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CN-224229266-U - Auxiliary sealing mechanism for opposite-side pressure lever of semiconductor pressure control valve driven by single shaft

CN224229266UCN 224229266 UCN224229266 UCN 224229266UCN-224229266-U

Abstract

The utility model discloses an auxiliary sealing mechanism for opposite side compression bars of a semiconductor pressure control valve driven by a single shaft, which relates to the technical field of pressure control valves and comprises a valve body, wherein a valve hole is formed in the middle of the valve body, two symmetrically distributed mounting holes are formed in the valve body and symmetrically distributed on two sides of the valve hole, a valve plate driving shaft is slidably connected in the mounting holes, and fixing rods and auxiliary sealing compression bars are fixedly connected at the tail ends of the two valve plate driving shafts respectively. According to the auxiliary sealing mechanism for the opposite-side pressure lever of the semiconductor pressure control valve driven by a single shaft, a symmetrically distributed moment self-balancing system is formed through the rigid connection design of the driving shaft of the single-side valve plate, the fixing rod and the auxiliary sealing pressure lever, synchronous displacement of the driving shafts of the two sides is ensured by utilizing the symmetrical arrangement of the mounting holes and the rigid linkage of the driving shafts of the valve plate, the fixing rod and the auxiliary sealing pressure lever form a force transmission frame, the single shaft thrust is converted into the axial translation of the sealing valve plate, and the deflection risk caused by the asynchronous driving of the double shafts is eliminated.

Inventors

  • QIU YONG

Assignees

  • 上海法安仕半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20250613

Claims (7)

  1. 1. The auxiliary sealing mechanism comprises a valve body (1), wherein a valve hole (2) is formed in the middle of the valve body (1); The valve is characterized in that two symmetrically distributed mounting holes (5) are formed in the valve body (1), the two mounting holes (5) are symmetrically distributed on two sides of the valve hole (2), a valve plate driving shaft (6) is slidably connected inside the mounting holes (5), fixing rods (7) and auxiliary sealing compression rods (8) are fixedly connected to the tail ends of the two valve plate driving shafts (6) respectively, and one end, far away from the valve plate driving shaft (6), of the fixing rods (7) is fixedly connected with a sealing valve plate (9).
  2. 2. The auxiliary sealing mechanism for the opposite side pressure lever of the semiconductor pressure control valve driven by a single shaft according to claim 1 is characterized in that a flange (3) distributed around the valve hole (2) is arranged on one side of the valve body (1), and a butt sealing ring (4) is arranged on the edge of one side, far away from the flange (3), of the valve body (1).
  3. 3. The auxiliary sealing mechanism for the opposite side pressure lever of the semiconductor pressure control valve driven by a single shaft according to claim 2, wherein the diameter of the sealing valve plate (9) is larger than the aperture of the valve hole (2), one end of the auxiliary sealing pressure lever (8) far away from the valve plate driving shaft (6) is mutually attached to the sealing valve plate (9), and the center of the sealing valve plate (9) is aligned with the center of the valve hole (2).
  4. 4. The auxiliary sealing mechanism for the opposite side pressure lever of the single-shaft driven semiconductor pressure control valve as claimed in claim 3, wherein the outer side of the valve plate driving shaft (6) is sleeved with a vacuum corrugated pipe (10), the end part of the vacuum corrugated pipe (10) is fixedly connected with the outer side of the valve body (1), and the free end of the vacuum corrugated pipe (10) is fixedly connected with the end flange of the valve plate driving shaft (6).
  5. 5. The auxiliary sealing mechanism for the opposite side pressure lever of the semiconductor pressure control valve driven by a single shaft according to claim 4 is characterized in that a shutoff sealing ring (12) is fixedly connected to the outer side of the valve hole (2), a wedge-shaped sealing groove (11) is formed in the edge of one side, close to the valve hole (2), of the auxiliary sealing pressure lever (8), and the wedge-shaped sealing groove (11) and the shutoff sealing ring (12) are attached to form a sealing structure.
  6. 6. The auxiliary sealing mechanism for the opposite side pressure lever of the semiconductor pressure control valve driven by a single shaft according to claim 5 is characterized in that an inclined surface of the wedge-shaped sealing groove (11) forms an included angle with the axis of the valve hole (2), and the included angle enables an axial component force generated when the shutoff sealing ring (12) is pressed to push the sealing valve plate (9) to be closely attached to the end face of the valve hole (2).
  7. 7. The auxiliary sealing mechanism for the opposite side pressure lever of the single-shaft driven semiconductor pressure control valve as claimed in claim 6, wherein the fixed rod (7) applies force towards the valve hole (2) to the sealing valve plate (9), and the fixed rod (7) limits the maximum movement distance of the sealing valve plate (9) away from the valve hole (2).

