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CN-224227291-U - Thermal field structure for reducing power consumption of single crystal furnace

CN224227291UCN 224227291 UCN224227291 UCN 224227291UCN-224227291-U

Abstract

The application relates to the technical field of thermal fields of single crystal furnaces, in particular to a thermal field structure for reducing power consumption of a single crystal furnace, which comprises a furnace bottom plate, wherein a through hole is formed in the furnace bottom plate, a first electrode unit is arranged above the furnace bottom plate, the first electrode unit is arranged below the furnace bottom plate, the second electrode unit comprises a second main body, the second main body penetrates through the through hole from bottom to top, or part of the second main body penetrates through the through hole, the second electrode unit is connected with the first electrode unit, a second contact surface of the second electrode unit is in contact with a first contact surface of the first electrode unit, and the second contact surface is arranged below the top surface of the bottom plate of the furnace bottom plate, or the second contact surface protrudes out of the top surface of the bottom plate by a height value of <8mm. The technical problem of how to reduce the heat dissipation from the electrode is solved, and the technical effect of reducing the heat dissipation from the electrode is achieved.

Inventors

  • NI JUNFU
  • JIN TIANBAO
  • Liu Saikun
  • JIN JIAYU
  • HU HAIBO

Assignees

  • 浙江晶盛机电股份有限公司

Dates

Publication Date
20260512
Application Date
20250522

Claims (10)

  1. 1. A thermal field structure for reducing power consumption of a single crystal furnace, comprising: a furnace bottom plate (100), wherein a through hole (11) is arranged on the furnace bottom plate (100); A first electrode unit (200), wherein the first electrode unit (200) is positioned above the furnace bottom plate (100), and the first electrode unit (200) corresponds to the through hole (11); -a second electrode unit (300), said first electrode unit (200) being located below said furnace floor (100), said second electrode unit (300) comprising: a second body (31), wherein the second body (31) passes through the through hole (11) from bottom to top, or a part of the second body (31) passes through the through hole (11); a third sheath (32), the third sheath (32) being arranged between the second body (31) and the through hole (11) of the furnace bottom plate (100); The second electrode unit (300) is connected with the first electrode unit (200), a second contact surface (312) of the second electrode unit (300) is in contact with a first contact surface (212) of the first electrode unit (200), and the second contact surface (312) is located below a bottom plate top surface (12) of the bottom plate (100), or the second contact surface (312) is flush with the bottom plate top surface (12), or the second contact surface (312) protrudes from the bottom plate top surface (12) by a height value of <8mm.
  2. 2. The thermal field structure of claim 1, the thermal field structure is characterized by further comprising: And a heat insulating layer (400), wherein the heat insulating layer (400) is arranged on the first electrode unit (200) and/or the second electrode unit (300) in a covering manner around the through hole (11).
  3. 3. Thermal field structure according to claim 2, characterized in that the insulating layers (400) are provided with a plurality of layers, and carbon-carbon guard plates (43) are provided between the plurality of layers of the insulating layers (400).
  4. 4. The thermal field structure according to claim 1, wherein a first joint part (211) is arranged on the first contact surface (212), a second joint part (311) is arranged on the second contact surface (312), and the first joint part (211) and the second joint part (311) are in concave-convex butt joint, and the butt joint is in a detachable connection mode.
  5. 5. The thermal field structure according to claim 4, wherein a joint top surface (3111) of the second joint portion (311) protrudes from the bottom plate top surface (12), and a height value of the joint top surface (3111) protruding from the bottom plate top surface (12) is equal to or less than 100mm.
  6. 6. The thermal field structure according to claim 1, wherein the first electrode unit (200) comprises: A first body (21); the first sheath (22) is sleeved outside the first main body (21).
  7. 7. The thermal field structure according to claim 6, wherein the second electrode unit (300) further comprises: A fourth spacer (33), the fourth spacer (33) is located above the furnace bottom plate (100), the fourth spacer (33) is located between the first sheath (22) and the third sheath (32), and two sides of the fourth spacer (33) respectively contact the first sheath (22) and the third sheath (32).
  8. 8. The thermal field structure according to claim 7, characterized in that the fourth spacer (33) corresponds to a contact of the first body (21) and the second body (31), the fourth spacer (33) extends away from the through hole (11), and the fourth spacer (33) is in contact with the bottom plate (100).
  9. 9. The thermal field structure according to claim 7, wherein the material of the first sheath (22) is quartz, and the material of the third sheath (32) and the fourth spacer (33) is ceramic.
  10. 10. The thermal field structure according to claim 6, wherein the second body (31) and the first body (21) are butted in an up-down straight line along a central axis, and the diameter of the second body (31) is smaller than or equal to the diameter of the first body (21), and when the diameter of the second body (31) is smaller than the diameter of the first body (21), the third sheath (32) partially fills the vacant area of the second body (31) relative to the first body (21), or a sheath is added to fill the vacant area of the second body (31) relative to the first body (21).

