CN-224227178-U - Automatic workpiece hanging and conveying system for workpiece barrels of sputtering machine

CN224227178UCN 224227178 UCN224227178 UCN 224227178UCN-224227178-U

Abstract

The utility model discloses an automatic workpiece hanging and conveying system for a workpiece barrel of a sputtering machine, which comprises a manipulator grabbing device, a workpiece placing frame, a vacuum coating chamber capable of accommodating a plurality of workpiece barrels, a conveying device and a transferring device, wherein the manipulator grabbing device comprises a manipulator and a grabbing component, the manipulator is used for hanging or taking down workpieces from the workpiece barrels through the grabbing component operated by the manipulator, the workpiece placing frame is used for placing the plurality of workpieces for the manipulator grabbing device, the conveying device is arranged on one side of the manipulator grabbing device, the transferring devices are respectively arranged at two ends of the conveying device, the workpiece barrels are conveyed to the vacuum coating chamber through the conveying device and the transferring device, and a turntable capable of enabling the workpiece barrels to freely rotate is further arranged on the conveying device. The utility model not only can replace the workload of hanging by manpower, but also can coat the two surfaces of the workpiece without returning to and from the vacuum chamber, thereby forming a closed conveying chain for coating the workpiece barrel and the workpiece, effectively improving the efficiency of vacuum coating and meeting the demands of customers.

Inventors

DANG YAJUN
CHEN XIN
GAO JUNZHENG
ZHAO XUEZHENG

Assignees

南阳清水科技有限公司

Dates

Publication Date: 20260512
Application Date: 20250530

Claims (9)

