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CN-224227202-U - Shunt for coating equipment

CN224227202UCN 224227202 UCN224227202 UCN 224227202UCN-224227202-U

Abstract

The utility model relates to the field of coating equipment, and discloses a diverter for coating equipment, which is arranged below a central air inlet hole of a coating vacuum chamber. The diverter comprises a disc main body, wherein first diversion areas to fifth diversion areas are sequentially distributed on the disc main body from the center to the periphery, the first areas are solid conical discs, a plurality of first ventilation holes are formed in the conical discs, ventilation grooves and ventilation baffles are distributed on the second diversion areas to the fifth diversion areas, the ventilation grooves are distributed in a shape of radiating from the middle to the periphery, and the ventilation grooves are distributed in a staggered mode. The ventilation grooves on the second diversion area and the fourth diversion area account for 30% -35% of the area of the respective diversion areas, the ventilation grooves on the third diversion area and the fourth diversion area account for 25% -30% of the area of the respective diversion areas, the number of the ventilation grooves of the second diversion area to the fifth diversion area is increased in sequence, and the length is increased in sequence. The baffles on the second to fifth diversion areas are respectively provided with the next baffle along the diameter direction.

Inventors

  • ZHU XIAOJUN
  • SHAN HONGQING
  • HUANG WENZHI
  • WU TIANMING
  • Lian Xuan

Assignees

  • 福建省金石能源股份有限公司

Dates

Publication Date
20260512
Application Date
20250429

Claims (8)

  1. 1. The diverter for the coating equipment is arranged below a central air inlet hole of a coating vacuum chamber, and is characterized by comprising a disc main body, wherein the disc main body is sequentially distributed with the following components from the center to the periphery: The first diversion area is a solid conical disk, and a plurality of first vent holes are formed in the conical disk; The second diversion area is uniformly and alternately provided with a plurality of second ventilation grooves and second baffles, and the second ventilation grooves account for 30% -35% of the area of the second diversion area; the third diversion area is uniformly and alternately provided with a plurality of third ventilation grooves and third baffles, and the third ventilation grooves account for 25% -30% of the area of the third diversion area; The fourth diversion area is uniformly and alternately provided with a plurality of fourth ventilation grooves and fourth baffles, and the fourth ventilation grooves account for 30% -35% of the area of the fourth diversion area; The fifth diversion area is uniformly and alternately provided with a plurality of fifth ventilation grooves and fifth baffles, and the fifth ventilation grooves account for 25% -30% of the area of the fifth diversion area; The second flow distribution area to the fifth flow distribution area are all annular, the number of the ventilation grooves of the second flow distribution area to the fifth flow distribution area is sequentially increased, the lengths of the ventilation grooves are sequentially increased, the second ventilation grooves to the fifth ventilation grooves are distributed in a staggered mode along the diameter direction of the disc main body, each second baffle plate is correspondingly provided with a third baffle plate along the diameter direction, each third baffle plate is correspondingly provided with a fourth baffle plate along the diameter direction, and each fourth baffle plate is correspondingly provided with a fifth baffle plate along the diameter direction.
  2. 2. The flow divider for a coating apparatus according to claim 1, wherein n second ventilation slots and n second baffles are provided on the second flow dividing region, 2n third ventilation slots and 2n third baffles are provided on the third flow dividing region, 4n fourth ventilation slots and 4n fourth baffles are provided on the fourth flow dividing region, 8n fifth ventilation slots and 8n fifth baffles are provided on the fifth flow dividing region, and n=5, 6, or 7.
  3. 3. The diverter for a coating apparatus as recited in claim 1, wherein the conical disk of the first diverter zone has an angle a of 155 ° -175 °.
  4. 4. The shunt for a plating apparatus according to claim 1, wherein a diameter of said first vent hole is 1.5mm to 2mm.
  5. 5. The flow divider for coating equipment according to claim 1, wherein a fixing area is arranged between the fourth flow dividing area and the fifth flow dividing area, a plurality of fixing holes for fixing on the coating vacuum chamber are arranged on the fixing area, and the fixing holes are staggered with the fourth baffle plate in the diameter direction.
  6. 6. The flow divider for a coating apparatus according to claim 1, wherein the second baffle is disposed obliquely, one end connected to the third flow dividing region is higher than one end connected to the first flow dividing region, and upper surfaces of the third flow dividing region, the fourth flow dividing region and the fifth flow dividing region are coplanar and higher than an upper surface of the first flow dividing region.
  7. 7. The shunt for a plating apparatus according to claim 1, wherein an anticorrosive layer is provided on an outer surface of said disk main body.
  8. 8. The shunt for a plating apparatus according to claim 1, wherein the disk main body is an aluminum alloy disk.

