CN-224228876-U - Vacuum cooling circulating water pump for semiconductor equipment

CN224228876UCN 224228876 UCN224228876 UCN 224228876UCN-224228876-U

Abstract

The utility model discloses a vacuum cooling circulating water pump for semiconductor equipment, which comprises a circulating water pump body and a preposed pipe, wherein the circulating water pump body is provided with a water inlet and a water outlet, the water inlet is fixedly connected with the preposed pipe, a first valve and a second valve are arranged on the preposed pipe, a preposed filter screen is fixed in the preposed pipe through screws, a back flushing pipe communicated with the preposed pipe is arranged on the side surface of the preposed pipe, a third valve is arranged on the back flushing pipe, an ultrasonic vibrator inserted into the back flushing pipe is arranged on the back flushing pipe, the preposed filter screen is positioned between the first valve and the second valve, and a sewage draining pipe is arranged on the preposed pipe at the left side of the preposed filter screen. The utility model has the advantages of convenient filtration of impurities in water, reduced abrasion of impurities to the inside of the pump body, convenient cleaning of the filter screen and labor saving.

Inventors

ZHAO YIFAN

Assignees

江苏应材微机电科技有限公司

Dates

Publication Date: 20260512
Application Date: 20250522

Claims (4)

1. The utility model provides a vacuum cooling circulating water pump for semiconductor equipment, its characterized in that, including circulating water pump body (1) and foreline (2), be provided with water inlet (101) and delivery port (102) on circulating water pump body (1), water inlet (101) and foreline (2) fixed connection, install first valve (3) and second valve (4) on foreline (2), the inside of foreline (2) is through screw fixation leading filter screen (9), back flush pipe (5) that are linked together with it are installed to the side of foreline (2), install third valve (6) on back flush pipe (5), install ultrasonic vibrator (7) of inserting its inside on back flush pipe (5), leading filter screen (9) are located between first valve (3) and second valve (4), install blow off pipe (8) on foreline (2) in the left side of leading filter screen (9).
2. Vacuum cooling circulation water pump for semiconductor equipment according to claim 1, characterized in that the pre-filter screen (9) is made of stainless steel.
3. Vacuum cooling circulating water pump for semiconductor equipment according to claim 1, characterized in that the connection of the left end of the back flushing pipe (5) and the forepipe (2) is located at the left side of the first valve (3), and the connection of the right end of the back flushing pipe (5) and the forepipe (2) is located at the right side of the pre-filter screen (9).
4. The vacuum cooling circulating water pump for semiconductor equipment according to claim 1, characterized in that the bottom of the drain pipe (8) is detachably connected with a plug (801) through threads.

Description

Vacuum cooling circulating water pump for semiconductor equipment Technical Field The utility model relates to the technical field of circulating water pumps, in particular to a vacuum cooling circulating water pump for semiconductor equipment. Background When the semiconductor production equipment is used, a large amount of heat is generated, and a circulating water pump is required to be used for conveying a large amount of tap water to cool the semiconductor production equipment. Because some granule impurity can be mixed in the running water, can rub with the impeller when these impurity enter into the pump body, cause impeller surface wearing and tearing, influence life, so circulating water pump generally needs the leading filter screen of installation to filter the particulate matter in the aquatic, but after a period of use, the impurity can block up the mesh of filter screen, need manual disassembly clearance behind the jam, more troublesome, therefore, to above current situation, urgent need develop one kind to impurity filtration in the aquatic is convenient, reduce impurity to the wearing and tearing of pump body inside, and to the filter screen clearance is convenient, use for semiconductor equipment's vacuum cooling circulating water pump of using manpower sparingly, in order to overcome the not enough in the current practical application, satisfy current demand. Disclosure of utility model The utility model aims to provide a vacuum cooling circulating water pump for semiconductor equipment, so as to solve the problems in the background technology. In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a vacuum cooling circulating water pump for semiconductor device, includes circulating water pump body and forepipe, be provided with water inlet and delivery port on the circulating water pump body, water inlet and forepipe fixed connection, install first valve and second valve on the forepipe, the inside of forepipe has the forefilter screen through the fix with screw, the back flush pipe that is linked together with it is installed to the side-mounting of forepipe, install the third valve on the back flush pipe, install the ultrasonic vibrator who inserts its inside on the back flush pipe, the forefilter screen is located between first valve and the second valve, install the blow off pipe on the forepipe in the left side of forefilter screen. Preferably, the front filter screen is made of stainless steel. Preferably, the joint of the left end of the back flushing pipe and the front pipe is positioned at the left side of the first valve, and the joint of the right end of the back flushing pipe and the front pipe is positioned at the right side of the front filter screen. Preferably, the bottom of the blow-down pipe is detachably connected with a plug through threads. The vacuum cooling circulating water pump for the semiconductor equipment has the beneficial effects that when the vacuum cooling circulating water pump for the semiconductor equipment is used, tap water is pumped through the circulating water pump body and conveyed into the cooling water tank of the semiconductor equipment to take away heat, tap water enters from the front-end pipe, at the moment, the first valve and the second valve are opened, the third valve is closed, impurities in water are filtered out through the front-end filter screen, impurities in the water are reduced and enter the circulating water pump body, after the vacuum cooling circulating water pump is used for a period of time, the first valve and the second valve are closed, the third valve is opened, the ultrasonic vibrator is started, the plug is detached, water flows from the back-flushing pipe to the rear side of the front-end filter screen, the water flows reversely pass through the front-end filter screen and are discharged from the drain pipe, the front-end filter screen is backwashed through the water flow, meanwhile, the ultrasonic vibrator vibrates the water flow, and impurities blocked in meshes of the front-end filter screen are cleaned under the dual functions of vibration and backwashed. In conclusion, the utility model has the advantages of convenient filtration of impurities in water, reduced abrasion of impurities to the inside of the pump body, convenient cleaning of the filter screen and labor saving. Drawings Fig. 1 is a schematic perspective view of the present utility model. Fig. 2 is a schematic diagram of a portion of the structure of the present utility model. Fig. 3 is a schematic diagram of a portion of the structure of the present utility model. Fig. 4 is an internal view of a foreline in accordance with the present utility model. Legend description: 1. The water circulation pump comprises a circulating water pump body, 101, a water inlet, 102, a water outlet, 2, a front-mounted pipe, 3, a first valve, 4, a second valve, 5, a back flushing pipe, 6, a third