CN-224229163-U - High-rigidity vibration isolation module of combined granite plate supporting steel frame precision instrument and equipment

Abstract

The utility model discloses a high-rigidity vibration isolation module of a combined granite slab supported steel frame precision instrument and equipment, which comprises a top plate, an upper supporting frame and a lower supporting frame, wherein the top plate consists of a granite bedplate, the upper supporting frame consists of a steel column, a steel beam, a diagonal bracing, an upper connecting member, a lower connecting member and an auxiliary supporting member, and the lower supporting frame consists of a steel column, a steel beam, a diagonal bracing and a column base. The high-rigidity vibration isolation module of the combined granite plate support steel frame precise instrument is formed by the on-site installation of 3 independent modules of the factory prefabricated top plate, the upper support frame and the lower support frame. The utility model adopts a combined assembly mode, reduces the weight of a single module, and meets the characteristics of convenient installation, high strength and high rigidity.

Inventors

• LI XIWEI
• ZHU KAI
• ZHANG JIAN
• XU YAN
• ZHANG JINTAO

Assignees

• 信息产业电子第十一设计研究院科技工程股份有限公司

Dates

Publication Date

20260512

Application Date

20250716

Claims (7)

1. 1. A combined granite plate supporting steel frame precision instrument high-rigidity vibration isolation module is characterized by comprising a top plate (1), an upper supporting frame (2) and a lower supporting frame (3), wherein the top plate (1) is composed of a granite bedplate, the upper supporting frame (2) comprises a steel column (4), a steel beam (5), inclined struts (6), an upper connecting member (7), a lower connecting member (8) and an auxiliary supporting member (10), the lower supporting frame (3) comprises the steel column (4), the steel beam (5), the inclined struts (6) and column feet (9), the top plate (1), the upper supporting frame (2) and the lower supporting frame (3) are 3 independent modules, the upper connecting member (7) is used for connecting the granite bedplate with the upper supporting frame (2), the lower connecting member (8) is used for connecting the upper supporting frame (2) and the lower supporting frame (3), high-damping grouting materials are filled into the steel column (4) and the steel beam (5), and the column feet (9) are connected with the ground through chemical anchors.
2. 2. The high-rigidity vibration isolation module of the combined granite slab support steel frame precision instrument and equipment according to claim 1, wherein the top plate (1) is machined from a granite bedplate.
3. 3. The high-rigidity vibration isolation module of the combined granite slab support steel frame precision instrument equipment according to claim 1, wherein the steel column (4), the steel beam (5) and the diagonal brace (6) are all made into a frame structure by rectangular steel pipes, and high-damping grouting materials are filled into the steel column (4) and the steel beam (5).
4. 4. The high-rigidity vibration isolation module of the combined granite slab support steel frame precision instrument equipment according to claim 1 is characterized in that the side surfaces of the steel column (4), the steel beam (5) and the diagonal brace (6) are coated with epoxy resin paint, and the coating is uniform and free from chromatic aberration.
5. 5. The high-rigidity vibration isolation module of the combined granite slab support steel frame precision instrument and equipment according to claim 1, wherein the steel beams (5) are orthogonally arranged between the steel columns (4), one layer is arranged at the top of the upper support frame (2), and one layer is arranged at the top and the bottom of the lower support frame (3).
6. 6. The high-rigidity vibration isolation module of the combined granite slab support steel frame precision instrument according to claim 1, wherein bolt holes are formed in the periphery of the upper connecting member (7) and the periphery of the lower connecting member (8) for connecting the members, grouting holes (13) are formed in the middle of the upper connecting member for grouting high damping, and an auxiliary support (10) is arranged in the middle of a steel beam (5) at the top of the upper supporting frame (2) for connecting a granite bedplate with the upper supporting frame.
7. 7. The high-rigidity vibration isolation module of the combined granite slab support steel frame precision instrument and equipment according to claim 1, wherein bolt holes are formed in the periphery of a column foot (9) corresponding to the lower support frame (3), the column foot is connected with the ground through a chemical anchor bolt (11), and peripheral gaps are bonded through structural adhesive.

Description

High-rigidity vibration isolation module of combined granite plate supporting steel frame precision instrument and equipment Technical Field The utility model relates to the field of high-rigidity vibration isolation modules, in particular to a high-rigidity vibration isolation module for combined granite plate support steel frame precision instruments and equipment. Background In the semiconductor manufacturing process, the lithography machine has extremely severe requirements on the working environment. In order to meet the high-grade clean airflow circulation requirement of the photoetching machine and reasonably arrange a huge and complex pipeline system, the industry commonly adopts an overhead floor as an equipment installation structure. However, the raised floor and the ground of the building structure have a certain height difference, so that a micro-vibration prevention base station needs to be arranged between the raised floor and the ground of the building structure to support the dead weight of equipment, improve the basic rigidity and ensure the stable operation of an optical system and a precise movement part of the photoetching machine. The traditional integral micro-vibration prevention base station is large in size and heavy in weight, limited in limited installation height and carrying space under partial special laboratory environments, difficult to transport to an installation position smoothly, high in installation operation difficulty, not only consumes a large amount of manpower and material resources, but also influences the performance of the integral micro-vibration prevention base station easily due to uneven and other problems, and cannot meet the installation and use requirements under the special laboratory environments. Meanwhile, the requirements on the dynamic performance of the supporting structure are extremely high when the photoetching machine works, the micro-vibration prevention base station is required to effectively inhibit external vibration transmission, but the traditional micro-vibration prevention base station cannot provide enough supporting force due to insufficient rigidity, so that vibration amplification is caused, the optical system of the photoetching machine and the precision moving parts are displaced or deformed, and the photoetching precision and the product yield are seriously affected. In addition, the lithography machine is installed and has high requirements on flatness, and the traditional micro-vibration prevention base table is difficult to meet the requirements if the material selection of the table top is not optimized. Disclosure of utility model Aiming at the defects of difficult installation and insufficient rigidity of the traditional micro-vibration prevention base, the utility model provides the high-rigidity vibration isolation module of the combined granite plate support steel frame precision instrument. The utility model effectively solves the problems of the traditional micro-vibration prevention base station by adopting the design of combining the top granite platen with the upper and lower sectional support steel frames and utilizing the high rigidity and high precision flatness performance of granite and the characteristics of convenient installation, high strength and high rigidity of the sectional granite platen and the steel frames, thereby providing a stable and reliable support environment for the photoetching machine and improving the photoetching processing precision. The technical scheme is that the high-rigidity vibration isolation module of the combined granite slab support steel frame precision instrument comprises a top plate, an upper support frame and a lower support frame, wherein the top plate is an integral granite bedplate provided with reserved bolt holes for being connected with an upper support steel frame, the upper support frame and the lower support frame are frame structures composed of steel beams, steel columns, inclined struts and connecting members, the steel beams and the steel columns are frame stress members welded by steel sections and filled with high-damping grouting materials, the inclined struts are inclined stress members welded by steel sections, the connecting members of the granite bedplate and the upper support frame and the connecting members of the upper support frame and the lower support frame are rectangular steel plates with grouting holes in the middle parts of bolt holes in the periphery, the connecting members of the lower support frame and the ground are column feet adopting chemical anchors, and the auxiliary support is an auxiliary support member for the contact between the middle part of the upper surface of the steel beam and the granite bedplate. The high-rigidity vibration isolation module for the combined granite slab supported steel frame precision instrument is characterized by comprising a top plate (1), an upper supporting frame (2) and a lower supporting frame (3),