Search

CN-224227204-U - Film forming device

CN224227204UCN 224227204 UCN224227204 UCN 224227204UCN-224227204-U

Abstract

The application discloses a film forming device, which belongs to the technical field of semiconductors and comprises a shell, a supporting component, a bearing table and an adjusting component, wherein the shell is provided with a reaction chamber and a connecting hole communicated with the reaction chamber, the supporting component is arranged around the connecting hole and positioned outside the reaction chamber, the bearing table comprises a bearing surface facing the reaction chamber, the adjusting component is respectively connected with the supporting component and the bearing table and comprises a first adjusting piece, a second adjusting piece and a main body part, the first adjusting piece is connected with the main body part and the supporting component, and the second adjusting piece is connected with the main body part and the bearing table. The bearing table and the components arranged on the bearing table can be moved in the first direction through the first adjusting piece, and the inclination between the bearing surface and the vertical surface can be adjusted through the second adjusting piece, so that the inclination angle of the bearing table can be adjusted, the positions of the components arranged on the bearing table can be further adjusted, and the use requirement of the components is met.

Inventors

  • Request for anonymity

Assignees

  • 无锡先为科技有限公司

Dates

Publication Date
20260512
Application Date
20250527

Claims (10)

  1. 1. A film forming apparatus includes: A housing (1) having a reaction chamber (10) and a connection hole (11) communicating with the reaction chamber (10); a support assembly (2) disposed around the connection hole (11) and located outside the reaction chamber (10); A bearing table (3) comprising a bearing surface (31) facing the reaction chamber (10); The adjusting assembly (4) is respectively connected with the supporting assembly (2) and the bearing table (3), the adjusting assembly (4) comprises a first adjusting piece (40), a second adjusting piece (41) and a main body portion (42), the first adjusting piece (40) is connected with the main body portion (42) and the supporting assembly (2), the second adjusting piece (41) is connected with the main body portion (42) and the bearing table (3), the first adjusting piece (40) can drive the main body portion (42) to move along a first direction (X) relative to the supporting assembly (2) so that the bearing table (3) moves along the first direction (X), the second adjusting piece (41) is at least provided with two parts along a second direction (Y) and is used for adjusting the inclination of the bearing surface (31) relative to the vertical surface (6), and the vertical surface (6) is a plane perpendicular to the first direction (X).
  2. 2. Film forming apparatus according to claim 1, wherein the adjustment assembly (4) comprises a third adjustment member (44), the main body portion (42) comprises a first holding plate (422) and a second holding plate (425), the first holding plate (422) is connected to the support assembly (2), the second holding plate (425) is connected to one side of the first holding plate (422) in the first direction (X), and the third adjustment member (44) is used for adjusting the connection position of the second holding plate (425) on the first holding plate (422).
  3. 3. Film forming apparatus according to claim 2, wherein the carrying table (3) has a central axis (32) perpendicular to the carrying surface (31), the second adjusting member (41) connecting the second holding plate (425) and the carrying table (3); The first holding plate (422) has a plurality of relief holes (421), the second holding plate (425) has a plurality of through holes (423), and the second adjusting member (41) includes: The straight rod parts (411) are connected with the bearing table (3) and are distributed at intervals around the central axis (32), and each straight rod part (411) penetrates through one abdication hole (421) and one through hole (423) and is arranged at intervals with the inner wall of the abdication hole (421) and the inner wall of the through hole (423); And a plurality of locking parts (412), wherein at least two locking parts (412) lock the straight rod part (411) to the second holding plate (425) at two sides of the through hole (423).
  4. 4. A film forming apparatus according to claim 3, wherein the second regulating member (41) further comprises a spacer portion (413), the spacer portion (413) being disposed between the second holding plate (425) and the locking portion (412), the spacer portion (413) being configured as a spherical washer.
  5. 5. A film forming apparatus according to claim 3, wherein at least two of the locking portions (412) are provided on the straight bar portion (411) on a side of the second holding plate (425) facing the stage (3); At least two locking parts (412) are arranged on the straight rod part (411) at one side of the second fixing plate (425) away from the bearing table (3).
  6. 6. The film forming apparatus according to claim 2, wherein the first holding plate (422) has a mounting groove (424) on one side in the first direction (X), and the second holding plate (425) is disposed in the mounting groove (424) and movable with respect to the first holding plate (422) in a direction perpendicular to the first direction (X).
  7. 7. The film forming apparatus according to claim 6, wherein a plurality of side holes (427) are provided at intervals in an outer periphery of the first holding plate (422), the side holes (427) being in communication with the mounting grooves (424); The third adjusting piece (44) penetrates through the side hole (427) and is connected with the first fixing plate (422), the third adjusting piece (44) is abutted against the second fixing plate (425), and the third adjusting piece (44) moves along the axial direction of the side hole (427) so that the second fixing plate (425) moves relative to the first fixing plate (422) along the direction perpendicular to the first direction (X).
  8. 8. The film forming apparatus according to claim 6, wherein the regulating assembly (4) further comprises: The limiting pieces (45) are connected to one side of the first fixing plate (422) with the mounting groove (424), and are abutted to one side of the second fixing plate (425) away from the first fixing plate (422).
  9. 9. The film forming apparatus according to claim 2, wherein the first holding plate (422) has a guide hole (430), and the support assembly (2) includes: A first fixing member (20) connected to the housing (1), the first fixing member (20) having a fixing hole (201) communicating with the connection hole (11); a guide (21) connected to a side of the first fixing member (20) facing away from the housing (1); the second fixing piece (22) is connected to one end, away from the first fixing piece (20), of the guide piece (21), and the first adjusting piece (40) is connected with the main body part (42) and the second fixing piece (22); The guide hole (430) is sleeved on the guide piece (21) and is in sliding connection with the guide piece (21).
  10. 10. The film forming apparatus according to claim 1, wherein the film forming apparatus comprises: And the sealing component (5) is respectively connected with the bearing table (3) and the supporting component (2), and the sealing component (5) and the bearing table (3) cover the connecting hole (11).

