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CN-224227260-U - Electroplating device sprays defoaming device and electroplating device

CN224227260UCN 224227260 UCN224227260 UCN 224227260UCN-224227260-U

Abstract

The utility model relates to the technical field of electroplating equipment and discloses a spraying defoaming device of the electroplating equipment and the electroplating equipment, wherein the spraying defoaming device of the electroplating equipment mainly comprises a spraying soaking box and a liquid storage box, wherein the spraying soaking box comprises a coaming and a first bottom plate, the coaming and the first bottom plate enclose a reflux slot, the reflux slot is internally provided with a spraying soaking slot for placing a substrate, the spraying soaking slot is provided with a pair of first side plates, a pair of second side plates and a second bottom plate, the outer sides of the pair of first side plates are respectively provided with an inclined guide plate, the pair of second side plates are respectively provided with a defoaming slot, the bottoms of the defoaming slots are provided with a plurality of guide pipes at intervals, defoaming pieces are arranged in the guide pipes, the liquid storage box is communicated with the bottoms of the reflux slots, and the first bottom plate is inclined downwards towards the liquid storage box. According to the utility model, the air bubbles and foams generated by liquid medicine backflow are eliminated by utilizing the guide plate on the first side plate and the defoaming groove on the second side plate, so that the liquid medicine can be reused for a plurality of times, the service life of the liquid medicine is prolonged, and the processing quality of the substrate is ensured.

Inventors

  • ZHOU JIAN
  • JIN WENHUAN

Assignees

  • 昆山东威科技股份有限公司

Dates

Publication Date
20260512
Application Date
20250604

Claims (10)

  1. 1. Electroplating apparatus sprays defoaming device, characterized by, include: The spraying soaking box (1) comprises a coaming (101) and a first bottom plate (102), wherein the coaming (101) and the first bottom plate (102) enclose a reflux groove (103), a spraying soaking groove (2) for placing a substrate is arranged in the reflux groove (103), the spraying soaking groove (2) is provided with a pair of first side plates (201) which are oppositely arranged along a first direction, a pair of second side plates (202) and a second bottom plate (203) which are oppositely arranged along a second direction perpendicular to the first direction, inclined guide plates (204) are respectively arranged on the outer sides of the pair of first side plates (201), gaps are reserved between the bottoms of the guide plates (204) and the first bottom plate (102), defoaming grooves (205) are respectively arranged on the pair of second side plates (202), a plurality of guide pipes (206) are arranged at intervals along the first direction, defoaming pieces (207) are arranged in the guide pipes (206), and gaps are reserved between the bottoms of the guide pipes (206) and the first bottom plate (102) and the second bottom plate (203); the liquid storage tank (3) is communicated with the bottom of the reflux groove (103) and is positioned at the lower side of the spraying soaking tank (1), and the first bottom plate (102) is inclined downwards towards the liquid storage tank (3) along a first direction.
  2. 2. The electroplating apparatus spray defoaming device of claim 1, wherein the defoaming member (207) is a screw; And/or, the length of each flow guiding pipe (206) is gradually increased along the first direction, and the flow guiding pipes are arranged corresponding to the first bottom plate (102).
  3. 3. The spraying defoaming device of the electroplating equipment according to claim 1, wherein a plurality of overflow ports (2011) are formed at intervals at the top of the first side plate (201); and/or the first side plate (201) is connected with the guide plate (204) through a connecting plate (208), and the guide plate (204) is positioned at a gap between the reflux groove (103) and the spraying soaking groove (2).
  4. 4. A plating equipment spray defoaming device according to claim 3, characterized in that the bottom height of the overflow port (2011) is not lower than the top of the second side plate (202); And/or, a plurality of through holes (2051) are formed in the groove wall of the defoaming groove (205) at intervals along the first direction, and the defoaming groove (205) is communicated with the spraying soaking groove (2) through a plurality of through holes (2051).
  5. 5. The electroplating equipment spray defoaming device according to claim 1, further comprising a spray mechanism arranged at the top of the spray soaking tank (2) and communicated with the liquid storage tank (3) through a driving pump, and adapted to spray the liquid medicine towards the substrate.
  6. 6. Electroplating apparatus spray defoaming device according to any one of claims 1 to 5, characterized in that the liquid tank (3) has a top plate (301) and a third side plate (302) arranged along a first direction, the lower side of the first bottom plate (102) is connected with the top of the third side plate (302), a liquid outlet (104) is provided between the lower side of the first bottom plate (102) and the adjacent first side plate (201), the liquid outlet (104) is in communication with the liquid tank (3), and the top plate (301) is connected with the outside of the first side plate (201) forming the liquid outlet (104).
  7. 7. The spraying defoaming device of the electroplating equipment according to claim 6, wherein the inner side of the third side plate (302) is further connected with at least one filter plate (303), and a plurality of foam eliminating holes (304) are formed in the filter plate (303) at intervals.
  8. 8. The electroplating apparatus spray defoaming apparatus of claim 7, wherein a baffle (305) is further connected between the filter plate (303) and the top plate (301).
  9. 9. The electroplating equipment spray defoaming device according to any one of claims 1 to 5, wherein the opposite sides of the shroud (101) along the second direction are respectively provided with a feed inlet (105) and a discharge outlet (106), and a transmission mechanism is further arranged between the pair of first side plates (201).
  10. 10. An electroplating apparatus comprising the spray defoaming device of any one of claims 1 to 9.