1. The automatic workpiece hanging and conveying system for the workpiece barrels of the sputtering machine is characterized by comprising a manipulator grabbing device, a workpiece placing rack, a vacuum coating chamber capable of accommodating a plurality of workpiece barrels, a conveying device and a transferring device; The manipulator grabbing device comprises a manipulator and a grabbing component, and the manipulator is used for operating the grabbing component to hang or take down a workpiece from the workpiece barrel; the workpiece placing rack is used for placing a plurality of workpieces and is used for supplying a manipulator grabbing device; the conveying device is arranged at one side of the manipulator grabbing device, two ends of the conveying device are respectively provided with a transfer device, and the workpiece barrel is conveyed to the vacuum coating chamber through the conveying device and the transfer devices; The conveying device is also provided with a rotary table capable of enabling the workpiece barrel to freely rotate, and the rotary table is convenient for the grabbing component to hang or take down the workpieces on the workpiece barrel one by one when rotating; The vacuum coating chamber is used for coating the workpieces on the workpiece barrel, and the workpiece automatic turnover mechanism is arranged in the vacuum coating chamber, so that the workpieces on the workpiece barrel can be turned over 180 degrees freely one by one.
2. The automatic workpiece hanging and conveying system for the sputtering machine workpiece barrel is characterized in that a grabbing component in a manipulator grabbing device comprises a clamping plate connected with an operation end of the manipulator, a fixed clamping groove and a sliding clamping groove are respectively formed in the inner side of the clamping plate and close to two ends of the clamping plate, a clamping cylinder is arranged at the bottom of the sliding clamping groove, a guide wheel is arranged at the position, close to the inner wall of the clamping plate, of the sliding clamping groove, the clamping plate is a U-shaped plate, two limiting cylinders are arranged on the outer side of the clamping plate in the length direction, cylinder rods of the limiting cylinders can extend into the inner side of the clamping plate, a jig plate for bearing workpieces is arranged between the fixed clamping groove and the sliding clamping groove when the workpiece barrel is grabbed, and hoist holes capable of being hung to the workpiece barrel are formed in the upper end and the lower end of the jig plate.
3. The automatic workpiece hanging and conveying system for the sputtering machine workpiece barrel is characterized in that the conveying device comprises a supporting frame and a power sliding rail arranged on the inner side of the supporting frame, a movable base matched with the power sliding rail is arranged at the bottom of the workpiece barrel, a through hole is formed in the top of the workpiece barrel, a rotary table is arranged at one end of the power sliding rail, a lifting pushing mechanism is arranged on one side, close to the rotary table, of the rotary table, a lifting mechanism is arranged below the rotary table, a servo motor is arranged on the corresponding supporting frame above the rotary table, and a conical output end capable of being inserted into the through hole of the workpiece barrel during operation is arranged on the servo motor.
4. The automatic workpiece barrel hanging and conveying system of the sputtering machine of claim 1, wherein the transfer device comprises a power ground rail and a transfer trolley capable of freely moving along the power ground rail, the transfer trolley receives the workpiece barrel from the conveying device, and a power sliding rail capable of enabling the workpiece barrel to enter the vacuum coating chamber is further arranged at the bottom of the transfer trolley.
5. The automatic workpiece hanging and conveying system for the workpiece barrels of the sputtering machine is characterized in that a vacuum coating chamber receives the workpiece barrels from a transfer device, a plurality of workpiece frames capable of rotating 180 degrees are hung outside the workpiece barrels, the workpieces are hung on hanging columns arranged at the upper end and the lower end of the workpiece frames through hoist holes in jig plates, a first clamping seat is connected to the bottom end of each workpiece frame through the bottom of the workpiece barrel, the vacuum coating chamber is provided with a bin inlet door and a bin outlet door, the bin inlet door and the bin outlet door respectively correspond to a transfer device, a coating gun for coating the workpieces, an automatic turnover mechanism for turnover of the workpieces and a travelling mechanism for moving the workpiece barrels from the bin inlet door to the bin outlet door are respectively arranged in the vacuum coating chamber, the travelling mechanism comprises power sliding rails arranged on the inner side of the vacuum coating chamber, a turntable is arranged on one side close to the turntable, a lifting pushing mechanism is arranged below the turntable, a servo motor is arranged on the top of the vacuum coating chamber, and a conical output end of the servo motor can be spliced with a through hole on the top of the workpiece barrels when working.
6. The automatic workpiece hanging and conveying system for the sputtering machine is characterized in that the automatic turnover mechanism comprises three groups of power rotating mechanisms arranged at the bottom of the vacuum coating chamber, any adjacent three workpiece frames can be turned freely through a group of corresponding power rotating mechanisms respectively under the rotation of a servo motor, the power rotating mechanisms comprise a lifting cylinder, a bottom motor and a supporting seat for placing the lifting cylinder and the bottom motor, a universal structure is arranged at the top end of a cylinder rod of the lifting cylinder, a first gear and a second clamping seat capable of being matched and clamped with the first clamping seat are sequentially sleeved outside the universal structure from bottom to top, a second gear meshed with the first gear is arranged at the output end of the bottom motor, the cylinder rod of the lifting cylinder stretches out to enable the first clamping seat and the second clamping seat to be meshed together, the bottom motor sequentially drives the second gear, the first gear and the universal structure to rotate, the three workpiece frames can be freely turned 180 degrees in sequence, the outer wall of the workpiece barrel is movably hung with a workpiece frames, and the servo motor is driven to rotate at 360/a each time when in operation.
7. The automatic workpiece hanging and conveying system for the sputtering machine workpiece barrel according to claim 6, wherein the universal structure comprises a universal coupler connected with the top end of a cylinder rod of the lifting cylinder and a universal shaft connected with the universal coupler, the universal shaft can freely rotate on the universal coupler under the action of external force, the first gear and the second clamping seat are sleeved on the outer wall of the universal shaft from bottom to top, a sleeve is movably sleeved on the outer wall of the universal shaft between the first gear and the second clamping seat, a supporting plate and a fixing plate are fixedly sleeved outside the sleeve respectively, the supporting plate is connected with the supporting seat through a pull rod, the fixing plate is fixed with the bottom surface of the frame, a connecting column is further arranged at the top end of the universal shaft, and the second clamping seat is arranged on the universal shaft close to the connecting column.
8. The automatic workpiece hanging and conveying system for the workpiece barrel of the sputtering machine of claim 6, wherein the workpiece barrel is composed of a top plate, a bottom plate and a plurality of workpiece frames arranged between the top plate and the bottom plate, the upper end and the lower end of each workpiece frame are respectively provided with a rotating shaft capable of rotating freely on the top plate and the bottom plate, a first clamping seat is sleeved on the rotating shaft positioned at the bottom end of the workpiece frame, the tail end of the rotating shaft is further provided with a slotted hole which is in matched connection with a connecting column, a plurality of connecting supports are further arranged between the top plate and the bottom plate in the workpiece barrel, and after the workpiece barrel is jacked up by a turntable, the conical output end of a servo motor is inserted into a through hole at the top of the workpiece barrel.
9. The automatic workpiece hanging and conveying system for the workpiece barrels of the sputtering machine of claim 5, wherein the top of the vacuum coating chamber is further provided with positioning cylinders, positioning holes are uniformly distributed on the surface of the workpiece barrels near each workpiece frame, and when the workpiece frames are turned over, cylinder rods of the positioning cylinders penetrate through the top of the vacuum coating chamber and extend into the positioning holes to meet the positioning function.