Description

Film forming device Technical Field The application belongs to the technical field of semiconductors, and particularly relates to a film forming device. Background The film forming apparatus introduces a reaction gas into a reaction chamber by using a nozzle structure, a flow guiding structure, etc., so that a metal organic compound diluted in a carrier gas and a hydride of a group V or VI element are decomposed and reacted on a heated epitaxial substrate, and an epitaxial film is formed by depositing a product after the reaction on the epitaxial substrate. Some inner cavity structures, nozzle structures, flow guiding structures and the like arranged in the reaction cavity cannot be moved after being installed, and the positions of the components cannot be adjusted conveniently according to requirements. Disclosure of utility model The embodiment of the utility model provides a film forming device, which aims to solve the technical problem that the positions of components in a reaction cavity are difficult to adjust. The film forming device provided by the embodiment of the application comprises: a housing having a reaction chamber and a connection hole communicating with the reaction chamber; a support assembly disposed around the connection hole and located outside the reaction chamber; A bearing table comprising a bearing surface facing the reaction chamber; The adjusting assembly is respectively connected with the supporting assembly and the bearing table and comprises a first adjusting piece, a second adjusting piece and a main body part, the first adjusting piece is connected with the main body part and the supporting assembly, the second adjusting piece is connected with the main body part and the bearing table, the first adjusting piece can drive the main body part to move along a first direction relative to the supporting assembly so as to enable the bearing table to move along the first direction, and the second adjusting piece is at least provided with two adjusting pieces along a second direction and is used for adjusting the inclination between the bearing surface and the vertical surface, and the vertical surface is a plane vertical to the first direction. In some embodiments, the adjusting assembly includes a third adjusting member, the main body includes a first holding plate and a second holding plate, the first holding plate is connected to the supporting assembly, the second holding plate is connected to one side of the first holding plate along the first direction, and the third adjusting member is used for adjusting a connection position of the second holding plate on the first holding plate. In some embodiments, the bearing table has a central axis perpendicular to the bearing surface, the second adjuster connects the second holding plate and the bearing table; the first retaining plate has a plurality of relief holes, the second retaining plate has a plurality of through holes, and the second adjusting member includes: The straight rod parts are connected with the bearing table, are distributed around the central axis at intervals, penetrate through one abdication hole and one through hole, and are arranged with the inner wall of the abdication hole and the inner wall of the through hole at intervals; The straight rod part is locked to the second fixing plate at two sides of the through hole by the locking parts. In some embodiments, the second adjustment member further comprises a spacer portion disposed between the second retaining plate and the locking portion, the spacer portion configured as a spherical washer. In some embodiments, at least two locking parts are arranged on the straight rod part at one side of the second holding plate facing the bearing table; At least two locking parts are arranged on the straight rod part at one side of the second fixing plate, which is away from the bearing table. In some embodiments, one side of the first holding plate along the first direction has a mounting groove, and the second holding plate is disposed within the mounting groove and movable relative to the first holding plate along a direction perpendicular to the first direction. In some embodiments, the periphery of the first holding plate is provided with a plurality of side holes which are arranged at intervals, and the side holes are communicated with the mounting groove; The third adjusting piece penetrates through the side hole and is connected with the first fixing plate, the third adjusting piece is in butt joint with the second fixing plate, and the third adjusting piece moves along the axial direction of the side hole so that the second fixing plate moves relative to the first fixing plate along the direction perpendicular to the first direction. In some embodiments, the adjustment assembly further comprises: the limiting pieces are connected to one side, provided with the mounting groove, of the first fixing plate and are abutted to one side, away from the first fixing plate,