Description

Thermal field structure for reducing power consumption of single crystal furnace Technical Field The application relates to the technical field of thermal fields of single crystal furnaces, in particular to a thermal field structure for reducing power consumption of a single crystal furnace. Background At present, the single crystal furnace is used for producing crystals, the temperature in the furnace is mainly provided by a main heater surrounding the crucible and an auxiliary heater positioned at the bottom of the crucible, and the main heater is used for heating in the constant diameter stage to realize the control of a temperature field. The loss of the thermal field is due to a number of reasons, one of which is the dissipation of heat from the electrodes of the hearth. For the above reasons, the thermal field structure is designed by covering the heat insulation layer at the electrode to reduce heat loss. However, this simple insulating layer design has limited help to reduce heat loss from the electrode. The technical problem of the prior art is therefore how to reduce the heat dissipation from the electrodes. Disclosure of Invention The application provides a thermal field structure for reducing power consumption of a single crystal furnace, which solves the technical problem of how to reduce heat dissipation from an electrode, and achieves the technical effect of reducing heat dissipation from the electrode. The application provides a thermal field structure for reducing power consumption of a single crystal furnace, which adopts the following technical scheme: A thermal field structure for reducing power consumption of a single crystal furnace comprises a furnace bottom plate, a first electrode unit, a second electrode unit and a third sheath, wherein a through hole is formed in the furnace bottom plate, the first electrode unit is located above the furnace bottom plate and corresponds to the through hole, the second electrode unit is located below the furnace bottom plate, the second body penetrates through the through hole from bottom to top, or part of the second body penetrates through the through hole, the third sheath is arranged between the second body and the through hole of the furnace bottom plate, the second electrode unit is connected with the first electrode unit, a second contact surface of the second electrode unit is in contact with a first contact surface of the first electrode unit, and the second contact surface is located below the top surface of the bottom plate of the furnace bottom plate, or the second contact surface is flush with the top surface of the bottom plate, or the second contact surface protrudes out of the top surface of the bottom plate by a height of less than 8mm. Preferably, the thermal field structure further comprises a heat insulation layer, wherein the heat insulation layer is arranged on the first electrode unit and/or the second electrode unit in a covering manner around the through hole. Preferably, the heat preservation layer is provided with a plurality of layers, and carbon-carbon protection plates are arranged among the plurality of layers of heat preservation layers. Preferably, a first joint part is arranged on the first contact surface, and a second joint part is arranged on the second contact surface, wherein the first joint part and the second joint part are in concave-convex butt joint, and the butt joint is in detachable connection. Preferably, the top surface of the second connector protrudes from the top surface of the bottom plate, and the height value of the top surface of the second connector protruding from the top surface of the bottom plate is less than or equal to 100mm. Preferably, the first electrode unit comprises a first main body and a first sheath, wherein the first sheath is sleeved outside the first main body. Preferably, the second electrode unit further comprises a fourth spacer, the fourth spacer is located above the furnace bottom plate, the fourth spacer is located between the first sheath and the third sheath, and two sides of the fourth spacer are respectively contacted with the first sheath and the third sheath. Preferably, the fourth spacer corresponds to a contact position between the first body and the second body, extends in a direction away from the through hole, and is in contact with the furnace bottom plate. Preferably, the first sheath is made of quartz, and the third sheath and the fourth spacer are made of ceramic. Preferably, the second body and the first body are in vertical straight line butt joint along the central axis, the diameter of the second body is smaller than or equal to that of the first body, and when the diameter of the second body is smaller than that of the first body, the third sheath partially fills the vacant area of the second body relative to the first body, or a sheath is additionally arranged to fill the vacant area of the second body relative to the first body. Unlike the prior a