Description

Shunt for coating equipment Technical Field The utility model relates to the field of coating equipment, in particular to a shunt for coating equipment. Background PECVD equipment is equipment for preparing a film by utilizing a plasma enhanced chemical vapor deposition technology, glow discharge is generated on a cathode of a process cavity by utilizing low-temperature plasma in a low-pressure environment, a sample is heated to a preset temperature through a heating body, and then a proper amount of process gas is introduced. Under the action of the electric field excited by the radio frequency source, the gases are decomposed into electrons, ions, active groups and the like, and a solid film is finally formed on the surface of the sample through a series of chemical reactions and plasma reactions. Therefore, whether the charged process gas is uniformly distributed in the coating cavity can directly influence the uniformity of the coating layer. Most PECVD gas inlet systems are not provided with a diverter assembly, and gas is generally directly introduced into the chamber after entering the gas distribution box from a gas inlet pipe, and the method is direct and convenient, but has the defect of nonuniform gas distribution. According to the characteristic of gas density distribution, the gas from the upper surface of the pipeline is difficult to diffuse to the periphery after reaching the bottom. This results in the gas being most distributed at the gas outlet, and the farther from the gas outlet, the less distributed the gas, resulting in uneven gas distribution. Non-uniform ingress of plasma gas into the chamber can reduce the quality of subsequent coatings. The diverter is arranged on a small part of PECVD air inlet system, but the existing diverter structure widely adopts a structure with a large center circle and a large radiation strip, and the structure can lead most of air to flow out of the two strip structures, and the air is not concentrated in the middle to flow out, but the problem of uneven air distribution exists. Therefore, there is an urgent need in the market for a diverter that can improve the uniformity of the gas in the chamber and perform a stable diverting function to improve the quality of the film layer of the coated product. Disclosure of utility model The utility model aims to provide a diverter for coating equipment, which is arranged below a central air inlet hole of a coating vacuum chamber so as to solve the problem of uneven air inlet distribution of the existing coating equipment. In order to achieve the above purpose, the present utility model adopts the following technical scheme: The utility model discloses a diverter for coating equipment, which is arranged below a central air inlet hole of a coating vacuum chamber. The diverter comprises a disc main body, wherein the disc main body is sequentially distributed with the following components from the center to the periphery: The first diversion area is a solid conical disk, and a plurality of first vent holes are formed in the conical disk. The second diversion area is uniformly and alternately provided with a plurality of second ventilation grooves and second baffles, and the second ventilation grooves account for 30% -35% of the area of the second diversion area. The third diversion area is uniformly and alternately provided with a plurality of third ventilation grooves and third baffles, and the third ventilation grooves account for 25% -30% of the area of the third diversion area. The fourth diversion area is uniformly and alternately provided with a plurality of fourth ventilation grooves and fourth baffles, and the fourth ventilation grooves account for 30% -35% of the area of the fourth diversion area. And the fifth diversion area is uniformly and alternately provided with a plurality of fifth ventilation grooves and fifth baffles, and the fifth ventilation grooves account for 25% -30% of the area of the fifth diversion area. The second flow distribution area to the fifth flow distribution area are all annular, the number of the ventilation grooves of the second flow distribution area to the fifth flow distribution area is sequentially increased, the lengths of the ventilation grooves are sequentially increased, the second ventilation grooves to the fifth ventilation grooves are distributed in a staggered mode along the diameter direction of the disc main body, each second baffle plate is correspondingly provided with a third baffle plate along the diameter direction, each third baffle plate is correspondingly provided with a fourth baffle plate along the diameter direction, and each fourth baffle plate is correspondingly provided with a fifth baffle plate along the diameter direction. Further, n second ventilation grooves and n second baffles are arranged on the second diversion area, 2n third ventilation grooves and 2n third baffles are arranged on the third diversion area, 4n fourth ventilation grooves and 4n f