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CN-224227200-U - Hot filament CVD diamond film growing device

CN224227200UCN 224227200 UCN224227200 UCN 224227200UCN-224227200-U

Abstract

The utility model discloses a hot filament CVD diamond film growing device, which comprises a growing chamber, wherein a substrate is arranged in the growing chamber, a water cooling part is arranged below the substrate, an electrode is arranged above the substrate, the electrode is connected with a hot filament, a water inlet pipe and a water outlet pipe are connected below the water cooling part, the tail end of the water inlet pipe is connected with a cooling water pump, the right side of the cooling water pump is connected with a cooling water tank outlet pipe, the right side of the cooling water tank outlet pipe is connected with a cooling water tank, the left side of the bottom of the growing chamber is connected with a vacuum inlet pipe, the left side of the vacuum inlet pipe is connected with a vacuum pump, the left side of the vacuum pump is connected with a vacuum outlet pipe, the top of the growing chamber is provided with a gas distribution plate, and a pressure relief pipe, a blow-down pipe and a carbon-containing gas pipe are also connected on a hydrogen outlet pipe. The utility model can effectively solve the problems in the prior art and create better economic benefit.

Inventors

  • ZHU ZHU

Assignees

  • 洛阳誉芯金刚石有限公司

Dates

Publication Date
20260512
Application Date
20250613

Claims (8)

  1. 1. The hot filament CVD diamond film growing device is characterized by comprising a growing chamber, a substrate is arranged in the growing chamber, a water cooling part is arranged below the substrate, a bending part for increasing the cooling area is arranged on the water cooling part, an electrode is arranged above the substrate, the electrode is connected with a hot filament, the distance between the hot filament and the substrate is 10-15mm, a water inlet pipe and a water outlet pipe are connected below the water cooling part, the tail end of the water inlet pipe is connected with a cooling water pump, the right side of the cooling water pump is connected with a cooling water tank outlet pipe, the right side of the cooling water tank outlet pipe is connected with a cooling water tank, the left side of the bottom of the growing chamber is connected with a vacuum inlet pipe, the left side of the vacuum inlet pipe is connected with a vacuum pump, the top of the growing chamber is provided with a gas distribution plate, the top of the gas distribution plate is connected with a hydrogen outlet pipe, the left end of the hydrogen outlet pipe is connected with a storage tank, and the hydrogen outlet pipe is also connected with a pressure relief pipe, a sewage drain pipe and a carbon-containing gas pipe.
  2. 2. The apparatus of claim 1, wherein the gas distribution plate has distribution holes for uniformly distributing gas, and the distribution holes are circular.
  3. 3. The apparatus of claim 1, wherein the bending portions are arranged in a "nearly" shape.
  4. 4. The apparatus of claim 1, wherein a circulating fan is installed on the right side of the growth chamber, and a circulating pipe is connected to the circulating fan.
  5. 5. The apparatus of claim 1, wherein the inlet pipe is provided with a water inlet valve, and the outlet pipe of the cooling water tank is provided with a valve of the cooling water tank.
  6. 6. The apparatus of claim 1, wherein the vacuum inlet pipe is provided with a vacuum inlet valve, and the vacuum outlet pipe is provided with a vacuum outlet valve.
  7. 7. The apparatus of claim 1, wherein the hydrogen outlet valve is mounted on the hydrogen outlet pipe, and the carbon-containing gas valve is mounted on the carbon-containing gas pipe.
  8. 8. The device of claim 1, wherein the relief valve is mounted on the relief pipe, and the drain valve is mounted on the drain pipe.

Description

Hot filament CVD diamond film growing device Technical Field The application relates to the technical field of diamond production, in particular to a hot filament CVD diamond film growth device. Background In the production process of the diamond film, a large amount of hydrogen and other mixed gases are required, and particularly, the oxygen and the hydrogen are mixed in a specific ratio (4% -75%) so as to be extremely easy to explode. In the prior art, the method is mainly used for pumping out the hydrogen in the equipment, but the residual hydrogen in the hydrogen pipeline after the system is stopped is often ignored, and the residual hydrogen causes potential safety hazards for the secondary operation of the diamond film growing device. In addition, the cooling part used by the existing diamond film growing device has lower cooling efficiency and can not meet the requirement of the existing diamond film growth. Disclosure of utility model In order to solve the technical problems, the inventor develops a hot wire CVD diamond film growing device according to the abundant experience accumulated in the technical field of diamond production. In order to achieve the above purpose, the hot filament CV D diamond film growing device comprises a growing chamber, wherein a substrate is arranged in the growing chamber, a water cooling part is arranged below the substrate, a bending part for increasing the cooling area is arranged on the water cooling part, an electrode is arranged above the substrate, the electrode is connected with a hot filament, the distance between the hot filament and the substrate is 10-15mm, a water inlet pipe and a water outlet pipe are connected below the water cooling part, the tail end of the water inlet pipe is connected with a cooling water pump, the right side of the cooling water pump is connected with a cooling water tank outlet pipe, the right side of the cooling water tank outlet pipe is connected with a cooling water tank, the left side of the bottom of the growing chamber is connected with a vacuum inlet pipe, the left side of the vacuum inlet pipe is connected with a vacuum pump, the top of the growing chamber is provided with a gas distribution plate, the top of the gas distribution plate is connected with a hydrogen outlet pipe, the left end of the hydrogen outlet pipe is connected with a hydrogen storage tank, and the hydrogen outlet pipe is also connected with a sewage drain pipe and a carbon-containing pipe. Further, the carbon-containing gas pipe may pass through a carbon-containing gas, and the carbon-containing gas is any one of methane, ethane, propane, butane, ethylene and acetylene. Further, the gas distribution plate is provided with distribution holes for uniformly distributing gas, and the distribution holes are circular. Further, the water cooling part is provided with a bending part for increasing the cooling area, and the bending part is arranged in a shape like a Chinese character 'ji'. Further, a circulating fan is arranged on the right side of the growth chamber, and a circulating pipe is connected to the circulating fan. Further, a water inlet valve is arranged on the water inlet pipe, and a cooling water tank valve is arranged on the cooling water tank outlet pipe. Further, a vacuum inlet valve is arranged on the vacuum inlet pipe, and a vacuum outlet valve is arranged on the vacuum outlet pipe. Further, a hydrogen outlet valve is arranged on the hydrogen outlet pipe, and a carbon-containing gas valve is arranged on the carbon-containing gas pipe. Further, a relief valve is arranged on the relief pipe, and a drain valve is arranged on the drain pipe. The extension direction of the pressure relief pipe is upward, and the extension direction of the blow-down pipe is downward. Furthermore, in order to improve the overall automation efficiency of the equipment, the carbon-containing gas valve of the hydrogen outlet valve and the pressure relief valve are automatic control valves. Compared with the prior art, the utility model has the following beneficial effects: 1. According to the utility model, by arranging equipment such as the vacuum pump, the pressure relief valve, the blow-off valve and the like, after the system is stopped, the vacuum pump can be started, the growth chamber and the hydrogen pipeline connected with the growth chamber are subjected to negative pressure pumping operation, and the nitrogen pipe is connected with the pressure relief pipe, so that nitrogen can carry out replacement operation on the growth chamber and the hydrogen pipeline, after the replacement is finished, an analysis person is informed to detect the gas in the growth chamber and the hydrogen pipeline, the oxygen is ensured not to be contained, and therefore, the residual hydrogen in the pipeline after the system is stopped can be completely replaced, and the safety of the equipment is ensured. If meet emergency such as power failure during normal production, can be timely