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CN-224227206-U - Process cavity structure

CN224227206UCN 224227206 UCN224227206 UCN 224227206UCN-224227206-U

Abstract

The utility model provides a process cavity structure, and relates to the technical field of semiconductor equipment. The solar energy heating device comprises an outer cavity, a cavity sleeve and a heater, wherein the cavity sleeve is embedded into the outer cavity, and the heater is annularly arranged at the outer side of the outer cavity, so that heat is transferred into the cavity sleeve through the outer cavity in a heat radiation and heat conduction mode. Through this scheme with the required space of reserving of reduction cavity, and then reduce equipment volume.

Inventors

  • DAI LEI

Assignees

  • 北京韫茂科技有限公司

Dates

Publication Date
20260512
Application Date
20250613

Claims (7)

  1. 1. The utility model provides a technology cavity structure, includes outer cavity, chamber cover and heater, its characterized in that, the chamber cover embedding in the outer cavity, the heater ring is established the outer cavity outside to through heat radiation and heat conduction's mode with heat is passed through the outer cavity to in the chamber cover.
  2. 2. The process chamber structure of claim 1, wherein a gap is formed between the outer chamber and the chamber housing, the gap being filled with a gas to accelerate heat transfer between the chamber housing and the outer chamber.
  3. 3. The process chamber structure of claim 2, wherein the gap is less than 1mm.
  4. 4. The process chamber structure of claim 1, wherein the heater is affixed to the outside of the outer chamber.
  5. 5. The process chamber structure of claim 1, wherein the chamber housing is provided with a chamber housing door, the outer chamber is provided with an outer chamber door, and the chamber housing door and the outer chamber door are positioned by a guide shaft.
  6. 6. The process chamber structure of claim 5, wherein the guide shaft is adapted to slide between the sleeve door and the outer chamber door, and a spring member is disposed between the sleeve door and the outer chamber door and is sleeved on the guide shaft to urge the sleeve door against the sleeve by deformation of the spring member when the outer chamber door is closed.
  7. 7. The process chamber structure of claim 6, wherein the guide shaft is provided in a plurality.

Description

Process cavity structure Technical Field The utility model relates to the technical field of semiconductor equipment, in particular to a process cavity structure. Background In the existing thermal ALD process, a structure of an outer cavity and an inner cavity is generally used, a heat source is arranged around the inner cavity in the outer cavity, and the heat source heats the inner cavity in a thermal radiation mode. However, in the conventional structure, the internal cavity is heated by heat radiation, and a high heat source power and a slow temperature rise are required. The large gap between the inner cavity and the heat source is needed to meet the requirements of operations such as disassembly, replacement and maintenance on the inner cavity, and the space of the cavity needed by the equipment is large under the same capacity requirement. Disclosure of utility model The utility model discloses a process cavity structure, which aims to solve the problems. The utility model adopts the following scheme: The utility model provides a technology cavity structure, includes outer cavity, chamber cover and heater, the chamber cover embedding in the outer cavity, the heater ring is established the outer cavity outside to through heat radiation and heat conduction's mode with heat is passed through the outer cavity is transferred to in the chamber cover. Further, a gap is formed between the outer cavity and the cavity sleeve, and gas is filled in the gap to accelerate heat conduction between the cavity sleeve and the outer cavity. Further, the gap is less than 1mm. Further, the heater is closely attached to the outer side of the outer cavity. Further, a cavity sleeve door is arranged on the cavity sleeve, an outer cavity door is arranged on the outer cavity, and the cavity sleeve door and the outer cavity door are positioned through a guide shaft. Further, the guide shaft is suitable for sliding between the cavity sleeve door and the outer cavity door, and a spring piece sleeved on the guide shaft is arranged between the cavity sleeve door and the outer cavity door, so that when the outer cavity door is closed, the cavity sleeve door is tightly attached to the cavity sleeve through deformation of the spring piece. Further, the guide shaft is provided with a plurality of guide shafts. The beneficial effects are that: Through placing the heater outside the outer cavity, compare traditional structure and place between outer cavity and interior cavity, can greatly save the maintenance space that chamber cover and heater directly remained, whole equipment volume can be compacter, and heating efficiency is higher. Drawings FIG. 1 is a schematic view of a process chamber structure according to an embodiment of the present utility model; FIG. 2 is a schematic view of a partially enlarged structure of FIG. 1; the device comprises a heater, an outer cavity, a cavity sleeve door, an outer cavity door, a guide shaft and a spring. Detailed Description With reference to fig. 1, this embodiment provides a process cavity structure, which includes an outer cavity 2, a cavity sleeve 3 and a heater 1, wherein the cavity sleeve 3 is embedded in the outer cavity 2, and the heater 1 is annularly arranged outside the outer cavity 2, so as to transfer heat to the cavity sleeve 3 through the outer cavity 2 in a heat radiation and heat conduction manner. In this embodiment, the heater 1 is of a conventional heating structure, and is tightly attached to the outside of the outer cavity 2, and heat is conducted into the cavity cover 3 by heat conduction and heat radiation of the outer cavity 2. This structure sets up the space that can reduce the inside needs reservation of outer cavity 2, on the one hand conveniently maintains equipment, on the other hand has also saved the required volume space of cavity, and the heat transfer effect is not influenced basically. In an embodiment, a gap is formed between the outer cavity 2 and the cavity cover 3, and gas is filled in the gap to accelerate heat conduction between the cavity cover 3 and the outer cavity 2. The gap is smaller than 1mm, and the gas can be inert gas and the like which is favorable for heat conduction. By the arrangement, heat conduction between the cavity sleeve 3 and the outer cavity 2 can be accelerated, and the heat transfer effect is improved. In this embodiment, as shown in fig. 1 and fig. 2, the cavity cover 3 is provided with a cavity cover door 4, the outer cavity 2 is provided with an outer cavity door 5, and the cavity cover door 4 and the outer cavity door 5 are positioned by a guide shaft 6. The guide shaft 6 may be arranged in several ways on the sleeve door 4, and the guide shaft 6 is adapted to slide between the sleeve door 4 and the outer cavity door 5. The outer cavity door 5 and the cavity cover door 4 can be kept in relative positions by the action of the guide shaft 6. In a preferred embodiment, a spring 7 is arranged between the cavity door 4 and the out