CN-224227210-U - Coating film chamber with shunt

CN224227210UCN 224227210 UCN224227210 UCN 224227210UCN-224227210-U

Abstract

The utility model relates to the field of coating equipment, and discloses a coating cavity with a flow divider, wherein the flow divider is fixed on a cavity cover and positioned below an air inlet hole, and the flow divider comprises a diffusion part for dividing the flow to the periphery and a uniform flow part for dividing the flow downwards. The diffusion part is in an X shape and is distributed with four diffusion leaves. The four diffusion blades are provided with a plurality of raised edges to form four diffusion channels. The center lines of the four diffusion channels respectively correspond to four positions at the corners and the center of the front side and the rear side of the cavity. The raised edge and the cavity cover have a gap of 0.8-1.5 mm. The middle of the diffusion part is provided with a diffusion area, the center of the diffusion area is provided with a conical diversion cone, and a plurality of vent holes are arranged between the diversion cone and the edge of the diffusion area. The uniform flow part is provided with four ventilation areas, the ventilation areas are provided with baffle plates and ventilation grooves at intervals, and the ventilation areas are arranged on the included angle areas of two adjacent diffusion blades. The quality of the film layer of the film plating product is improved and the efficiency of cleaning the cavity is quickened by adding the flow divider.

Inventors

ZHU XIAOJUN
SHAN HONGQING
HUANG WENZHI
WU TIANMING
Lian Xuan

Assignees

福建省金石能源股份有限公司

Dates

Publication Date: 20260512
Application Date: 20250429

Claims (10)

1. The film coating cavity with the flow divider comprises a cavity body and a cavity cover, wherein a gas distribution plate is arranged in the cavity body, the flow divider is arranged above the gas distribution plate and fixed on the cavity cover and positioned below the gas inlet hole, and the film coating cavity is characterized in that the flow divider comprises a diffusion part for dividing the periphery and a uniform flow part for dividing the periphery downwards; The edges of the four diffusion blades except the circumference extend upwards to form a plurality of convex edges to form four diffusion channels; the central lines of the four diffusion channels respectively correspond to four positions at the corners and the center of the front side and the rear side of the cavity, and a gap of 0.8-1.5mm is formed between the upper surface of the convex edge and the bottom of the cavity cover; A diffusion region is arranged in the middle of the diffusion part, a conical diversion cone is arranged at the center of the diffusion region, and a plurality of vent holes are arranged between the diversion cone and the edge of the diffusion region; The uniform flow part is provided with four ventilation areas, the ventilation areas are provided with baffle plates and ventilation grooves at intervals, and the ventilation areas are arranged on the included angle areas of two adjacent diffusion blades.
2. The coating cavity with the flow divider according to claim 1, wherein the area of the vent grooves on the vent area is 60% -70% of that of a single vent groove.
3. The coating cavity with the flow divider according to claim 1, wherein the four diffusion leaves are identical in size, four included angles are formed between every two diffusion leaves, wherein the included angle between two diffusion leaves near the middle of the cavity is largest, the included angle between two diffusion leaves near the corners of the cavity is smallest, the remaining two included angles are identical in size, and the size of the four ventilation areas is proportional to the size of the included angle area of the corresponding diffusion leaf.
4. The coating cavity with the flow divider according to claim 1, wherein the outer circle radius of the four ventilation areas is smaller than the outer circle radius of the diffusion blade.
5. The coating cavity with the flow divider according to claim 1, wherein a fixing area is arranged on the ventilation area, and a fixing hole for fixing the flow divider is arranged on the fixing area.
6. The coating cavity with the flow divider according to claim 1, wherein the height of the raised edge is 0.8mm-1.2mm.
7. The coating cavity with the flow divider according to claim 1, wherein the angle of the upper vertex angle of the flow guiding cone is 165-175 degrees.
8. The coating cavity with the flow divider according to claim 1, wherein the outer surface of the flow divider is provided with an anti-corrosion film layer.
9. The coating cavity with the flow divider according to claim 1, wherein the flow divider is an aluminum alloy flow divider.
10. The coating cavity with the flow divider according to claim 1, wherein two flow dividers are arranged and are respectively positioned at two sides of the left and right central lines of the cavity.

