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CN-224227191-U - Coating device for electronic vacuum device production

CN224227191UCN 224227191 UCN224227191 UCN 224227191UCN-224227191-U

Abstract

The utility model discloses a coating device for producing an electronic vacuum device, which comprises a magnetron sputtering coating machine body, a coating bin and a hanging rack, wherein the hanging rack consists of a vertical rod and a plurality of hanging rod discs movably connected outside the vertical rod, the hanging rod discs are axially and adjustably distributed along the vertical rod, a mounting disc is arranged at the inner bottom of the coating bin, a movable ring is rotatably arranged in an annular groove on the mounting disc, the bottom end of the vertical rod is rotatably connected with the movable ring, a driven gear is fixed at one end of the vertical rod penetrating into the movable ring, and a toothed ring I meshed with the driven gear is fixed at the inner ring of the annular groove of the mounting disc. After the workpiece is hung on the hanging frame, the workpiece can not only rotate around a large circle in the coating bin under the drive of the movable ring, but also rotate under the drive of the driven gear and the first toothed ring, so that the workpiece hung in the coating process can move, the shielding of the hanging frame on the surface of the workpiece is reduced, and the uniformity of a film layer is improved.

Inventors

  • HU YALI

Assignees

  • 淮安汇悦电子科技有限公司

Dates

Publication Date
20260512
Application Date
20250613

Claims (6)

  1. 1. The utility model provides a coating device for electronic vacuum ware production, includes magnetron sputtering coating machine body (1), coating storehouse (2) and stores pylon (3), its characterized in that stores pylon (3) comprise montant (4) and a plurality of peg dish (5) of swing joint outside montant (4), and peg dish (5) are along montant (4) axial adjustment distribution, be equipped with mounting plate (7) in coating storehouse (2), annular rotation is installed on this mounting plate (7) go up expansion ring (6), and the bottom and the expansion ring (6) rotation of montant (4) are connected, the one end that montant (4) penetrated in expansion ring (6) is fixed with driven gear (8), and the annular inner circle of mounting plate (7) is fixed with and driven gear (8) meshed toothed ring (11), when expansion ring (6) are rotatory, revolve around ring (6) axis revolution while driving stores pylon (3).
  2. 2. The coating device for producing the electronic vacuum device according to claim 1, wherein the hanging rod disc (5) comprises a sleeve (52) and a plurality of hanging rods (51) distributed on the periphery of the sleeve (52), and the sleeve (52) is in threaded connection with the vertical rod (4).
  3. 3. The coating device for producing the electronic vacuum device according to claim 2, wherein the sleeve (52) is externally screwed with a threaded sleeve (53), the threaded sleeve (53) is externally rotatably sleeved with a rotating ring (54), a plurality of supporting rods (55) in one-to-one correspondence with the hanging rods (51) are hinged outside the rotating ring (54), one end, far away from the rotating ring (54), of each supporting rod (55) is hinged with the middle section of the hanging rod (51), and the top end of each hanging rod (51) is hinged with the sleeve (52).
  4. 4. The coating device for producing the electronic vacuum device according to claim 2, wherein the outer wall of the sleeve (52) is screwed with a locking rod (56) along the radial direction, and one end of the locking rod (56) screwed into a screw hole in the sleeve (52) is rotatably connected with a locking block (57).
  5. 5. The coating device for producing the electronic vacuum device according to claim 1, wherein the hanging frame (3) is uniformly scattered and distributed along the circumferential direction of the movable ring (6).
  6. 6. The coating device for producing the electronic vacuum device according to claim 1, wherein the second toothed ring (12) is fixed on the outer ring of the movable ring (6), the driving gear (10) is connected to the periphery of the second toothed ring (12) in a meshed manner, the driving gear (10) is rotatably installed in the installation disc (7), and the motor (9) is connected below the driving gear (10).

