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CN-224229294-U - Valve mechanism

CN224229294UCN 224229294 UCN224229294 UCN 224229294UCN-224229294-U

Abstract

The present utility model relates to a valve mechanism adapted to selectively close or open a first port in a chamber. The valve mechanism comprises a displacement component, a carrier plate, a sealing disc and a guide component. The displacement component drives the sealing disc to reciprocate through the carrier plate, and the alignment component correspondingly aligns the orientation of the sealing surface of the sealing disc according to the orientation of the sealing surface of the first opening port on the cavity when the sealing disc reciprocates, so that the sealing surface of the sealing disc is parallel to the sealing surface of the first opening port on the cavity, thereby symmetrically applying force to seal the first opening port on the cavity.

Inventors

  • CHEN YUXIANG
  • XU JUNSHU
  • CAI MINGSHENG
  • CHEN YOUWEI
  • LIN CIMIN
  • YE WENYONG
  • KOU CHONGSHAN
  • ZHANG JIANCHENG

Assignees

  • 日扬科技股份有限公司

Dates

Publication Date
20260512
Application Date
20250609
Priority Date
20240716

Claims (20)

  1. 1. A valve mechanism adapted to selectively seal or unseal a first open port in a chamber, comprising: A displacement assembly for performing a first reciprocating motion along a first axial direction; two carrier plates respectively movably positioned at two sides of the displacement assembly for carrying out a second reciprocating motion along the first axial direction along with the first reciprocating motion carried out by the displacement assembly, and the displacement assembly further drives the two carrier plates to carry out a third reciprocating motion along a second axial direction in opposite directions; A sealing disk which performs the second reciprocating motion along the first axial direction along with the first reciprocating motion performed by the displacement assembly and which performs a fourth reciprocating motion between a half open/close position and a hard sealing position by the third reciprocating motion of one of the two carrier plates, respectively, and A guiding component, which guides a direction of a sealing surface of the sealing disk correspondingly according to a direction of a sealing surface of the first opening port on the cavity in the process that the sealing disk performs the fourth reciprocating motion and moves from the half-opening position to the hard sealing position, so that the sealing surface of the sealing disk is parallel to the sealing surface of the first opening port on the cavity, thereby symmetrically applying force to seal the first opening port on the cavity.
  2. 2. The valve mechanism of claim 1, wherein the displacement assembly drives the third reciprocating motion of the two carriers in opposite directions along the second axis by a path difference between a first motion path of the first reciprocating motion of the displacement assembly along the first axis and a second motion path of the second reciprocating motion of the two carriers along the first axis.
  3. 3. The valve mechanism of claim 2, wherein the displacement assembly uses at least one support plate, at least one latch plate and/or the support plate and the latch plate to drive the two carrier plates to reciprocate in opposite directions along the second axis during the path difference.
  4. 4. The valve-gate mechanism of claim 2, wherein the two carrier plates are disposed on a first side of two first elastic sheets, respectively, the sealing disk is disposed on a first side of a second elastic sheet or on one of the two carrier plates, the first elastic sheet has a straight portion extending along the first axial direction, the second elastic sheet has a straight portion extending along the first axial direction, and a second side of the two first elastic sheets and the second elastic sheet are disposed on a base.
  5. 5. The valve mechanism of claim 4, wherein the displacement member drives the third reciprocating movement of the two carrier plates in opposite directions along the second axis by the path difference between the first and second paths until the displacement member abuts the base.
  6. 6. The valve mechanism of claim 4, wherein the second sides of the two first and second resilient tabs and the base have a slot, respectively, the slots of the second sides of the two first and second resilient tabs and the base are offset from the first opening port when the sealing disk seals the first opening port on the cavity, and the locations of the slots of the second sides of the two first and second resilient tabs and the base correspond to the first opening port on the cavity when the sealing disk opens the first opening port on the cavity.
  7. 7. The valve mechanism of claim 4, wherein the second resilient sheet further has a bent portion disposed on the straight portion for acting as the guide member, and the sealing disk is disposed on the bent portion of the second resilient sheet.
  8. 8. The valve mechanism of claim 7, wherein the bending portion of the second resilient sheet bends from a bending point toward the one of the two carrier plates at a bending angle such that the top of the sealing surface is farther from the first opening port of the chamber than the bottom of the sealing surface when the sealing disk is in the semi-open position.
  9. 9. The valve mechanism of claim 8, wherein the bending angle of the bending portion is adjusted corresponding to a distance between the half open position and the hard seal position of the sealing disk, a length ratio of the bending portion to the straight portion of the second resilient sheet is adjusted corresponding to the distance between the half open position and the hard seal position, and/or a position of the sealing disk disposed on the bending portion is adjusted corresponding to the length ratio of the bending portion to the straight portion of the second resilient sheet.
