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CN-224226889-U - Quick annealing furnace for quartz furnace tube

CN224226889UCN 224226889 UCN224226889 UCN 224226889UCN-224226889-U

Abstract

The utility model discloses a quartz furnace tube rapid annealing furnace, which relates to the technical field of annealing furnaces and comprises a base, wherein the upper part of the base is fixedly connected with an annealing furnace main body, the upper part of the base is fixedly connected with a sliding rail, one end of the sliding rail is positioned below the annealing furnace main body, the upper part of the sliding rail is slidably connected with a sliding block, and the upper part of the sliding block is fixedly connected with a mounting mechanism. According to the utility model, when annealing treatment is carried out on products, the placing rack matched with the products is selected, the inserting blocks are inserted with the sleeve, meanwhile, the inserting blocks are inserted with the sleeve and the inserting blocks, and the placing rack is installed and fixed, so that different products can be stably placed and fixed, the placing rack can be customized to adapt to the specifications of the different products, the problem of poor adaptability of the traditional bracket is solved through the rapid insertion and replacement of the standardized interface of the inserting blocks, the guiding cooperation of the sleeve and the inserting blocks and the radial locking of the wedge-shaped limiting blocks are realized, and the accurate positioning of the placing rack in the three-dimensional direction is realized.

Inventors

  • WU HAO
  • WU LAISHAN

Assignees

  • 东海县昊天石英玻璃制品有限公司

Dates

Publication Date
20260512
Application Date
20250604

Claims (6)

  1. 1. The quick annealing furnace for the quartz furnace tube comprises a base (1), wherein the upper part of the base (1) is fixedly connected with an annealing furnace body (2), the upper part of the base (1) is fixedly connected with a sliding rail (3), one end of the sliding rail (3) is positioned below the annealing furnace body (2), the upper part of the sliding rail (3) is slidably connected with a sliding block (4), the upper part of the sliding block (4) is fixedly connected with a mounting mechanism (5), and the upper part of the mounting mechanism (5) is fixedly connected with a placement frame (6), and the quick annealing furnace is characterized in that the mounting mechanism (5) comprises a sleeve (51) and a mounting frame (53) which is fixedly connected with a wedge-shaped limiting block (56) in a sliding manner, the wedge-shaped limiting block (56) is spliced with the sleeve (51) and an inserting block (52), and the upper part of the inserting block (52) is fixedly connected with the placement frame (6).
  2. 2. The quartz furnace tube rapid annealing furnace according to claim 1, wherein the upper part of the sliding block (4) is fixedly connected with a placing rack (6), and the placing racks (6) are uniformly distributed on the surface of the sliding block (4).
  3. 3. The quartz furnace tube rapid annealing furnace according to claim 1, wherein a limit rod (54) is fixedly connected to the side face of the wedge-shaped limit block (56), and the limit rod (54) is in sliding connection with the mounting frame (53).
  4. 4. The rapid annealing furnace for quartz furnace tubes according to claim 3, wherein a first spring (55) is arranged on the surface of the limiting rod (54), one end of the first spring (55) is fixedly connected with the wedge-shaped limiting block (56), and the other end of the first spring (55) is fixedly connected with the mounting frame (53).
  5. 5. The quartz furnace tube rapid annealing furnace according to claim 1, wherein a telescopic rod (57) is fixedly connected inside the sleeve (51), a placing plate (59) is fixedly connected to the upper portion of the telescopic rod (57), a second spring (58) is arranged on the surface of the telescopic rod (57), one end of the second spring (58) is fixedly connected with the sleeve (51), and the other end of the second spring (58) is fixedly connected with the placing plate (59).
  6. 6. The rapid annealing furnace for quartz furnace tubes according to claim 1, wherein the bottom of the insert block (52) is attached to the surface of the placing plate (59).

Description

Quick annealing furnace for quartz furnace tube Technical Field The utility model relates to the technical field of annealing furnaces, in particular to a quartz furnace tube rapid annealing furnace. Background The quartz furnace tube rapid annealing furnace is a key device for rapid heat treatment of samples in the fields of semiconductor manufacturing, material science and the like, adopts a high-purity quartz furnace tube as a clean heat treatment cavity, adopts an infrared radiation or laser heating mode, is matched with an accurate temperature control system and gas environment regulation and control, can realize rapid temperature rise and temperature control precision of tens to hundreds of degrees centigrade per second, and meets the process requirements of ion implantation repair, film annealing, alloying and the like. However, in the prior art, the conventional quartz furnace tube rapid annealing furnace adopts a standardized design when materials are placed, so that the problem of poor size and shape suitability in the aspect of material placement is caused, and when the size and shape of a placement support and a product are not matched, the sample can be unstable in positioning, heated or uneven in atmosphere, and the structure is easy to damage, so that the yield of the annealed product is reduced or the performance consistency is poor. Disclosure of utility model The utility model aims to solve the problem that the prior quartz furnace tube rapid annealing furnace in the prior art is poor in size and shape suitability due to the fact that standardized design is adopted when materials are placed, and provides the quartz furnace tube rapid annealing furnace. In order to achieve the aim, the quartz furnace tube rapid annealing furnace comprises a base, wherein the upper part of the base is fixedly connected with an annealing furnace main body, the upper part of the base is fixedly connected with a sliding rail, one end of the sliding rail is positioned below the annealing furnace main body, the upper part of the sliding rail is slidably connected with a sliding block, the upper part of the sliding block is fixedly connected with a mounting mechanism, the upper part of the mounting mechanism is fixedly connected with a placing frame, the mounting mechanism comprises a sleeve side fixedly connected with a mounting frame, the inside of the mounting frame is slidably connected with a wedge-shaped limiting block, the wedge-shaped limiting block is spliced with the sleeve and an inserting block, and the upper part of the inserting block is fixedly connected with the placing frame. Preferably, the upper part of the sliding block is fixedly connected with a placing frame, and a plurality of placing frames are uniformly distributed on the surface of the sliding block. Preferably, the side surface of the wedge-shaped limiting block is fixedly connected with a limiting rod, and the limiting rod is in sliding connection with the mounting frame. Preferably, the surface of the limiting rod is provided with a spring, one end of the spring is fixedly connected with the wedge-shaped limiting block, and the other end of the spring is fixedly connected with the mounting frame. Preferably, the telescopic rod is fixedly connected with the inside of the sleeve, the placing plate is fixedly connected with the upper portion of the telescopic rod, the second spring is arranged on the surface of the telescopic rod, one end of the second spring is fixedly connected with the sleeve, and the other end of the second spring is fixedly connected with the placing plate. Preferably, the bottom of the insert block is attached to the surface of the placing plate. Compared with the prior art, the utility model has the advantages and positive effects that: 1. according to the utility model, when annealing treatment is carried out on products, the placing rack matched with the products is selected, the inserting blocks are inserted with the sleeve, meanwhile, the inserting blocks are inserted with the sleeve and the inserting blocks, and the placing rack is installed and fixed, so that different products can be stably placed and fixed, the placing rack can be customized to adapt to the specifications of the different products, the problem of poor adaptability of the traditional bracket is solved through the rapid insertion and replacement of the standardized interface of the inserting blocks, the guiding cooperation of the sleeve and the inserting blocks and the radial locking of the wedge-shaped limiting blocks are realized, and the accurate positioning of the placing rack in the three-dimensional direction is realized. 2. According to the utility model, when the plug is inserted into the sleeve, the first spring is compressed by sliding of the limiting rod, the first spring pushes the wedge-shaped limiting block to automatically clamp into the plug after the plug is in place, a unidirectional locking force is formed, stable connecti