Description

Coating device for electronic vacuum device production Technical Field The utility model relates to the technical field of coating processing, in particular to a coating device for producing an electronic vacuum device. Background The core structure of the electronic vacuum device comprises a vacuum-sealed tube shell and an internal electrode. In order to improve the electrode emission efficiency and the stability of the device in the electronic vacuum device, the surface of the electrode needs to be coated during production and processing, and a magnetron sputtering coating machine is used at the moment. At present, when magnetron sputtering coating is carried out, a workpiece is firstly hung on a hanging frame in a machine body coating bin, however, the traditional hanging frame is fixed, the workpiece is placed at a fixed position and is not rotated or moved, the thickness difference of a film layer is easy to cause, the uniformity of the coating is difficult to ensure, and the forming quality of the film layer is influenced. Therefore, we propose a coating device for electronic vacuum production to solve the above problems. Disclosure of utility model The utility model aims to provide a coating device for producing an electronic vacuum device, which aims to solve the problems in the background technology. In order to achieve the above purpose, the present utility model provides the following technical solutions: The utility model provides a coating device is used in production of electron vacuum ware, includes magnetron sputtering coating machine body, coating film storehouse and stores pylon, the stores pylon comprises montant and a plurality of peg dish of swing joint outside the montant, and the peg dish is along montant axial adjustment distribution, be equipped with the mounting disc in the coating film storehouse, the annular rotation is installed the expansion ring on this mounting disc, and the bottom and the expansion ring rotation of montant are connected, the one end that the montant penetrated the expansion ring is fixed with driven gear, and the annular inner circle of mounting disc is fixed with the toothed ring one with driven gear meshing, when the expansion ring is rotatory, revolve round the expansion ring axial lead when driving the stores pylon rotation. In a further embodiment, the hanging rod disc comprises a sleeve and a plurality of hanging rods distributed on the periphery of the sleeve, and the sleeve is in threaded connection with the vertical rods. In a further embodiment, the sleeve is screwed with a threaded sleeve, a swivel is sleeved outside the threaded sleeve in a rotating manner, a plurality of supporting rods corresponding to the hanging rods one by one are hinged outside the swivel, one end of each supporting rod, far away from the swivel, is hinged with the middle section of the hanging rod, and the top end of each hanging rod is hinged with the sleeve. In a further embodiment, a locking rod is screwed on the outer wall of the sleeve along the radial thread, and a locking block is connected to one end of the locking rod screwed into a screw hole in the sleeve in a rotating mode. In a further embodiment, the hanger is uniformly scattering distributed along the circumference of the movable ring. In a further embodiment, a second toothed ring is fixed on the outer ring of the movable ring, a driving gear is connected to the periphery of the second toothed ring in a meshed mode, the driving gear is rotatably installed in the installation disc, and a motor is connected below the driving gear. Compared with the prior art, the utility model has the beneficial effects that: After the workpiece is hung on the hanging frame, the workpiece can not only rotate around a large circle in the coating bin under the drive of the movable ring, but also rotate under the drive of the driven gear and the first toothed ring, so that the workpiece hung in the coating process can move, the shielding of the hanging frame on the surface of the workpiece is reduced, and the uniformity of a film layer is improved. Drawings FIG. 1 is a schematic diagram of the structure of the present utility model; FIG. 2 is a schematic view of the mounting structure of the hanger and the movable ring according to the present utility model; FIG. 3 is a schematic view of the mounting structure of the hanger plate and the vertical bar of the present utility model; Fig. 4 is a schematic view of a mounting part cross-section structure of a vertical rod, a hanging rod disc and a movable ring of the utility model. In the figure, 1, a magnetron sputtering coating machine body; 2, a coating bin, 3, a hanging rack, 4, a vertical rod, 5, a hanging rod disc, 51, a hanging rod, 52, a sleeve, 53, a threaded sleeve, 54, a swivel, 55, a supporting rod, 56, a locking rod, 57, a locking block, 6, a movable ring, 7, a mounting disc, 8, a driven gear, 9, a motor, 10, a driving gear, 11, a toothed ring I, 12 and a toothed ring II.