CN-224227126-U - Cooling device for high vacuum heat treatment furnace

Abstract

The utility model discloses a cooling device for a high-vacuum heat treatment furnace, which comprises a cold trap and a main valve, wherein one end of the cold trap is connected with a sealed cavity of the high-vacuum heat treatment furnace through the main valve, the other end of the cold trap is connected with an oil diffusion pump, so that the sealed cavity of the high-vacuum heat treatment furnace can be communicated with the oil diffusion pump through the main valve through the cold trap, and a workpiece is arranged in the sealed cavity of the high-vacuum heat treatment furnace. The utility model relates to the technical field of vacuum heat treatment furnaces, which can solve the problem that a device for preventing the oil return phenomenon of a diffusion pump of a high-vacuum heat treatment furnace is not available in the prior art.

Inventors

• DING LI
• ZENG AIQUN

Assignees

• 益发施迈茨工业炉（上海）有限公司

Dates

Publication Date

20260512

Application Date

20250515

Claims (6)

1. 1. A cooling device for a high-vacuum heat treatment furnace is characterized by comprising a cold trap (1) and a main valve (4), wherein one end of the cold trap (1) is connected with a high-vacuum heat treatment furnace closed cavity (2) through the main valve (4), the other end of the cold trap (1) is connected with an oil diffusion pump (3), so that the high-vacuum heat treatment furnace closed cavity (2) can be communicated with the oil diffusion pump (3) through the main valve (4) through the cold trap (1), and a workpiece (5) is arranged in the high-vacuum heat treatment furnace closed cavity (2).
2. 2. The cooling device for the high vacuum heat treatment furnace according to claim 1, wherein the cold trap (1) comprises an air inlet flange (6), a closed cylinder (7), a cooling assembly and an air outlet flange (12), the closed cylinder (7) is of a hollow cylinder structure with two open ends, the air inlet flange (6) and the air outlet flange (12) are respectively arranged at two open ends of the closed cylinder (7), one open end of the closed cylinder (7) is communicated with the main valve (4) through the air inlet flange (6), the other open end of the closed cylinder (7) is communicated with the oil diffusion pump (3) through the air outlet flange (12), and the cooling assembly is arranged in the closed cylinder (7) and is positioned between the air inlet flange (6) and the air outlet flange (12).
3. 3. The cooling device for a high vacuum heat treatment furnace according to claim 2, wherein the cooling assembly comprises cooling fins (8), the plurality of cooling fins (8) are respectively arranged on the inner wall of the closed cylinder (7) at intervals, and the air flow and the oil vapor are contacted with the plurality of cooling fins (8) when flowing through the closed cylinder (7).
4. 4. A cooling apparatus for a high vacuum heat treatment furnace according to claim 3, wherein the heat radiating fin (8) has a bent structure, and the heat radiating fin (8) is provided with an oil diffusion pump (3) which is bent downward and faces downward.
5. 5. A cooling apparatus for a high vacuum heat treatment furnace according to claim 3, wherein the cooling unit further comprises a cooling coil (9), the cooling coil (9) is arranged in a serpentine structure and is fully distributed on the cross section of the closed cylinder (7), both ends of the cooling coil (9) extend to the outside of the closed cylinder (7) and are respectively provided with a water inlet (10) and a water outlet (11), and circulating cooling water is arranged in the cooling coil (9) through the water inlet (10) and the water outlet (11).
6. 6. A cooling apparatus for a high vacuum heat treatment furnace according to claim 5, wherein the cooling coil (9) is fixedly connected to the heat radiating fins (8).

Description

Cooling device for high vacuum heat treatment furnace Technical Field The utility model relates to the technical field of vacuum heat treatment furnaces, in particular to a cooling device for a high-vacuum heat treatment furnace. Background For the high vacuum heat treatment furnace of the high vacuum metal screen hot zone, the ultimate vacuum degree is generally required to be in the range of 10 -6 MBar, and in order to obtain the high vacuum degree, an economic and reliable measure is to adopt an oil diffusion pump to vacuumize a closed vacuum cavity. Because the work of the oil diffusion pump is based on the oil diffusion principle, in the working process, a part of oil vapor with higher temperature inevitably diffuses into the vacuum cavity along the vacuum pipeline, and the phenomenon is called oil return of the diffusion pump, and the oil return phenomenon of the diffusion pump can pollute the vacuum cavity and the workpiece to be heat treated. At present, no device or method for effectively preventing the diffusion pump oil return phenomenon of the high vacuum heat treatment furnace exists. Accordingly, there is a need to provide a cooling apparatus for a high vacuum heat treatment furnace, which can solve the problem that there is no apparatus for preventing the diffusion pump oil return phenomenon of the high vacuum heat treatment furnace in the prior art. Disclosure of Invention The utility model aims to provide a cooling device for a high-vacuum heat treatment furnace, which can solve the problem that no device for preventing the oil return phenomenon of a diffusion pump of the high-vacuum heat treatment furnace exists in the prior art. The utility model is realized in the following way: a cooling device for a high-vacuum heat treatment furnace comprises a cold trap and a main valve, wherein one end of the cold trap is connected with a sealed cavity of the high-vacuum heat treatment furnace through the main valve, the other end of the cold trap is connected with an oil diffusion pump, the sealed cavity of the high-vacuum heat treatment furnace can be communicated with the oil diffusion pump through the main valve through the cold trap, and a workpiece is arranged in the sealed cavity of the high-vacuum heat treatment furnace. The cold trap comprises an air inlet flange, a closed cylinder, a cooling component and an air outlet flange, wherein the closed cylinder is of a hollow cylinder structure with two open ends, the air inlet flange and the air outlet flange are respectively arranged at two open ends of the closed cylinder, one open end of the closed cylinder is communicated with a main valve through the air inlet flange, the other open end of the closed cylinder is communicated with an oil diffusion pump through the air outlet flange, and the cooling component is arranged in the closed cylinder and is positioned between the air inlet flange and the air outlet flange. The cooling component comprises cooling fins, a plurality of cooling fins are respectively arranged on the inner wall of the closed cylinder at intervals, and air flow and oil vapor are contacted with the cooling fins when flowing through the closed cylinder. The cooling fin is of a bending structure, and the cooling fin is downwards bent to face the oil diffusion pump arranged below. The cooling assembly further comprises a cooling coil pipe, the cooling coil pipe is of a serpentine structure and fully distributed on the cross section of the closed cylinder, and two ends of the cooling coil pipe extend to the outside of the closed cylinder and are respectively provided with a water inlet and a water outlet, so that circulating cooling water is arranged in the cooling coil pipe through the water inlet and the water outlet. The cooling coil is fixedly connected with the radiating fin. Compared with the prior art, the utility model has the following beneficial effects: 1. The utility model is provided with the cold trap, and the cooling fin and the cooling coil are used for carrying out heat exchange on the air flow and the oil vapor flowing through the closed cylinder body, so that cooling and heat dissipation are realized, the condensed oil vapor is accumulated into oil diffusion pumps with oil drops dripping to the lower part along the cooling fin, the repeated utilization of the oil drops is facilitated, the pollution to the inner part of the closed cavity of the high-vacuum heat treatment furnace and workpieces in the closed cavity of the high-vacuum heat treatment furnace caused by the entry of the oil vapor into the closed cavity of the high-vacuum heat treatment furnace is effectively prevented, the occurrence of the oil return phenomenon of the diffusion pumps of the high-vacuum heat treatment furnace is solved, and the requirement of the high-vacuum heat treatment furnace on high cleanliness is met. 2. According to the utility model, as the radiating fins and the cooling coil are arranged, the heat exchange contact area be