CN-224227175-U - Multi-station ultrahigh vacuum exhaust device

Abstract

The utility model relates to the technical field of exhaust devices, in particular to a multi-station ultrahigh vacuum exhaust device, which comprises a base, wherein a plurality of support posts are arranged at the top edge of the base, a strip-shaped transverse plate is arranged between every two adjacent support posts, at least three adsorption pipes are connected to the side surface of each strip-shaped transverse plate through a supporting plate, a vacuum furnace is connected to the top of the base and positioned between the adsorption pipes, a plurality of adsorption heads are connected to the bottom of each adsorption pipe through a first flange, one end of each adsorption head is fixed on the side wall of the vacuum furnace, and a first vacuum pump, a second vacuum pump and a third vacuum pump are arranged at the top of the base. According to the utility model, the adsorption heads are uniformly arranged on the side wall of the vacuum furnace, so that the adsorption heads uniformly exhaust when vacuuming is performed through the first vacuum pump, the second vacuum pump and the third vacuum pump, the air pressure in the vacuum furnace is kept uniform, and the use effect is improved.

Inventors

• XU MEIJUAN
• ZHAO KAI
• LI HU
• CUI YING

Assignees

• 上海利方达真空技术有限公司

Dates

Publication Date

20260512

Application Date

20250616

Claims (7)

1. 1. The multi-station ultrahigh vacuum exhaust device is characterized by comprising a base (1), wherein a plurality of struts (2) are arranged at the top edge of the base (1), strip-shaped transverse plates (7) are arranged between two adjacent struts (2), the side surfaces of each strip-shaped transverse plate (7) are connected with at least three adsorption tubes (4) through support plates (21), the top of the base (1) is connected with a vacuum furnace, and the vacuum furnace is positioned between the adsorption tubes (4); The bottom of each adsorption tube (4) is connected with a plurality of adsorption heads (5) through a first flange (6), and one end of each adsorption head (5) is fixed on the side wall of the vacuum furnace; The top of the base (1) is provided with a first vacuum pump (11), a second vacuum pump (14) and a third vacuum pump (16), air inlet ends of the first vacuum pump (11), the second vacuum pump (14) and the third vacuum pump (16) are respectively provided with an air suction pipe (20), one side of each adsorption pipe (4) is respectively provided with a connecting pipe (8), and the other end of each connecting pipe (8) is connected with the end part of the corresponding air suction pipe (20) through a second flange (9); A pair of L-shaped limiting plates (10) are arranged on one side of each strip-shaped transverse plate (7), a mounting plate (18) is arranged between each pair of L-shaped limiting plates (10), one side of each first vacuum pump (11), one side of each second vacuum pump (14) and one side of each third vacuum pump (16) are connected with the corresponding mounting plate (18), each pair of strip-shaped fixing plates (12) are arranged on one side of each L-shaped limiting plate (10), and each strip-shaped fixing plate (12) is connected with each strip-shaped transverse plate (7) through an adjusting mechanism.
2. 2. The multi-station ultrahigh vacuum exhaust device according to claim 1, wherein the adjusting mechanism comprises through grooves (13) formed in the side surfaces of the strip-shaped transverse plates (7), screw rods (3) are rotatably connected in the through grooves (13), one end of each screw rod (3) extends to one side of each supporting column (2), sliding blocks (17) are sleeved on the side surfaces of each screw rod (3) in a threaded mode, and one side of each sliding block (17) extends out of each through groove (13) and is connected with the side surface of the corresponding strip-shaped fixed plate (12).
3. 3. The ultra-high vacuum exhaust apparatus according to claim 2, wherein when the mounting plate (18) is placed inside the L-shaped limiting plate (10), one end of the mounting plate (18) near the bar-shaped fixing plate (12) extends to one side of the L-shaped limiting plate (10).
4. 4. The ultra-high vacuum exhaust apparatus according to claim 3, wherein each pair of L-shaped limiting plates (10) is connected with a strip-shaped baffle plate (15) at one end far away from the strip-shaped fixed plate (12), and one side of the strip-shaped baffle plate (15) is abutted against the side surface of the mounting plate (18).
5. 5. The multi-station ultra-high vacuum exhaust apparatus according to claim 1, wherein a valve (19) is installed on each suction pipe (20).
6. 6. The multi-station ultra-high vacuum exhaust apparatus according to claim 1, wherein each adsorption tube (4) is arranged in a U shape.
7. 7. The multi-station ultrahigh vacuum exhaust device according to claim 5, wherein a control cabinet (22) is arranged on one side of the top of the base (1), and a controller in the control cabinet (22) is respectively connected with the first vacuum pump (11), the second vacuum pump (14), the third vacuum pump (16) and the valve (19) through leads.

