CN-224227211-U - PECVD cavity provided with electrode plate insulation structure

Abstract

The utility model relates to the field of coating equipment, and discloses a PECVD (plasma enhanced chemical vapor deposition) cavity with an electrode plate insulation structure, which comprises a cavity and a cavity cover arranged on the cavity. The cavity cover is provided with an electrode column, an electrode plate is arranged in the cavity, and the electrode column penetrates through the cavity cover to be connected with the electrode plate. The electrode plate is externally provided with an electrode mounting plate for fixing the electrode plate. Be equipped with a plurality of quartz plates and spread between electrode plate up end and the electrode mounting panel, the department of linking adopts crisscross mutual stack structure between the quartz plates, and the both sides of electrode plate all are equipped with the quartz strip cover of "C cross-section", and the quartz strip both sides are provided with the side shield that is used for fixed. The periphery of the electrode column is wrapped with a quartz tube. According to the utility model, the quartz material is arranged on the periphery of the electrode plate, so that the electrode plate is prevented from being ignited, the product yield is improved, and the equipment reliability is improved.

Inventors

• LIU YIJUN
• GUO LIXIAN
• YU QING

Assignees

• 福建省金石能源股份有限公司

Dates

Publication Date

20260512

Application Date

20250521

Claims (2)

1. 1. The PECVD cavity with the electrode plate insulating structure comprises a cavity body and a cavity cover arranged on the cavity body, wherein an electrode column is arranged on the cavity cover, an electrode plate is arranged in the cavity body and penetrates through the cavity cover to be connected with the electrode plate, an electrode mounting plate for fixing the electrode plate is arranged outside the electrode plate, the PECVD cavity is characterized in that a plurality of quartz plates are arranged between the upper end face of the electrode plate and the electrode mounting plate and are paved, a staggered overlapping structure is adopted at the joint position of the quartz plates, quartz strips with a C-shaped section are arranged on two sides of the electrode plate and are covered, side baffles for fixing are arranged on two sides of the quartz strips, and quartz tubes are wrapped on the periphery of the electrode column.
2. 2. The PECVD cavity with the electrode plate insulating structure according to claim 1, wherein three quartz plates are arranged, namely a first quartz plate, a second quartz plate and a third quartz plate in sequence, the first quartz plate and the third quartz plate respectively press two ends of the second quartz plate, and an electrode column is clamped in the middle of the second quartz plate.

Description

PECVD cavity provided with electrode plate insulation structure Technical Field The utility model relates to the field of coating equipment, in particular to a PECVD cavity provided with an electrode plate insulation structure. Background PECVD (plasma enhanced chemical vapor deposition) equipment is industrial equipment for realizing film material deposition by plasma assistance, and the core principle is to generate a required film on the surface of a substrate by utilizing plasma enhanced chemical reaction. The gas molecules are typically excited by radio frequency or microwaves to chemically react at a relatively low temperature to deposit a solid film on the substrate surface. The plasma is excited by a power source such as Radio Frequency (RF) and requires placing an electrode plate in the chamber. In the prior art, the electrode plate is fixed through the electrode mounting plate, slits exist between the electrode mounting plate and the electrode plate, the ignition phenomenon is easy to occur, and the ignition phenomenon can also occur between the electrode plate and surrounding cavities or carrier plates. In order to solve the problem, the electrode plate is wrapped by adopting monolithic ceramic in the market to form an insulating structure, and although the effect of preventing ignition is achieved to a certain extent, the PECVD equipment mostly adopts a high-frequency circuit, is suitable for adopting insulating materials with lower dielectric constants, and the dielectric constant of the ceramic is larger than that of the ceramic, and is between 6 and 20, so that the performance in the high-frequency circuit is poor. In terms of thermal stability, the thermal expansion coefficient of the ceramic material is relatively large, and is easily affected by moisture and impurities in the air, and the stability is not high enough. The requirement of precision production cannot be met. Disclosure of utility model The utility model aims to provide a PECVD cavity with an electrode plate insulation structure, which is characterized in that quartz materials are arranged on the periphery of an electrode plate, so that the electrode plate is prevented from being ignited, the product yield is improved, and the equipment reliability is improved. In order to achieve the above purpose, the present utility model adopts the following technical scheme: The utility model discloses a PECVD (plasma enhanced chemical vapor deposition) cavity with an electrode plate insulation structure, which comprises a cavity and a cavity cover arranged on the cavity, wherein an electrode column is arranged on the cavity cover, an electrode plate is arranged in the cavity, and the electrode column penetrates through the cavity cover to be connected with the electrode plate. The electrode plate is externally provided with an electrode mounting plate for fixing the electrode plate. A plurality of quartz plates are arranged between the upper end face of the electrode plate and the electrode mounting plate to be paved, so that the ignition phenomenon of the electrode plate and the electrode mounting plate is effectively avoided. Because the cavity is long, the whole quartz plate cannot be used for covering, and therefore a plurality of quartz plates are used for covering in a laminated mode, the installation convenience is improved, and the material cost is reduced. The joint between the quartz plates adopts a staggered and overlapped structure, so that the phenomenon that the electrode plates generate fire through slits among a plurality of quartz plates is effectively avoided. Both sides of the electrode plate are covered by quartz strips with C-shaped cross sections, and the arrangement of the quartz strips can prevent the electrode plate and surrounding cavities or carrier plates from being ignited. The side of the electrode plate can be better wrapped by the design of the C-shaped section. The quartz strip both sides are provided with the side shield for fixed quartz strip prevents that the quartz strip from droing. And the periphery of the electrode column is wrapped with a quartz tube, so that the electrode column and the cavity cover or the electrode mounting plate form an insulating layer, and the sparking phenomenon is avoided. Further, the quartz plates are provided with three quartz plates, namely a first quartz plate, a second quartz plate and a third quartz plate in sequence. The first quartz plate and the third quartz plate respectively press two ends of the second quartz plate; the electrode column is clamped on the middle of the second quartz plate. The staggered lamination mode that the two ends press the middle section is adopted, so that the structure is firmer, and the connection with the electrode column is tighter. The utility model has the advantages that: 1. In terms of dielectric properties, the dielectric constant of quartz is generally between 4 and 6, while that of ceramics is relatively large, between 6 and 2