Description

Coating film chamber with shunt Technical Field The utility model relates to the field of coating equipment, in particular to a coating cavity with a flow divider. Background PECVD equipment is equipment for preparing a film by utilizing a plasma enhanced chemical vapor deposition technology, glow discharge is generated on a cathode of a process cavity by utilizing low-temperature plasma in a low-pressure environment, a sample is heated to a preset temperature through a heating body, and then a proper amount of process gas is introduced. Under the action of the electric field excited by the radio frequency source, the gases are decomposed into electrons, ions, active groups and the like, and a solid film is finally formed on the surface of the sample through a series of chemical reactions and plasma reactions. Therefore, whether the charged process gas is uniformly distributed in the coating cavity can directly influence the uniformity of the coating layer. Meanwhile, after the film coating cavity is used for a period of time, attachments can be generated on the inner wall of the cavity, and the film coating cavity needs to be cleaned through plasma. During the cleaning process, whether the plasma can be uniformly distributed throughout the chamber will directly affect the time and cleanliness of the chamber. Most PECVD gas inlet systems are not provided with a diverter assembly, and gas is generally directly introduced into the chamber after entering the gas distribution box from a gas inlet pipe, and the method is direct and convenient, but has the defect of nonuniform gas distribution. According to the characteristic of gas density distribution, the gas from the upper surface of the pipeline is difficult to diffuse to the periphery after reaching the bottom. This results in the gas being most distributed at the gas outlet, and the farther from the gas outlet, the less distributed the gas, resulting in uneven gas distribution. Non-uniform ingress of plasma gas into the chamber can reduce the quality of subsequent coatings. The diverter is arranged on a small part of PECVD air inlet system, but the existing diverter structure widely adopts a structure with a large center circle and a large radiation strip, and the structure can lead most of air to flow out of the two strip structures, and the air is not concentrated in the middle to flow out, but the problem of uneven air distribution exists. Meanwhile, when the cavity is cleaned, the gas is uneven, so that the plasma obtained from the area far away from the air inlet is rare, and cleaning dead angles exist, and the cleanliness of the cavity is affected. Therefore, there is an urgent need in the market for a diverter that can improve uniformity of gas in a chamber, and perform a stable diverting function, so as to improve quality of a film layer of a film-coated product and accelerate efficiency of cleaning the chamber. Disclosure of utility model The utility model aims to provide a coating cavity with a flow divider, and the flow divider is arranged below an air inlet hole of the coating cavity so as to solve the problems of uneven air inlet distribution and incomplete cavity cleaning of the existing coating equipment. In order to achieve the above purpose, the present utility model adopts the following technical scheme: The utility model discloses a film coating cavity with a flow divider, which comprises a cavity body and a cavity cover, wherein a gas distribution plate is arranged in the cavity body, the flow divider is arranged above the gas distribution plate and fixed on the cavity cover and positioned below an air inlet hole, the flow divider comprises a diffusion part for dividing the periphery and a uniform flow part for dividing the periphery downwards, the diffusion part is in an X shape and is provided with four diffusion leaves, and a plurality of raised edges extend upwards from the edges of the four diffusion leaves except the circumference to form four diffusion channels. The central lines of the four diffusion channels respectively correspond to four positions of corners and the center of the front side and the rear side of the cavity, and gaps of 0.8-1.5mm are formed between the upper surfaces of the raised edges and the bottom of the cavity cover. The diffusion part is provided with a diffusion area in the middle, a conical diversion cone is arranged at the center of the diffusion area, and a plurality of vent holes are arranged between the diversion cone and the edge of the diffusion area. The uniform flow part is provided with four ventilation areas, the ventilation areas are provided with baffle plates and ventilation grooves at intervals, and the ventilation areas are arranged on the included angle areas of two adjacent diffusion blades. Further, the ventilation slots on the ventilation zone occupy 60% -70% of the area of a single ventilation slot. Further, the four diffusion leaves are consistent in size, four included angles are f