CN-224227207-U - Solid precursor container

Abstract

The utility model provides a solid precursor container, and relates to the technical field of semiconductor equipment. The novel solid precursor filling device comprises a bottle body, wherein a filling hole is formed in the bottle body, a filter plate suitable for bearing solid precursor is arranged in the bottle body, a discharging hole is formed in the bottle body below the filter plate, the bottom of the bottle body is detachably arranged, the bottle bottom is sealed with the discharging hole through a first copper gasket, an air inlet channel and an air outlet channel penetrating through the lower portion of the filter plate are formed in the bottle body, a detachable blind flange is arranged on the filling hole, and the blind flange seals the filling hole through a second copper gasket. By the scheme, the process effect is improved, and the cost is reduced.

Inventors

• DAI LEI

Assignees

• 北京韫茂科技有限公司

Dates

Publication Date

20260512

Application Date

20250613

Claims (8)

1. 1. The solid precursor container comprises a bottle body, wherein a loading hole is formed in the bottle body, and the solid precursor container is characterized in that a filter plate suitable for bearing a solid precursor is arranged in the bottle body, a discharging hole is formed in the bottle body below the filter plate, a bottle bottom is detachably arranged at the bottom of the bottle body, the bottle bottom and the discharging hole are sealed through a first copper gasket, an air inlet pipeline and an air outlet pipeline penetrating through the lower part of the filter plate are arranged on the bottle body, a detachable blind flange is arranged on the loading hole, and the blind flange seals the loading hole through a second copper gasket.
2. 2. The solid precursor container according to claim 1, wherein the air inlet pipe penetrates through the filter plate, and the space between the lower end of the air inlet pipe and the bottom surface of the filter plate is 1 cm-10 cm.
3. 3. The solid precursor container of claim 1, wherein the connection of the inlet conduit to the filter plate is welded shut.
4. 4. The solid precursor container of claim 1, wherein the junction of the gas outlet conduit and the filter plate is welded shut.
5. 5. The solid precursor container of claim 1, wherein the filter plate is welded to the inner wall of the bottle.
6. 6. The solid precursor container according to claim 1, wherein the gas inlet pipe and the gas outlet pipe are welded to the bottle body, and a control valve body is welded to the gas inlet pipe and the gas outlet pipe.
7. 7. The solid precursor container of claim 6, wherein the control valve body is a hand valve or a pneumatic valve.
8. 8. The solid precursor container of claim 6, wherein the inlet and outlet pipes are welded to the ends of the bottle with VCR fittings configured with VCR plugs.

Description

Solid precursor container Technical Field The utility model relates to the technical field of semiconductor equipment, in particular to a solid precursor container. Background In the existing thermal ALD process, the precursor is generally liquid and is relatively easy to transport to the reaction chamber after being gasified at high temperature. In addition, many precursors exist in solid or solid powder form, such as copper bis (hexafluoroacetylacetonate), yttrium (III) tris (methylcyclopentadiene), aluminum trichloride, and the like, commonly referred to as solid sources, which generally require sublimation of the material into a gas for reaction. The precursor container is heated to gasify the precursor in solid powder form, vapor is formed in the precursor container, carrier gas inlet is set over the precursor container, and carrier gas flows to the bottom of the precursor container through complicated multilayer plate hole structure and then directly enters the carrier gas outlet pipeline from the bottom to enter the technological cavity. However, because the multi-layer tray structure needs to effectively seal the layers, sealing rings need to be used for sealing or high-precision machining is needed to realize metal sealing, so that the process of installing and detaching and replacing the precursor is complex, and the multi-layer tray is easy to wear in the use process, so that the flow direction of carrier gas is changed, the process is influenced, and the precursor container needs to be frequently replaced, so that the manufacturing and use cost of the precursor container is high. Disclosure of utility model The present utility model discloses a solid precursor container, which aims to solve the above-mentioned problems. The utility model adopts the following scheme: The solid precursor container comprises a bottle body, wherein a charging hole is formed in the bottle body, a filter plate suitable for bearing a solid precursor is arranged in the bottle body, a discharging hole is formed in the bottle body below the filter plate, a bottle bottom is detachably arranged at the bottom of the bottle body, the bottle bottom and the discharging hole are sealed through a first copper gasket, an air inlet channel and an air outlet channel penetrating into the lower portion of the filter plate are formed in the bottle body, a detachable blind flange is arranged on the charging hole, and the blind flange seals the charging hole through a second copper gasket. Further, the air inlet pipeline penetrates through the filter plate, and the distance between the lower end part of the air inlet pipeline and the bottom surface of the filter plate is 1 cm-10 cm. Further, the connection part of the air inlet pipeline and the filter plate is welded and sealed. Further, the joint of the air outlet pipeline and the filter plate is welded and sealed. Further, the filter plate is welded on the inner wall of the bottle body. Further, the air inlet pipeline and the air outlet pipeline are welded on the bottle body, and the control valve body is welded on the air inlet pipeline and the air outlet pipeline. Further, the control valve body is a hand valve or a pneumatic valve. Further, a VCR connector is welded at the end part of the air inlet pipeline and the air outlet pipeline, which is positioned on the bottle body, and the VCR connector is provided with a VCR plug. The beneficial effects are that: According to the scheme, the detachable blind flange and the bottle body are arranged, so that the bottle body is more convenient to clean and reuse, and the sealing performance can be improved by sealing the first copper gasket and the second copper gasket. Further, the hand valve or the pneumatic valve is welded on the air inlet pipeline and the air outlet pipeline, so that the safety and the reliability are higher compared with those of a detachable valve, and the leakage is possibly lower. The air inlet pipeline keeps a certain distance from the bottom surface of the filter plate, so that the carrier gas can be diffused more uniformly. The whole precursor container has simple structure and short carrier gas flow path, and is favorable for the precursor to respond fast to enter the air outlet pipeline. Drawings FIG. 1 is a schematic diagram of a solid precursor container according to an embodiment of the present utility model; FIG. 2 is a schematic cross-sectional view of a solid precursor container according to an embodiment of the present utility model; The device comprises an air inlet pipeline 1, an air inlet hand valve 2, an air outlet pipeline 3, an air outlet hand valve 4, a bottle body 5, a filter plate 6, a charging hole 7, a bottle bottom 8, a second copper gasket 9, a first copper gasket 10 and a blind flange 11. Detailed Description As shown in fig. 1 and 2, the embodiment provides a solid precursor container, which comprises a bottle body 5, wherein a charging hole 7 is formed in the bottle body 5, a filter plate