CN-224227194-U - Device and system for self-cleaning outside cavity of carrier plate of plate type PVD (physical vapor deposition) coating equipment

CN224227194UCN 224227194 UCN224227194 UCN 224227194UCN-224227194-U

Abstract

The utility model relates to the field of photovoltaic coating equipment, and discloses a self-cleaning device and system outside a carrier plate cavity of plate type PVD coating equipment. The functional chamber comprises a laser initial cleaning functional chamber, a normal pressure plasma cleaning functional chamber, a maintenance functional chamber and an exhaust gas treatment chamber communicated with the functional chambers which are sequentially connected. And each functional room is provided with a gate valve with an isolation function and/or an air curtain with an isolation spraying function. The shell of the normal pressure plasma cleaning functional chamber is of a single-layer structure. The gas source of the plasma cleaning generator is O 2 and/or N 2 , or H 2 and/or NH 3 . The self-cleaning system is used for carrying out multi-layer parallel arrangement or serial arrangement on a plurality of self-cleaning devices according to production requirements. The utility model not only can save equipment space and transportation turnover links, but also improves the effective utilization rate of equipment.

Inventors

YANG YUSHENG
SHAN HONGQING
CHENG XU

Assignees

福建省金石能源股份有限公司

Dates

Publication Date: 20260512
Application Date: 20250409

Claims (8)

1. The self-cleaning device outside the carrier plate cavity of the plate-type PVD coating equipment is characterized by comprising a plurality of functional chambers which are positioned on a return region of the carrier plate of the coating equipment and are hermetically protected at the periphery and a carrier plate conveying mechanism which is arranged in the functional chambers, wherein the functional chambers comprise a laser primary cleaning functional chamber, a normal pressure plasma cleaning functional chamber, a maintenance functional chamber and an exhaust gas treatment chamber which are sequentially connected, and each functional chamber is provided with a gate valve with an isolation function and/or an air curtain with an isolation spraying function; The shell of the normal pressure plasma cleaning functional chamber is of a single-layer structure, the normal pressure plasma cleaning functional chamber comprises a plasma cleaning chamber, a plurality of plasma cleaning generators are arranged in the plasma cleaning chamber, a cleaning fairing is arranged below the plasma cleaning generators, and an air source of the plasma cleaning generators is O 2 or N 2 , or H 2 or NH 3 .
2. The self-cleaning device outside the carrier plate cavity of the plate-type PVD coating equipment according to claim 1, wherein when the gas source of the plasma cleaning generator is H 2 or NH 3 , a passivation function chamber is arranged between the normal pressure plasma cleaning function chamber and the maintenance function chamber; The shell of the passivation function chamber is a single-layer stainless steel or aluminum alloy airtight protective cover; A plurality of plasma passivation generators and passivation fairings arranged below the plasma passivation generators are arranged in the passivation function chamber, and the gas source of the plasma passivation generators is O 2 or N 2 ; an air curtain is arranged between the plasma passivation generators, and a gate valve and an air curtain are arranged between the passivation function chamber and the maintenance function chamber.
3. The self-cleaning device outside a carrier plate cavity of a plate-type PVD coating equipment according to claim 1, wherein the shell of the maintenance function chamber is a single-layer stainless steel or aluminum alloy airtight protective cover, and a plurality of maintenance fairings for introducing maintenance ions and maintenance atmosphere are arranged in the maintenance function chamber.
4. The self-cleaning device outside the carrier plate cavity of the plate-type PVD coating equipment according to claim 3, wherein the two plasma cleaning chambers are respectively a main plasma cleaning chamber for rough plasma cleaning and a secondary plasma cleaning chamber for fine plasma cleaning, and the main plasma cleaning chamber and the secondary plasma cleaning chamber are communicated with each other.
5. The self-cleaning device outside a carrier plate cavity of a plate type PVD coating equipment according to claim 4, wherein the laser initial cleaning function chamber comprises a laser chamber, a gate valve and a wind curtain are arranged between the laser chamber and the coating equipment and between the laser chamber and a normal pressure plasma cleaning function chamber, a laser machine is arranged in the laser chamber, the laser machine is positioned above a carrier plate conveying mechanism, and a dust hood for electrostatic dust removal is arranged on the laser machine.
6. The self-cleaning device outside the carrier plate cavity of the plate type PVD coating equipment according to claim 5, wherein the shell of the laser cavity is a single-layer stainless steel or aluminum alloy airtight protective cover, two laser cavities are respectively provided with a transverse laser chamber for transverse laser cleaning and a longitudinal laser chamber for longitudinal laser cleaning, a plurality of transversely-moving laser heads are arranged in the transverse laser chamber, and a plurality of longitudinally-moving laser heads are arranged in the longitudinal laser chamber.
7. The self-cleaning device outside a carrier plate cavity of a plate-type PVD coating equipment according to claim 2, wherein the shell of the waste gas treatment chamber is a single-layer stainless steel or aluminum alloy airtight protective cover, the waste gas treatment chamber comprises a waste gas treatment device for harmless treatment of gas, a filter for filtering solid particles and smoke dust, an air inlet and a sewage outlet, and the air inlet of the waste gas treatment chamber is respectively connected with a waste gas outlet of a laser initial washing function chamber, a normal pressure plasma cleaning function chamber, a passivation function chamber and a maintenance function chamber.
8. A self-cleaning system outside a carrier plate cavity of a plate type PVD coating device, which is characterized by comprising two sets of self-cleaning devices outside the carrier plate cavity of the plate type PVD coating device, a plurality of lifting mechanisms and a conveying line, wherein the self-cleaning devices are as claimed in any one of claims 1 to 7; The upper layer and the lower layer are arranged in parallel between the two sets of self-cleaning devices, the head end and the tail end of the self-cleaning devices are respectively connected with a conveying line, and the conveying line is connected with a feeding end and a discharging end of the coating equipment through a lifting mechanism; The two sets of self-cleaning devices are connected end to end, a conveying line for conveying the to-be-cleaned carrier plate and the cleaned carrier plate is also arranged below the two sets of self-cleaning devices, and the two ends of the head and the tail of the self-cleaning devices are respectively connected with a feed inlet and a feed outlet of the self-cleaning devices, a feed end and a discharge end of the coating equipment through lifting mechanisms.

