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CN-224227176-U - Crystal oscillator piece replacement module and evaporation device

CN224227176UCN 224227176 UCN224227176 UCN 224227176UCN-224227176-U

Abstract

The utility model relates to a semiconductor manufacturing technical field, an embodiment of the disclosure provides a crystal oscillator piece change module, including the link, the top of link is provided with convenient change structure, convenient change structure includes spout and threaded rod, the spout sets up the top at the link, the inside sliding connection of spout has slider A and slider B, slider A's top fixedly connected with extension board A, slider B's top fixedly connected with extension board B. In this disclosure, through being provided with the retarder mechanism to when having reached and having driven the interval between extension board A and the extension board B when the threaded rod clockwise rotation through manual rotation turning block, can slow down the speed when manual rotation turning block drives threaded rod clockwise rotation through the cooperation of components such as reducing rod, arc piece, expansion spring, prevent extension board A and extension board B to be close to the moving speed mutually and too soon cause the damage to the crystal oscillator piece.

Inventors

  • CHEN JIE
  • CHANG LIMIN
  • LI JIAN
  • DUAN HONGWEI
  • YUAN QINGZHU
  • Jing Xueshun

Assignees

  • 唐山万士和电子有限公司

Dates

Publication Date
20260512
Application Date
20250307

Claims (10)

  1. 1. The crystal oscillator wafer replacing module is characterized by comprising a connecting frame (1), wherein a convenient replacing structure (7) is arranged at the top of the connecting frame (1); the utility model provides a convenient change structure (7) includes spout (71) and threaded rod (76), the top in link (1) is seted up in spout (71), the inside sliding connection of spout (71) has slider A (72) and slider B (74), the top fixedly connected with extension board A (73) of slider A (72), the top fixedly connected with extension board B (75) of slider B (74), slot (78) have all been seted up at the top of extension board A (73) and extension board B (75), threaded rod (76) run through and rotate the front end of connection at link (1), the front end fixedly connected with rotary block (77) of threaded rod (76), the surface of threaded rod (76) is provided with speed reduction mechanism (8).
  2. 2. The crystal plate replacement module according to claim 1, wherein the slider a (72) and the slider B (74) are both in threaded connection with the threaded rod (76) through built-in threads, and the threads on the slider a (72) are in opposite directions to the threads on the slider B (74).
  3. 3. The crystal plate replacement module according to claim 2, wherein the support plates a (73) and B (75) are bar-shaped, and the support plates a (73) and B (75) have the same length.
  4. 4. A crystal plate replacing module according to claim 3, wherein the rotary block (77) is cylindrical as a whole, and the surface of the rotary block (77) is provided with anti-slip lines.
  5. 5. The crystal plate replacement module according to claim 4, wherein the retarding mechanism (8) comprises a retarding rod (81) and a groove (82), the rear end of the retarding rod (81) is fixedly connected with the front end of the connecting frame (1), the groove (82) is formed in the surface of the threaded rod (76), a telescopic spring (83) is arranged in the groove (82), and an arc-shaped block (84) is slidably connected in the groove (82) through the telescopic spring (83).
  6. 6. The crystal plate replacement module according to claim 5, wherein the top of the deceleration rod (81) is close to the bottom of the threaded rod (76), and the deceleration rod (81) is made of rubber.
  7. 7. The crystal plate replacement module according to claim 6, wherein in the initial state of the arc-shaped block (84) one third protrudes from the surface of the threaded rod (76), and the arc-shaped surface of the arc-shaped block (84) faces in the counterclockwise direction.
  8. 8. An evaporation apparatus comprising a crystal plate replacement module according to any one of claims 1 to 7, characterized by comprising: the evaporation device comprises an evaporation body (2), wherein a sealing door (3) is arranged at the front end of the evaporation body (2), an evaporation pool (4) is arranged in the evaporation body (2), and a placing frame (5) is fixedly connected to the top of the evaporation pool (4); The connecting frame (1) is arranged in the evaporation body (2), a convenient replacement structure (7) is arranged at the top of the connecting frame (1), and the bottom initial state of the connecting frame (1) is in contact with the top of the placement frame (5).
  9. 9. The evaporation device according to claim 8, wherein a handle is provided at a front end of the closing door (3), and the closing door (3) is made of transparent glass.
  10. 10. The evaporation device according to claim 8, wherein the whole of the placement frame (5) is hollowed.

