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CN-224227205-U - Transmission protection structure of vacuum reaction cavity

CN224227205UCN 224227205 UCN224227205 UCN 224227205UCN-224227205-U

Abstract

The utility model provides a transmission protection structure of a vacuum reaction cavity, and relates to the technical field of semiconductor equipment. The heat pump type inner cavity comprises an outer cavity, an inner cavity, a heating device and a rotating mechanism, wherein the outer cavity is sleeved outside the inner cavity, a gas filling gap is formed between the outer cavity and the inner cavity, and the heating device is arranged outside the outer cavity to transfer heat into the inner cavity through heat conduction and heat radiation of the outer cavity. The utility model can obviously improve the problems of particle pollution, space occupation, uneven temperature, limited applicability and the like, and improves the running reliability and the maintenance convenience of the equipment.

Inventors

  • DAI LEI

Assignees

  • 北京韫茂科技有限公司

Dates

Publication Date
20260512
Application Date
20250613

Claims (10)

  1. 1. The transmission protection structure of the vacuum reaction cavity comprises an outer cavity and an inner cavity and is characterized by further comprising a heating device and a rotating mechanism, wherein the outer cavity is sleeved outside the inner cavity, and a gas filling gap is formed between the outer cavity and the inner cavity; The rotating mechanism comprises magnetic fluid, a rotating disc and a transmission shaft, wherein the magnetic fluid is arranged on the outer cavity in a sealing mode, the rotating disc is connected to the inner cavity in a rotating mode, the transmission shaft is connected with the magnetic fluid and the rotating disc, and the magnetic fluid is suitable for driving the rotating disc to rotate through the transmission shaft; One side of the rotating mechanism is provided with an air inlet channel communicated to the air filling gap, and the air filling gap is communicated to the assembly gap between the rotating disc and the inner cavity.
  2. 2. The transmission protection structure of a vacuum reaction chamber according to claim 1, wherein a precursor source channel is arranged at one side of the air inlet channel, the precursor source channel extends into the inner cavity, and the precursor source channel is positioned above the rotating disk so as to enable the precursor to react in the inner cavity.
  3. 3. The transmission protection structure of a vacuum reaction chamber according to claim 2, wherein a tail exhaust port is provided at the other side of the rotation mechanism with respect to the air intake passage for exhausting the filling gas from the precursor.
  4. 4. A transmission protection structure for a vacuum reaction chamber according to claim 3 wherein the tail exhaust pumping port comprises a first pumping port and a second pumping port, the first pumping port being connected to the interior of the inner chamber, the second pumping port being connected to the gas filling gap and adapted to control the pumping speed of the precursor and the filling gas by adjusting the cross-sectional areas of the first pumping port and the second pumping port.
  5. 5. The transmission protection structure of a vacuum reaction chamber according to claim 4, further comprising a first pressure detection device provided in the gas inlet passage or the gas filling gap to detect the pressure of the filling gas, and a second pressure detection device provided in the inner chamber or the source passage to detect the pressure of the precursor.
  6. 6. The transmission protection structure of a vacuum reaction chamber according to claim 1, wherein a water cooling protection device is connected to the outside of the magnetic fluid, and the filling gas is adapted to flow into the assembly gap to heat the rotating disk and the transmission shaft.
  7. 7. The transmission protection structure of a vacuum reaction cavity according to claim 1, wherein the diameter of the rotating disk body is 2-3.5 times of the aperture of the installation hole of the rotating disk in the inner cavity, so that the filling gas entering the inner cavity is kept below the rotating disk, and the interference of the filling gas on the precursor is reduced.
  8. 8. The transmission protection structure of a vacuum reaction chamber according to claim 1, wherein the flow rate of the filling gas is adjustable within a range of 1-10 torr.
  9. 9. The transmission protection structure of a vacuum reaction chamber according to claim 1, wherein the heating device comprises a plurality of heat sources attached to the outer wall of the outer chamber, and the outer chamber is heated.
  10. 10. The transmission protection structure of a vacuum reaction chamber according to claim 1, wherein the gas filling gap is less than 1mm.