Description

Auxiliary sealing mechanism for opposite-side pressure lever of semiconductor pressure control valve driven by single shaft Technical Field The utility model relates to the technical field of pressure control valves, in particular to an auxiliary sealing mechanism for a counter-side pressure lever of a semiconductor pressure control valve driven by a single shaft. Background The mushroom valve is a key sealing element for controlling the on-off of process gas in the dry etching and depositing equipment for manufacturing semiconductors and solar energy, and can meet the requirements of high cleanliness, high vacuum, corrosion resistance and quick response. In order to achieve the above function, the chinese patent of the prior art (bulletin number: CN 222616040U) discloses a valve body, in which a first lifting cylinder and a second lifting cylinder are connected to the interior of the valve body, and the first lifting cylinder and the second lifting cylinder are used for driving the first mushroom cloud sealing plate and the second mushroom cloud sealing plate to lift. This mushroom-type poppet valve is through adopting the sealing plate of mushroom cloud type to replace traditional flat sealing plate, mushroom-shaped protruding structure through mushroom cloud formula sealing plate can prevent better to leak, under the high temperature condition, be difficult for the deformation to flat valve plate, life is longer, establish bottom and the middle part at lifting cylinder through firm base top and stop collar cover, can carry out spacingly to lifting cylinder, when avoiding lifting cylinder to go up and down, the position takes place the skew, spacing slide that forms between the rethread limiting plate slides on spacing slide bar and goes up and down, the position of limiting plate has been limited, and then the sealing plate position has been limited, avoid the position of lifting cylinder and sealing plate to take place the skew, the stability of poppet valve has been strengthened. Although the prior art can overcome the defects, other problems exist in the operation process of the pressure control valve, namely, the valve plate of the prior pressure control valve cannot be completely and synchronously contacted with the bottom plane of the valve body due to machining and part assembly errors, so that the sealing ring is unevenly stressed, and the cavity cannot be ensured to be in good air tightness in a completely closed state. Disclosure of utility model The utility model aims to provide an auxiliary sealing mechanism for a counter-side pressure lever of a semiconductor pressure control valve driven by a single shaft, which aims to solve the problems that in the prior art, a valve plate of the conventional pressure control valve cannot be completely and synchronously contacted with a bottom plane of a valve body, so that a sealing ring is stressed unevenly, and a cavity cannot be ensured to be good in air tightness in a completely closed state. In order to achieve the aim, the utility model provides the technical scheme that the auxiliary sealing mechanism of the opposite-side compression bar of the semiconductor pressure control valve driven by a single shaft comprises a valve body, wherein a valve hole is formed in the middle of the valve body; The valve is characterized in that two symmetrically distributed mounting holes are formed in the valve body, the two mounting holes are symmetrically distributed on two sides of the valve hole, a valve plate driving shaft is slidably connected inside the mounting holes, two fixing rods and auxiliary sealing compression rods are fixedly connected to the tail ends of the valve plate driving shafts respectively, and one end of each fixing rod, far away from the valve plate driving shaft, is fixedly connected with a sealing valve plate. Preferably, one side of the valve body is provided with a flange distributed around the valve hole, and the edge of one side of the valve body far away from the flange is provided with a butt-joint sealing ring. Preferably, the diameter of the sealing valve plate is larger than the aperture of the valve hole, one end of the auxiliary sealing compression bar, which is far away from the valve plate driving shaft, is mutually attached to the sealing valve plate, and the center of the sealing valve plate is aligned with the center of the valve hole. Preferably, the outer side of the valve plate driving shaft is sleeved with a vacuum bellows, the end part of the vacuum bellows is fixedly connected with the outer side of the valve body, and the free end of the vacuum bellows is fixedly connected with the flange of the end part of the valve plate driving shaft. Preferably, the outside fixedly connected with of valve opening stops the sealing washer, auxiliary seal depression bar is close to one side edge of valve opening and is equipped with wedge seal groove, and wedge seal groove and the laminating of closure sealing washer form seal s