Description

Crystal oscillator piece replacement module and evaporation device Technical Field The embodiment of the disclosure relates to the technical field of semiconductor manufacturing, in particular to a crystal oscillator wafer replacement module and an evaporation device. Background The crystal oscillator is derived from a polyhedral quartz rod, is cut into a hexahedral rod which shines, and is repeatedly cut and ground, and the quartz rod is finally manufactured into a stack of thin wafers. The utility model discloses a crystal oscillator wafer replacing module and an evaporation device, wherein the publication number of the crystal oscillator wafer replacing module is CN 211921684U. The crystal oscillator piece replacement module comprises a probe assembly, a storage assembly and a replacement assembly, wherein the storage assembly comprises a storage box body, a workpiece disc, a crystal oscillator piece assembly and a first driving piece, and a plurality of storage stations used for placing the crystal oscillator piece assembly are arranged on the workpiece disc. In the above application document, the jack post is driven by the third driving piece to continuously ascend relative to the clamping arm, the top of the crystal oscillator wafer assembly is firm, the second driving piece drives the whole replacement assembly to descend, the replacement assembly is separated from the storage assembly, the replacement operation of the crystal oscillator wafer assembly is completed, the replacement step is complex, the burden of an operator is easily increased, and therefore the crystal oscillator wafer assembly needs to be improved. Disclosure of utility model In order to overcome the defects, the embodiment of the disclosure provides a crystal oscillator wafer replacing module and an evaporation device, which solve the technical problems that the replacing steps in the related technology are complicated and the burden of operators is easily increased. According to one aspect, at least one embodiment of the present disclosure provides a crystal oscillator wafer replacement module, including a connection frame, wherein a convenient replacement structure is arranged at the top of the connection frame; The convenient structure of changing includes spout and threaded rod, the spout is seted up at the top of link, the inside sliding connection of spout has slider A and slider B, slider A's top fixedly connected with extension board A, slider B's top fixedly connected with extension board B, the slot has all been seted up at extension board A and extension board B's top, the threaded rod runs through and rotates the front end of connection at the link, the front end fixedly connected with turning block of threaded rod, the surface of threaded rod is provided with retarder mechanism. For example, in the vapor deposition device of the crystal oscillator wafer replacing module provided by at least one embodiment of the present disclosure, the vapor deposition device further includes a slider a and a slider B that are both connected with a threaded rod through internal threads, and the threads on the slider a are opposite to the threads on the slider B, and when the threaded rod rotates, the slider a is driven to move close to or away from each other through cooperation between the threads. The support plate A and the support plate B are strip-shaped, the lengths of the support plate A and the support plate B are equal, and the crystal oscillator wafer is inserted through the slots between the support plate A and the support plate B. The rotary block is wholly cylindrical, and anti-slip lines are formed in the surface of the rotary block, and the threaded rod can be driven to rotate by manually rotating the rotary block. According to another aspect, at least one embodiment of the present disclosure further provides an evaporation device of a crystal oscillator wafer replacement module, including a retarding mechanism including a retarding rod and a groove, wherein the rear end of the retarding rod is fixedly connected with the front end of the connecting frame, the groove is formed in the surface of the threaded rod, a telescopic spring is arranged in the groove, and an arc block is slidably connected in the groove through the telescopic spring. For example, the crystal oscillator wafer replacing module provided by at least one embodiment of the present disclosure further includes that the top of the deceleration rod is close to the bottom of the threaded rod, the deceleration rod is made of rubber, and the threaded rod drives the arc-shaped block to contact with the deceleration rod when rotating. One third of the arc-shaped block protrudes out of the surface of the threaded rod in the initial state, the cambered surface of the arc-shaped block faces to the anticlockwise direction, and the arc-shaped block moves into the groove when being stressed. The front end of evaporation organism is provided with the closing door, the