Description

Device and system for self-cleaning outside cavity of carrier plate of plate type PVD (physical vapor deposition) coating equipment Technical Field The utility model relates to the field of photovoltaic coating equipment, in particular to a self-cleaning device and system outside a carrier plate cavity of plate type PVD coating equipment. Background As the industrialization of flat panel displays, particularly heterojunction solar cells, tends to mature, the key equipment, the plate-type PVD coating equipment, has large production energy, high coating uniformity and deposition rate, and is widely used. However, the problem that the deposition byproducts of the carrier plate and the vacuum cavity which are unavoidable in continuous deposition of the plate-type PVD coating equipment are accumulated to a certain extent and are easy to fall off to generate dust particle pollution is solved, the carrier plate and the vacuum cavity are cleaned by adopting a regular equipment maintenance mode in the traditional plate-type PVD coating equipment, but due to the fact that the byproducts of the carrier plate are more adhered and are complex in distribution, even if the carrier plate is cleaned regularly, certain attachments still fall off randomly on the carrier plate driven by the vacuum cavity under the repeated temperature and pressure changing environment for many times, and in addition, the self-cleaning difficulty and the online cleaning time of the cavity are necessarily increased by adopting the cavity for cleaning the carrier plate. Disclosure of utility model The utility model aims to solve the defects of the prior art of carrier plate cleaning, and provides a self-cleaning device and a self-cleaning system outside a carrier plate cavity of a plate type PVD coating device, which not only can clean thoroughly and efficiently, but also can reduce the problems of equipment starting time occupation, cavity self-cleaning difficulty increase and production cost increase in the prior art. In order to achieve the above purpose, the present utility model adopts the following technical scheme: The utility model also discloses a self-cleaning device outside the cavity of the carrier plate of the plate type PVD coating equipment, which comprises a plurality of functional chambers which are positioned on the back transmission area of the carrier plate of the coating equipment and are hermetically protected at the periphery and a carrier plate conveying mechanism which is arranged in the functional chambers, wherein the functional chambers comprise a laser primary cleaning functional chamber, a normal pressure plasma cleaning functional chamber, a maintenance functional chamber and a waste gas treatment chamber which are sequentially connected, and each functional chamber is provided with a gate valve with an isolation function and/or an air curtain with an isolation spraying function. The shell of the normal pressure plasma cleaning functional chamber is of a single-layer structure, the normal pressure plasma cleaning functional chamber comprises a plasma cleaning chamber, a plurality of plasma cleaning generators are arranged in the plasma cleaning chamber, a cleaning fairing is arranged below the plasma cleaning generators, and a gas source of the plasma cleaning generators is O 2 and/or N 2 or H 2 and/or NH 3. Further, when the gas source of the plasma cleaning generator is H 2 and/or NH 3, a passivation function chamber is further arranged between the normal pressure plasma cleaning function chamber and the maintenance function chamber. The shell of the passivation function chamber is a single-layer stainless steel or aluminum alloy airtight protective cover. A plurality of plasma passivation generators are arranged in the passivation function chamber, and a passivation fairing is arranged below the plasma passivation generators, wherein the gas source of the plasma passivation generators is O 2、N2; an air curtain is arranged between the plasma passivation generators, and a gate valve and an air curtain are arranged between the passivation function chamber and the maintenance function chamber. Further, the shell of the maintenance function chamber is a single-layer stainless steel or aluminum alloy airtight protective cover, and a plurality of maintenance fairings for introducing maintenance ions and maintenance atmosphere are arranged in the maintenance function chamber. Further, the two plasma cleaning chambers are respectively a main plasma cleaning chamber for plasma rough cleaning and a secondary plasma cleaning chamber for plasma fine cleaning, and the main plasma cleaning chamber and the secondary plasma cleaning chamber are communicated with each other. The laser initial cleaning functional chamber comprises a laser chamber, a gate valve and a wind curtain are arranged between the laser chamber and the coating equipment and between the laser chamber and the normal pressure plasma cleaning functional chamber,