Description

Automatic workpiece hanging and conveying system for workpiece barrels of sputtering machine Technical Field The utility model relates to the technical field of optical part coating production, in particular to an automatic workpiece hanging and conveying system for a workpiece barrel of a sputtering machine. Background In the coating process of optical parts, many key components, such as a cut-off filter and a spectroscope, need to be coated on two surfaces of the optical parts respectively to meet specific optical performance requirements. For example, lenses often require an antireflection film plated on both surfaces thereof to ensure good imaging quality and high transmittance. The traditional coating method is to place the part in a sputtering chamber, firstly finish the deposition of a film layer on one side, then take out and place the part, and then put the part into the sputtering chamber for coating the other side. Although the method can meet the coating requirement, the method is long in time consumption and low in efficiency, and needs to go back and forth into and out of the vacuum chamber. The film plating work piece of the sputtering film plating machine is arranged on a rectangular jig plate, then one jig plate is hung on a cylindrical framework by manpower, and the jig plate is taken down after film plating is completed. The cylindrical framework is huge in size, and as the requirements of customers on equipment efficiency are higher, the loading capacity of equipment workpieces is more and more, the height of the jig plate is more and more, the weight is increased, labor and time are wasted when the jig plate is manually hung, and the coating efficiency of materials is severely restricted. In addition, in the coating process, besides coating the two surfaces of the workpiece, the conveying of the workpiece comprises the conveying of feeding and discharging, and is an important component in the whole coating process, along with the rapid development of the vacuum coating industry, the requirements of customers on coating efficiency are higher and higher, and the conveying and transferring of the coating bracket conventionally use a reciprocating type warehouse entry (one end opening) and warehouse exit mechanism, so that the frequent air suction and air discharge of the vacuum chamber can not be avoided, too much time is wasted, and a full-automatic continuous feeding and discharging mechanism is needed to meet the use requirements of the customers. Disclosure of utility model In order to meet the technical requirements, the utility model aims to provide an automatic workpiece hanging and conveying system for a workpiece barrel of a sputtering machine, which not only can replace the workload of hanging by manpower, avoid errors during manual hanging and taking and greatly reduce the artificial tolerance, but also can coat two sides of a workpiece through conveying by a transfer trolley and a production line, and more importantly, the workpiece can be coated on two sides without returning to and exiting from a vacuum chamber, thereby forming a closed conveying chain for coating the workpiece barrel workpiece, effectively improving the efficiency of vacuum coating and meeting the demands of customers. The utility model adopts the technical proposal that the system for automatically hanging and conveying the workpiece barrels of the sputtering machine comprises a manipulator grabbing device, a workpiece placing rack, a vacuum coating chamber capable of containing a plurality of workpiece barrels, a conveying device and a transferring device; The manipulator grabbing device comprises a manipulator and a grabbing component, and the manipulator is used for operating the grabbing component to hang or take down a workpiece from the workpiece barrel; the workpiece placing rack is used for placing a plurality of workpieces and is used for supplying a manipulator grabbing device; the conveying device is arranged at one side of the manipulator grabbing device, two ends of the conveying device are respectively provided with a transfer device, and the workpiece barrel is conveyed to the vacuum coating chamber through the conveying device and the transfer devices; The conveying device is also provided with a rotary table capable of enabling the workpiece barrel to freely rotate, and the rotary table is convenient for the grabbing component to hang or take down the workpieces on the workpiece barrel one by one when rotating; The vacuum coating chamber is used for coating the workpieces on the workpiece barrel, and the workpiece automatic turnover mechanism is arranged in the vacuum coating chamber, so that the workpieces on the workpiece barrel can be turned over 180 degrees freely one by one. The grabbing assembly in the manipulator grabbing device comprises a clamping plate connected with an operation end of the manipulator, a fixed clamping groove and a sliding clamping groove are respectively formed