CN-224227177-U - Vacuum coating equipment of composite current collector

CN224227177UCN 224227177 UCN224227177 UCN 224227177UCN-224227177-U

Abstract

The utility model discloses vacuum coating equipment for a composite current collector, which comprises a vacuum chamber, an unreeling roller, a winding roller, evaporation equipment and magnetron sputtering equipment, wherein the vacuum chamber is divided into two mutually communicated evaporation chambers and the magnetron sputtering chamber through a transition channel, the unreeling roller and the evaporation equipment are arranged in the evaporation chambers, the winding roller and the magnetron sputtering equipment are arranged in the magnetron sputtering chamber, a base film unreeled by the unreeling roller passes through the transition channel after an evaporation conducting layer is evaporated in the evaporation chamber through the evaporation equipment, and is wound on the winding roller after an oxidation resisting layer is sputtered on the conducting layer through the magnetron sputtering equipment in the magnetron sputtering chamber. The utility model can carry out evaporation plating and surface antioxidation treatment on the base film in the same cavity, avoid film oxidation caused by transfer and improve the quality of products.

Inventors

WU DI
JIANG ZILONG
Weng Zihang
WU JUNWEI
WENG WEIJIA

Assignees

江苏英联复合集流体有限公司

Dates

Publication Date: 20260512
Application Date: 20250325

Claims (10)

1. The vacuum coating equipment for the composite current collector is characterized by comprising a vacuum chamber, an unreeling roller, a winding roller, an evaporation device and a magnetron sputtering device, wherein the vacuum chamber is divided into two mutually communicated evaporation chambers and the magnetron sputtering chamber through a transition channel, the unreeling roller and the evaporation device are arranged in the evaporation chambers, the winding roller and the magnetron sputtering device are arranged in the magnetron sputtering chamber, a base film unreeled by the unreeling roller passes through the transition channel after an evaporation conductive layer is evaporated in the evaporation chamber through the evaporation device, and is wound on the winding roller after an oxidation resistant layer is sputtered on the conductive layer through the magnetron sputtering device in the magnetron sputtering chamber.
2. A vacuum coating apparatus for a composite current collector according to claim 1, wherein the vacuum chamber has two partition plates disposed opposite to each other to form the transition passage, and at least one vacuum pump unit is disposed in a lower region of the transition passage.
3. The vacuum coating equipment for the composite current collector, as set forth in claim 2, wherein a channel inlet communicated with the evaporation chamber and a channel outlet communicated with the magnetron sputtering chamber are arranged at the top of the transition channel, the height of the channel inlet is higher than that of the evaporation equipment, the channel inlet is formed by the top of one partition plate and the top wall of the vacuum chamber, and the channel outlet is formed by the top of the other partition plate and the top wall of the vacuum chamber.
4. A vacuum coating apparatus for a composite current collector according to claim 3, wherein a flattening roller is disposed at each of the channel inlet and the channel outlet.
5. A vacuum coating apparatus for a composite current collector according to claim 2, wherein the partition plate comprises an openable access cover plate, and the access cover plate is positioned in the middle of the partition plate.
6. The vacuum coating equipment for the composite current collector, as set forth in claim 2, wherein a cooling system is disposed in the transition channel, the top of the cooling system is connected with the top of the inner wall of the vacuum chamber, and the bottom of the cooling system is suspended and forms a limited space with the bottom of the transition channel for the base film to pass through.
7. The vacuum coating apparatus for a composite current collector according to claim 6, wherein the bottom of the cooling system is lower than the vapor deposition apparatus.
8. The vacuum coating apparatus for a composite current collector according to claim 6, wherein the cooling system is spaced from both of the partition plates by 300-600mm.
9. The vacuum coating equipment for the composite current collector according to claim 1, wherein at least one replaceable cleaning groove is formed in the bottom of the transition channel.
10. The vacuum coating equipment for the composite current collector of claim 1, wherein the evaporation equipment further comprises a first main drum, a second main drum, an evaporation source system I and an evaporation source system II which are respectively positioned below the first main drum and the second main drum, the base film unreeled by the unreeled roller is sequentially wound on the first main drum and the second main drum, the first surface and the second surface of the base film are coated by the evaporation source system I and the evaporation source system II respectively, a plurality of guide rollers and a plurality of flattening rollers are arranged between the unreeled roller and the first main drum, and a plurality of guide rollers and a plurality of flattening rollers are also arranged between the first main drum and the second main drum; The evaporation source system I and the evaporation source system II have the same structure and are positioned at the lower part of the evaporation chamber, and the evaporation source system I and the evaporation source system II comprise a wire feeding mechanism, an evaporation boat and an openable baffle plate, and the baffle plate is positioned above the evaporation boat and the wire feeding mechanism; The magnetron sputtering equipment further comprises a first coating roller and a second coating roller, wherein a plurality of targets are arranged on the peripheries of the first coating roller and the second coating roller; And a plurality of second vacuum pump sets are arranged outside the vacuum chamber at positions corresponding to the evaporation chamber and the magnetron sputtering chamber.