Description

Transmission protection structure of vacuum reaction cavity Technical Field The utility model relates to the technical field of semiconductor equipment, in particular to a transmission protection structure of a vacuum reaction cavity. Background In the existing thermal ALD process, a sealing ring, a shaft seal and other isolation modes are generally used for protecting a rotating mechanism, a labyrinth pipeline mode is used for delaying the affected time of the rotating mechanism, or a magnetic coupling rotary driving mode is used, and the blocking of reaction gas is realized by a single mode or a combination of multiple modes. The method is limited by factors such as material performance, process conditions or use cost, in a thermal type ALD process, an isolation mode is used for protecting a transmission structure to generate particles in the rotating process to affect the process, a labyrinth pipeline mode is used for isolating occupied space and generating particles in the labyrinth pipeline in an ALD reaction mode to affect the process, and magnetic coupling rotation driving is affected by parameters of the magnetic coupling rotation driving, so that the method cannot be widely applied. Disclosure of utility model The utility model discloses a transmission protection structure of a vacuum reaction cavity, and aims to solve the problems. The utility model adopts the following scheme: The transmission protection structure of the vacuum reaction cavity comprises an outer cavity, an inner cavity, a heating device and a rotating mechanism, wherein the outer cavity is sleeved outside the inner cavity, and a gas filling gap is formed between the outer cavity and the inner cavity; The rotating mechanism comprises magnetic fluid, a rotating disc and a transmission shaft, wherein the magnetic fluid is arranged on the outer cavity in a sealing mode, the rotating disc is connected to the inner cavity in a rotating mode, the transmission shaft is connected with the magnetic fluid and the rotating disc, and the magnetic fluid is suitable for driving the rotating disc to rotate through the transmission shaft; The outer cavity is provided with an air inlet channel communicated with the air filling gap, and the air filling gap is communicated into the assembly gap between the rotating disc and the inner cavity. Further, a precursor source channel is arranged on one side of the air inlet channel, extends into the inner cavity, and is positioned above the rotating disc so that the precursor reacts in the inner cavity. Further, a tail exhaust port is arranged at the other side of the rotating mechanism relative to the air inlet channel and is used for exhausting the filling gas and the precursor. Further, the tail exhaust air extraction opening comprises a first air extraction opening and a second air extraction opening, the first air extraction opening is connected to the inner cavity, the second air extraction opening is connected to the gas filling gap, and the cross-sectional areas of the first air extraction opening and the second air extraction opening are adjusted to adjust and control the extraction speed of the precursor and the filling gas. Further, the apparatus further comprises a first pressure detection device arranged in the gas inlet channel or the gas filling gap to detect the pressure of the filling gas, and a second pressure detection device arranged in the inner cavity or the gas inlet channel to detect the pressure of the precursor. Further, a water-cooling protection device is connected to the outside of the magnetic fluid, and the filling gas is suitable for flowing into the assembly gap to heat the rotating disc and the transmission shaft. Further, the diameter of the rotating disc body is 2-3.5 times of the aperture of the rotating disc mounting hole in the inner cavity, so that the filling gas entering the inner cavity is kept below the rotating disc, and the interference of the filling gas on the precursor is reduced. Further, the flow rate of the filling gas is adjustable within the range of 1-10 torr. Further, the heating device comprises a plurality of heat sources which are clung to the outer wall of the outer cavity body, and the temperature of the outer cavity body is raised. Further, the gas-filled gap is less than 1mm. The beneficial effects are that: According to the scheme, the outer cavity is directly sleeved outside the inner cavity, the heating device is arranged outside the outer cavity, and gas filling gap filling gas is arranged between the outer cavity and the inner cavity, so that heat is quickly transferred to the inner cavity through the gas filling gap, and on the other hand, the filling gas also flows through the gaps among the transmission shaft, the rotating disc and the inner cavity, so that the temperature of the rotating disc and the inner cavity is close to that of the transmission shaft and the rotating disc, the stability and uniformity of a process are improved, an