Description

Electroplating device sprays defoaming device and electroplating device Technical Field The utility model relates to the technical field of electroplating equipment, in particular to a spraying defoaming device of electroplating equipment and the electroplating equipment. Background At present, the electroplating equipment generally drives the substrate to enter a spraying soaking tank through a transmission mechanism to carry out spraying soaking operation. Specifically, the spraying mechanism extracts liquid medicine from the liquid storage tank through the water pump and sprays the liquid medicine to the substrate, the liquid medicine fills the spraying soaking tank, and the substrate is soaked in the spraying soaking tank. In order to reduce the use cost, the liquid medicine in the spraying soaking tank needs to be recycled into the liquid storage tank for reuse. The liquid storage tank is arranged at the lower side of the spraying soaking tank, and the liquid medicine self weight is utilized to realize reflux. Because there is the high fall between spray soaking tank and the liquid reserve tank, the liquid medicine flows back to the in-process of liquid reserve tank, and the liquid medicine surface produces the impact easily to the entrainment air schizolysis liquid medicine, thereby produces a large amount of bubbles and foam, leads to the effective component in the liquid medicine to descend and spray to the base plate after doping bubble and foam, makes the life of liquid medicine reduce, causes the hole broken even, influences the processingquality of base plate. Disclosure of utility model In view of the above, the utility model provides a spraying defoaming device of electroplating equipment and electroplating equipment, which are used for solving the problems that bubbles and foams are easy to generate in the process of liquid medicine backflow, so that the service life of the liquid medicine is lower, and even the processing quality of a substrate is affected. In a first aspect, the present utility model provides a spray defoaming device for electroplating equipment, comprising: The spraying soaking box comprises a coaming and a first bottom plate, wherein the coaming and the first bottom plate enclose a reflux groove, a spraying soaking groove for placing a substrate is arranged in the reflux groove, the spraying soaking groove is provided with a pair of first side plates which are oppositely arranged along a first direction, a pair of second side plates which are oppositely arranged along a second direction perpendicular to the first direction and a second bottom plate, the outer sides of the pair of first side plates are respectively provided with an inclined guide plate, gaps are reserved between the bottoms of the guide plates and the first bottom plate, a pair of second side plates are respectively provided with a defoaming groove, a plurality of guide pipes are arranged at intervals along the first direction at the bottoms of the defoaming grooves, defoaming pieces are arranged in the guide pipes, gaps are reserved between the bottoms of the guide pipes and the first bottom plate, and gaps are reserved between the second bottom plate and the first bottom plate; The liquid storage tank is communicated with the bottom of the reflux groove and is positioned at the lower side of the spraying soaking tank, and the first bottom plate is inclined downwards towards the liquid storage tank along the first direction. The spraying defoaming device for the electroplating equipment has the beneficial effects that the substrate is continuously sprayed and soaked in the spraying soaking tank, and the liquid medicine overflows from the top of the first side plate and passes through the guide plate to be buffered and then enters the liquid storage tank along the first bottom plate, so that impact bubbles can be effectively reduced. In addition, the liquid medicine overflows from the top of the second side plate and enters the defoaming groove for storage, flows to the first bottom plate through the flow guide pipe and enters the liquid storage tank, foam collected in the defoaming groove is eliminated through the defoaming piece in the flow guide pipe, and meanwhile the flow speed of the liquid medicine is slowed down, so that bubbles and foam in the liquid medicine flowing back to the liquid storage tank are obviously reduced, repeated use of the liquid medicine is facilitated, the service life of the liquid medicine is prolonged, and the processing quality of a substrate is guaranteed. In an alternative embodiment, the defoaming member is a screw. The liquid medicine jet device has the beneficial effects that defoaming is realized by adopting the screw rod, liquid medicine flows along the screw rod after entering the guide pipe, and the shearing force generated by rotation can directly destroy the liquid film of bubbles so as to accelerate bubble splitting, and the liquid medicine jet device has a simp