Description

Vacuum coating equipment of composite current collector Technical Field The utility model relates to the technical field of vacuum coating equipment, in particular to vacuum coating equipment for a composite current collector. Background In the preparation process of a composite current collector used for a lithium battery, a roll-to-roll vacuum coating device is generally required to vapor-coat metal materials on the two sides of a high polymer base film to form the composite current collector with a sandwich structure of a metal layer, a base film and a metal layer. The roll-to-roll vacuum coating equipment consists of a shell, a winding system, an evaporation source system and a vacuumizing pump system, can complete the continuous coating process of the whole roll of products in a vacuum cavity, and then the whole roll of products is taken out after the cavity is opened. Wherein, winding system and evaporation source system set up in the cavity, and the vacuum in the shell is inside through vacuum pump system continuous operation maintenance. The current evaporation equipment is used for carrying out reel-to-reel film coating in a single closed cavity, and the whole process needs to finish the procedures of unreeling, evaporating and reeling in the closed vacuum cavity. If a composite current collector material which is easy to oxidize is selected, a metal oxidation resistant layer is added on the film surface, after the film plating of the vapor plating equipment is finished, a cavity is opened to take out the film, the film is placed in a sputtering machine to plate the oxidation resistant layer, the film surface is oxidized by contact with air in the transfer process, a layer of oxidation layer exists between the oxidation resistant material and the vapor plating material, and the plating layer on the film surface is easy to fall off, so that the process of adding the metal oxidation resistant layer is difficult to finish. Accordingly, there is a need to provide a vacuum coating apparatus for a composite current collector to solve the above-mentioned problems. Disclosure of utility model In order to overcome the defects, the utility model aims to provide the vacuum coating equipment of the composite current collector, which can carry out evaporation plating and surface antioxidation treatment on a base film in the same cavity, avoid film oxidation caused by transportation and improve the quality of products. In order to achieve the purpose, the technical scheme is that the vacuum coating equipment of the composite current collector comprises a vacuum chamber, an unreeling roller, a winding roller, evaporation equipment and magnetron sputtering equipment, wherein the vacuum chamber is divided into two mutually communicated evaporation chambers and the magnetron sputtering chamber through a transition channel, the unreeling roller and the evaporation equipment are arranged in the evaporation chambers, the winding roller and the magnetron sputtering equipment are arranged in the magnetron sputtering chambers, a base film unreeled by the unreeling roller passes through the transition channel after an electric layer is evaporated in the evaporation chambers through the evaporation equipment, and is wound on the winding roller after an antioxidant layer is sputtered on the electric layer through the magnetron sputtering equipment in the magnetron sputtering chamber. The equipment can carry out evaporation plating and surface antioxidation treatment on the base film in the same cavity, avoids film oxidation caused by transfer, and improves the quality of products. Further, the vacuum chamber is internally provided with two partition plates which are oppositely arranged to form the transition channel, and the lower area in the transition channel is provided with at least one vacuum pump group I. A transition channel for a base film to pass through in a winding way is formed between two partition plates in the vacuum chamber, so that the gas intercommunication and the mutual influence between the evaporation chamber and the magnetron sputtering chamber are avoided, and when the equipment works, the vacuum pump set is kept in an open state in the whole process so as to maintain the high vacuum degree in the transition channel. Further, the top of the transition channel is provided with a channel inlet communicated with the evaporation chamber and a channel outlet communicated with the magnetron sputtering chamber, the height of the channel inlet is higher than that of the evaporation device, the channel inlet is formed by the top of one partition plate and the top wall of the vacuum chamber, and the channel outlet is formed by the top of the other partition plate and the top wall of the vacuum chamber. The top of transition passageway sets up passageway import and passageway export and the passageway import highly be higher than evaporation equipment is favorable to reducing metal vapor or other impurity that f