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CN-224227289-U - Heat preservation device of single crystal furnace

CN224227289UCN 224227289 UCN224227289 UCN 224227289UCN-224227289-U

Abstract

The utility model relates to the technical field of single crystal furnace heat preservation, in particular to a heat preservation device of a single crystal furnace, which comprises a heat preservation chamber and an air chamber, wherein the two air chambers are fixedly connected to the outer surface of the heat preservation chamber, two heat preservation parts are arranged in the heat preservation chamber, each heat preservation part comprises a pressure chamber, a push plate, a push rod, a closed ring and an air inlet plug, the air chamber is communicated with the heat preservation chamber through the pressure chamber, and the push plate is slidably connected in the pressure chamber.

Inventors

  • SHAO HONGCHEN

Assignees

  • 安徽联效科技有限公司

Dates

Publication Date
20260512
Application Date
20250612

Claims (6)

  1. 1. The heat preservation device of the single crystal furnace comprises a heat preservation chamber (1) and air chambers (4), and is characterized in that the two air chambers (4) are fixedly connected to the outer surface of the heat preservation chamber (1); Two heat preservation parts are installed in heat preservation room (1), heat preservation part includes pressure chamber (8), push pedal (9), push rod (10), closed loop (13), admit air stopper (14), air chamber (4) with heat preservation room (1) are passed through pressure chamber (8) are linked together, push pedal (9) sliding connection is in pressure chamber (8), push pedal (9) with fixedly connected with pressure spring (11) between pressure chamber (8) inner wall, push rod (10) pass pressure chamber (8), and with pressure chamber (8) sliding connection, push rod (10) with push pedal (9) fixed connection, pressure chamber (8) with fixedly connected with communicating pipe (12) between air chamber (4), closed loop (13) fixed connection is in communicating pipe (12), admit air stopper (14) sliding connection are in closed loop (13), a plurality of air inlets have been seted up to look stopper (14) in the annular array.
  2. 2. The heat preservation device of a single crystal furnace according to claim 1, wherein the heat preservation component further comprises a connecting rod (15), one end of the connecting rod (15) is fixedly connected with the push rod (10), and the other end of the connecting rod (15) is fixedly connected with the air inlet plug (14).
  3. 3. The heat preservation device of the single crystal furnace according to claim 1, wherein the heat preservation chamber (1) is fixedly connected with a single crystal furnace body (5), a graphite cylinder sleeve (6) is sleeved on the outer surface of the single crystal furnace body (5), and a carbon felt (7) is sleeved on the outer surface of the graphite cylinder sleeve (6).
  4. 4. The heat preservation device of the single crystal furnace according to claim 3, wherein an annular guide rail (16) is fixedly connected to the inner wall of the heat preservation chamber (1), a limit groove is formed in the annular guide rail (16), and a gas baffle plate (18) is fixedly connected between the heat preservation chamber (1) and the carbon felt (7).
  5. 5. The heat preservation device of the single crystal furnace according to claim 4, wherein a cleaning plate (17) is slidably connected to the bottom wall of the heat preservation chamber (1), one end of the cleaning plate (17) is slidably connected to the limiting groove, an exhaust port is formed in the bottom wall of the heat preservation chamber (1), and a control valve (19) is fixedly connected to the exhaust port.
  6. 6. The heat preservation device of the single crystal furnace according to claim 1, wherein two supports (2) are fixedly connected to the outer surface of the heat preservation chamber (1), the supports (2) are square, and a collection box (3) is fixedly connected between the two supports (2).

Description

Heat preservation device of single crystal furnace Technical Field The utility model relates to the technical field of single crystal furnace heat preservation, in particular to a heat preservation device of a single crystal furnace. Background The single crystal furnace is an important device for producing single crystal silicon, the technical level of the single crystal furnace is directly related to the quality and the yield of the single crystal silicon, and in recent years, along with the rapid development of semiconductor industry in China, the demand for the single crystal silicon is growing increasingly, so that the breakthrough and the development of the single crystal furnace technology are promoted, and the requirement of the semiconductor industry on high-quality single crystal silicon is met. The existing single crystal furnace operates in a high temperature environment, a large amount of energy is required to be consumed to maintain the high temperature in the furnace, if the heat preservation effect is poor, a large amount of heat is dissipated, and in order to maintain the temperature in the furnace, the energy is required to be continuously supplemented, so that the energy consumption is greatly increased. Disclosure of utility model The utility model aims to solve the defects in the prior art that the existing single crystal furnace operates in a high-temperature environment, a large amount of energy is consumed to maintain the high temperature in the furnace, if the heat preservation effect is poor, a large amount of heat is dissipated, and in order to maintain the temperature in the furnace, the energy is required to be continuously supplemented, so that the energy consumption is greatly increased, and the heat preservation device of the single crystal furnace is provided. In order to achieve the above purpose, the present utility model adopts the following technical scheme: the heat preservation device of the single crystal furnace comprises a heat preservation chamber and air chambers, wherein the two air chambers are fixedly connected to the outer surface of the heat preservation chamber. The heat preservation chamber is internally provided with two heat preservation components, each heat preservation component comprises a pressure chamber, a push plate, a push rod, a closed ring and an air inlet plug, the air chamber is communicated with the heat preservation chamber through the pressure chamber, the push plate is slidably connected in the pressure chamber, the push plate is fixedly connected with a pressure spring between the inner walls of the pressure chamber, the push rod penetrates through the pressure chamber and is slidably connected with the pressure chamber, the push rod is fixedly connected with the push plate, the pressure chamber is fixedly communicated with a communicating pipe between the air chamber, the closed ring is fixedly connected in the communicating pipe, the air inlet plug is slidably connected in the closed ring, and a plurality of air inlets are formed in the outer surface of the air inlet plug in an annular array. Preferably, the heat preservation part further comprises a connecting rod, one end of the connecting rod is fixedly connected with the push rod, and the other end of the connecting rod is fixedly connected with the air inlet plug. Preferably, the single crystal furnace body is fixedly connected in the heat preservation chamber, a graphite cylinder sleeve is sleeved on the outer surface of the single crystal furnace body, and a carbon felt is sleeved on the outer surface of the graphite cylinder sleeve. Preferably, the annular guide rail is fixedly connected to the inner wall of the heat preservation chamber, the annular guide rail is provided with a limiting groove, the limiting groove is in annular arrangement, and a gas baffle plate is fixedly connected between the heat preservation chamber and the carbon felt. Preferably, the cleaning plate is slidably connected to the bottom wall of the heat preservation chamber, one end of the cleaning plate is slidably connected to the limiting groove, the bottom wall of the heat preservation chamber is provided with an exhaust port, and a control valve is fixedly connected to the inside of the exhaust port. Preferably, the outer surface of the heat preservation chamber is fixedly connected with two supports, the supports are square, and a collection box is fixedly connected between the two supports. Compared with the prior art, the utility model has the beneficial effects that: 1. The argon in the heat preservation chamber is always at a higher temperature and pressure through the cooperation of the parts such as the push plate, the air chamber and the communicating pipe, so that the heat radiation effect of the single crystal furnace body can be effectively blocked by the argon in the heat preservation chamber, the heat conductivity is reduced, the heat of the single crystal furnace body is prevented from