screw (702) is mounted on a corresponding base Kong Xuanjin, the pushing column (701) is pressed by the inclined surface (703) to be pushed towards the side surfaces of the X-axis rail (602) and the Y-axis rail (502).

Description

Turnover equipment for glass substrate Technical Field The utility model belongs to the field of glass substrate conveying, and particularly relates to a turnover device for a glass substrate. Background The display field is another important application field of glass substrates besides the semiconductor field such as chips. The high transparency and optical uniformity of the glass substrate ensure good optical properties, excellent flatness ensures display quality, mechanical strength and chemical resistance enable it to cope with various environments, and thermal stability and low thermal expansion coefficient ensure stability of the product at high load operation. In addition, the self-luminous characteristics of the glass substrate make it particularly important in the field of novel display such as Micro LEDs. The use of glass substrates in the display field, while providing many advantages, has some significant drawbacks. The following are major disadvantages of glass substrates: The glass substrate is weak in impact and shock resistance compared to the organic substrate and thus is more susceptible to damage or breakage during manufacturing, transportation and use. Such fragility not only increases the risk during production, but may also affect the stability and reliability of the packaged chip. The processing difficulty is high, and the processing process of the glass substrate is relatively complex and difficult. Due to its hardness and brittleness, special cutting, grinding and etching techniques are required, which increases technical difficulties and costs in the manufacturing process. In addition, the processing accuracy requirement of the glass substrate is higher for fine patterns and wirings, and the processing difficulty is further increased. The cost is high-glass substrates are generally more costly to manufacture than organic substrates. This is mainly due to the complex processing, special material requirements and high technical requirements. The high cost may limit the application of glass substrates in low cost or mass production. The coefficient of thermal expansion mismatch is a problem in that there may be a mismatch in the coefficient of thermal expansion between the glass substrate and the chip material. Under the environment with large temperature variation, the mismatch may cause problems such as stress concentration, warpage or fracture, and further affect the reliability and performance of the chip. The compatibility with the existing technology is poor, and the compatibility problem can exist with the existing chip packaging technology due to the characteristics and the processing requirements of the glass substrate. This may require more development resources to develop a packaging process that adapts to the glass substrate, increasing technical difficulty and cost. In order to solve the problems, AOI detection is required for the packaged glass substrate, but in the actual production process, optical detection has high requirements on positioning precision, straightness, speed fluctuation, detection time and the like of a triaxial motion platform, and because of the special property of the glass substrate, the transportation and movement of the glass substrate are required to be more stable and more convenient, the glass substrate is prevented from being broken and damaged, and particularly when the turnover detection is required, no suitable stable transportation and turnover equipment exists. Disclosure of utility model In view of all or part of the shortcomings of the prior art, the utility model aims to provide a turnover device for a glass substrate, which can conveniently and rapidly complete the process of transferring and turning without complex transferring and turning equipment. In order to achieve the above object, the present utility model provides the following technical solutions: The utility model provides turnover equipment for a glass substrate, which comprises a moving system and a turnover system, wherein the moving system comprises a moving mechanism and a lifting carrier mounted on the moving mechanism, the moving mechanism drives the lifting carrier to move to any position in a turnover position or a avoidance position of the turnover system, the lifting carrier comprises a thimble assembly capable of penetrating through the surface of the lifting carrier and realizing lifting, the thimble assembly comprises a plurality of thimbles arranged at intervals, the turnover system comprises a tooth fork assembly capable of overturning a certain angle along an axis parallel to the surface of the lifting carrier, and the tooth fork assembly comprises a plurality of adsorption lifting tooth forks which are parallel to the surface of the lifting carrier and matched with the interval space between the thimbles. When the product is required to be turned over, the product can only be turned over after being taken away by the material taking mechanism, and when t