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CN-224227197-U - Operation tool for picking and placing Dan Yingshan

CN224227197UCN 224227197 UCN224227197 UCN 224227197UCN-224227197-U

Abstract

The utility model provides an operation tool for picking and placing Dan Yingshan, which comprises a handle and a base connected with the handle, wherein clamping grooves are formed in the end faces, corresponding to the width and the height, of the base, the clamping grooves penetrate through the base in the width direction of the base and do not penetrate through the base in the length and the height directions of the base, the base can be placed into a central hole of a quartz grid, the clamping grooves are clamped into the quartz grid in the radial direction, and the clamping grooves are in clearance fit with the quartz grid in the height direction. After the operating tool is used, the capability of manually replacing the quartz grating is improved, the safety of taking and placing the quartz grating can be ensured, and the damage risk of the quartz grating and related parts in the operating process is reduced.

Inventors

  • Wang Chengluan
  • WANG HUI
  • GUO LIBING
  • ZHANG XINLEI

Assignees

  • 上海新微半导体有限公司

Dates

Publication Date
20260512
Application Date
20250516

Claims (10)

  1. 1. The operating tool for picking and placing Dan Yingshan is characterized by comprising a handle and a base connected with the handle, wherein clamping grooves are formed in end faces, corresponding to the width and the height, of the base, the clamping grooves penetrate through the base in the width direction of the base and do not penetrate through the base in the length and the height direction of the base, the base can be placed into a center hole of Dan Yingshan, the clamping grooves are clamped into a quartz grid in the radial direction, and the clamping grooves are in clearance fit with the quartz grid in the height direction.
  2. 2. The handling tool for picking and placing Dan Yingshan as defined in claim 1, wherein the depth direction of the clamping groove corresponds to the length direction of the base, and the depth of the clamping groove is 30% -50% of the width of the quartz grid ring.
  3. 3. The handling tool for picking and placing Dan Yingshan as defined in claim 2, wherein the depth of the clamping groove is 30% -35% of the width of the quartz grid ring.
  4. 4. The handling tool for picking and placing Dan Yingshan according to any one of claims 1 to 3, wherein the depth of the clamping groove is 70mm to 80mm.
  5. 5. The handling tool for pick-and-place Dan Yingshan as defined in claim 4 wherein the depth of the slot is 75mm.
  6. 6. The handling tool for picking and placing Dan Yingshan according to claim 1, wherein a gap between the clamping groove and the quartz grid in the height direction is 2 mm-3 mm.
  7. 7. The handling tool for picking and placing Dan Yingshan as defined in claim 6, wherein the height of the clamping groove is 4 mm-6 mm.
  8. 8. The handling tool for pick-and-place Dan Yingshan as set forth in claim 1, wherein a thickness of a lower sidewall of the card slot extending into the bottom of the quartz grid is less than a distance between the bottom of the quartz grid and a lower coil.
  9. 9. The handling tool for picking and placing Dan Yingshan as defined in claim 8, wherein the thickness of the lower side wall of the clamping groove is 1.2mm to 1.5mm.
  10. 10. The operational tool for picking and placing Dan Yingshan as defined in claim 1, further having at least one of the following structures: One end or two ends of the handle are fixedly connected with the base; The handle is arranged in a bent shape; an anti-slip structure is arranged on the handle; the clamping groove is of a polishing structure; The depth direction of the clamping groove corresponds to the length direction of the base, and the depth of the clamping groove is greater than or equal to 1/2 of the length of the base.

Description

Operation tool for picking and placing Dan Yingshan Technical Field The utility model belongs to the field of semiconductor equipment operation, and particularly relates to an operation tool for picking and placing Dan Yingshan. Background At present, in the epitaxial wafer production and manufacturing process, the operation of periodically maintaining a reaction cavity of an epitaxial device (such as MOCVD device) is generally involved, and Dan Yingshan needs to be taken and placed in the maintenance process. The traditional method for taking and placing the quartz grating is to operate with common tweezers. However, the quartz material has high brittleness and smooth surface, and the plane clamping mode of the common tweezers is easy to cause the quartz grating to slide down due to insufficient friction force, so that the quartz grating is damaged, and the quartz grating can collide with a light pipe, a graphite part and the like near the quartz grating, so that the nearby parts are damaged. And the space of the reaction cavity is limited, the operation angle and the force are required to be accurately controlled, the difficulty of picking and placing Dan Yingshan by common tweezers is high, and the operation skill requirement on equipment maintenance personnel is high. Disclosure of utility model In view of the above-mentioned drawbacks of the prior art, the present utility model aims to provide an operation tool for picking and placing Dan Yingshan, which aims to more efficiently and conveniently pick and place Dan Yingshan in the process of maintaining a reaction chamber of an epitaxial device, and to reduce the damage risk of a quartz grid and related parts to the greatest extent. The utility model provides an operating tool for picking and placing Dan Yingshan, which comprises a handle and a base connected with the handle, wherein clamping grooves are formed in end faces, corresponding to the width and the height, of the base, penetrate through the base in the width direction of the base and do not penetrate through the base in the length and the height direction of the base, the base can be placed into a center hole of Dan Yingshan, the clamping grooves are clamped into a quartz grid in the radial direction, and the clamping grooves are in clearance fit with the quartz grid in the height direction. Optionally, the depth direction of the clamping groove corresponds to the length direction of the base, and the depth of the clamping groove is 30% -50% of the width of the quartz grid ring. Optionally, the depth of the clamping groove is 30% -35% of the width of the quartz grid ring. Optionally, the depth of the clamping groove is 70 mm-80 mm. Optionally, the depth of the clamping groove is 75mm. Optionally, a gap between the clamping groove and the quartz grid in the height direction is 2 mm-3 mm. Optionally, the height of the clamping groove is 4 mm-6 mm. Optionally, the thickness of the lower side wall of the clamping groove extending into the bottom of the quartz grid is smaller than the distance between the bottom of the quartz grid and the lower coil. Optionally, the thickness of the lower side wall of the clamping groove is 1.2 mm-1.5 mm. Optionally, the operation tool further has at least one of the following structures: One end or two ends of the handle are fixedly connected with the base; The handle is arranged in a bent shape; an anti-slip structure is arranged on the handle; the clamping groove is of a polishing structure; The depth direction of the clamping groove corresponds to the length direction of the base, and the depth of the clamping groove is greater than or equal to 1/2 of the length of the base. As described above, the present utility model provides an operation tool for picking and placing Dan Yingshan, which has at least the following The beneficial effects are that: Among the above operating tool, on the one hand, grip and operate through the handle, on the other hand load the quartz grating through base and draw-in groove thereof, realize getting and put Dan Yingshan's operation, so, make the equipment maintainer can more high-efficient convenient change quartz grating, promoted the ability of manual change Dan Yingshan, ensured simultaneously and got the security of putting quartz grating process, the damage risk of quartz grating and relevant part in the at utmost has been reduced in the operation process. Drawings The drawings are included to provide a better understanding of the utility model and are not to be construed as unduly limiting the utility model. Wherein: FIG. 1 is a side view of an operating tool provided in accordance with a preferred embodiment of the present utility model; FIG. 2 is a front view of an operating tool provided in accordance with a preferred embodiment of the present utility model; fig. 3 is an application view of the operation tool according to a preferred embodiment of the present utility model, in which the handle is represented in a simple