Description

Multi-station ultrahigh vacuum exhaust device Technical Field The utility model relates to the technical field of exhaust devices, in particular to a multi-station ultrahigh vacuum exhaust device. Background The multi-station ultrahigh vacuum exhaust device is an integrated system capable of synchronously realizing and maintaining extreme vacuum in a plurality of independent vacuum chambers and is specially designed for high-efficiency mass production environments. The existing multi-station ultrahigh vacuum exhaust device is characterized in that when the existing multi-station ultrahigh vacuum exhaust device is used, a vacuum chamber is vacuumized through a single extraction opening, so that when the vacuum chamber is vacuumized, the air pressure in the vacuum chamber is uneven, the next stage of vacuum pump is easily affected by the overlarge air pressure during working and damaged, the use effect is poor, in the installation process, the multi-stage vacuum pump is generally fixed on equipment through bolts, on the disassembly and repair, workers are required to dismantle the bolts one by one through a wrench, then the disassembly and the installation are inconvenient, and the use effect is poor. Therefore, a multi-station ultra-high vacuum exhaust device is provided to solve the problems set forth above. Disclosure of utility model Aiming at the defects of the prior art, the utility model provides a multi-station ultrahigh vacuum exhaust device, which can solve the problem of uneven air exhaust caused by a single air exhaust opening. The multi-station ultrahigh vacuum exhaust device comprises a base, wherein a plurality of struts are arranged at the top edge of the base, a strip-shaped transverse plate is arranged between two adjacent struts, at least three adsorption pipes are connected to the side surface of each strip-shaped transverse plate through a supporting plate, a vacuum furnace is connected to the top of the base, and the vacuum furnace is positioned between the adsorption pipes; the bottom of each adsorption tube is connected with a plurality of adsorption heads through a first flange, and one end of each adsorption head is fixed on the side wall of the vacuum furnace; The top of the base is provided with a first vacuum pump, a second vacuum pump and a third vacuum pump, air inlet ends of the first vacuum pump, the second vacuum pump and the third vacuum pump are respectively provided with an air suction pipe, one side of each adsorption pipe is respectively provided with a connecting pipe, and the other ends of the connecting pipes are respectively connected with the corresponding air suction pipe ends through second flanges; A pair of L-shaped limiting plates are arranged on one side of each strip-shaped transverse plate, a mounting plate is arranged between each pair of L-shaped limiting plates, one sides of the first vacuum pump, the second vacuum pump and the third vacuum pump are connected with the corresponding mounting plates, each pair of L-shaped limiting plates is provided with a strip-shaped fixing plate, and the strip-shaped fixing plates are connected with the strip-shaped transverse plates through an adjusting mechanism. Preferably, the adjustment mechanism is including seting up the logical groove in bar diaphragm side, and the inside of every logical groove is all rotated and is connected with the lead screw, and one end of every lead screw all stretches to one side of pillar, and the side of every lead screw all the thread bush has the sliding block, and one side of every sliding block all stretches out logical groove and links to each other with corresponding bar fixed plate side. Preferably, when the mounting plate is placed in the L-shaped limiting plate, one end of the mounting plate, which is close to the strip-shaped fixing plate, extends to one side of the L-shaped limiting plate. Preferably, one end of each pair of L-shaped limiting plates far away from the strip-shaped fixing plate is connected with a strip-shaped baffle, and one side of the strip-shaped baffle is propped against the side face of the mounting plate. Preferably, a valve is mounted on each suction pipe. Preferably, each adsorbent tube is arranged in a "U" shape. Preferably, a control cabinet is arranged on one side of the top of the base, and a controller in the control cabinet is respectively connected with the first vacuum pump, the second vacuum pump, the third vacuum pump and the valve through wires. Compared with the prior art, the utility model provides a multi-station ultrahigh vacuum exhaust device, which has the following beneficial effects: 1. Through evenly install the adsorption head on the lateral wall of vacuum furnace, can be when carrying out the evacuation through first vacuum pump, second vacuum pump and third vacuum pump, the adsorption head is taken out the air evenly for the atmospheric pressure in the vacuum furnace keeps evenly, improves the result of use. 2. Can carry out prel