  10. 10. The valve mechanism of claim 2, wherein the sealing disk is disposed on one of the two carrier plates, the alignment member is disposed on a second resilient plate and abuts the one of the two carrier plates with at least one reset member, the alignment member contacts the cavity earlier than the sealing disk when the one of the two carrier plates performs the third reciprocating motion, thereby aligning the orientation of the sealing surface of the sealing disk by the reset member against the one of the two carrier plates according to the orientation of the sealing surface of the first open port on the cavity.
  11. 11. The valve mechanism of claim 10, wherein the guide assembly has a plate body with a slot, the sealing disk is disposed on one of the two carrier plates and is movably disposed in the slot of the guide assembly, the guide assembly is pushed against the one of the two carrier plates via the reset assembly on one side to flip the one of the two carrier plates to guide the orientation of the sealing surface of the sealing disk.
  12. 12. The valve mechanism of claim 11, wherein the guide assembly further comprises an extension plate disposed transversely or longitudinally on the plate body.
  13. 13. The valve mechanism of claim 11, wherein an engagement surface of the plate of the pilot assembly and a sealing surface of the first port on the cavity have shapes and structures that correspond to one another.
  14. 14. The valve mechanism of claim 1, further comprising a tightening disk disposed on each of the two first elastic plates, the sealing disk disposed on a second elastic plate or one of the two carrier plates, the tightening disk disposed on the other of the two carrier plates, the sealing disk and the tightening disk performing the fourth reciprocating motion in opposite directions to respectively tighten against the first opening port and the second opening port on the chamber.
  15. 15. The valve mechanism of claim 1, further comprising a pressing plate, wherein the two carrier plates are respectively disposed on the two first elastic plates, the guide member and the pressing plate are respectively disposed on the two second elastic plates and respectively contact the two carrier plates by at least one reset member, so that the guide member and the pressing plate simultaneously contact both sides of the cavity along with the third reciprocating movement of the two carrier plates.
  16. 16. The valve mechanism of claim 15, wherein the pilot assembly and the abutment plate are each a plate body having a slot.
  17. 17. The valve mechanism of claim 1, wherein the displacement member is a plate, the displacement member being driven by a driving device to perform the first reciprocating movement between a fully retracted height and a fully extended height, the two carrier plates and the sealing disk performing the second reciprocating movement between the fully retracted height and a half extended height in response to the first reciprocating movement of the displacement member.
  18. 18. The valve mechanism of claim 1, wherein the valve mechanism is an all-metal valve.
  19. 19. The valve mechanism of claim 1, wherein the sealing disk comprises: A base comprising a combining seat and an auxiliary seat, wherein the auxiliary seat is integrally arranged on one side surface of the combining seat in a surrounding way, the auxiliary seat and the surface of the bottom side of the combining seat are the same or different in height, the auxiliary seat is provided with an annular inclined surface positioned on the top side, and A sealing plate, which is connected with the auxiliary seat of the base in a ring manner, wherein the sealing surface of the sealing disc is rotatably abutted against the sealing surface on the first opening port of the cavity at the hard sealing position, so as to keep vacuum sealing of the first opening port.
  20. 20. The valve mechanism of claim 19, wherein the seal plate comprises: A first wing integrally looped around the auxiliary seat of the base at a first loop and extending outwardly at a first angle in a direction away from the first loop, wherein the first wing extends obliquely outwardly from the top side of the base toward the bottom side of the base, and The second wing plate is integrally connected with the first wing plate at a second ring joint and extends outwards in a direction away from the base at a second included angle, the second wing plate obliquely extends outwards from the bottom side of the base towards the top side of the base, the sealing surface of the sealing disc is positioned on the end edge of the second wing plate, and a third included angle is formed between the second wing plate and the sealing surface of the sealing plate.

Description

Valve mechanism Technical Field The present utility model relates to a valve technology, and more particularly, to a valve mechanism. Background Conventional vacuum valves mostly use rubber-like elastic materials commonly known as O-rings as the sealing assembly between the valve plate and the valve body. The O-shaped ring can achieve the required sealing effect by extrusion deformation, so that the O-shaped ring is only suitable for valve bodies with low sealing requirements. Thus, such seal assemblies are not suitable for high vacuum systems and are not suitable for use in high temperature environments. Some high vacuum systems use all-metal valves instead of non-all-metal valves containing rubber-type sealing elements, however, the sealing surfaces are formed by the abutting of two metal layers, so that the applied closing force needs to be increased as the number of times the vacuum valve is opened and closed increases, and the service life of the high vacuum system is shortened. In addition, the dimensional change of the metal layers caused by heating or cooling can cause relative movement between the two metal layers and cause shearing deformation, so that the sealing surface is damaged. Moreover, the conventional vacuum valve has a problem that a non-driving support plate (e.g., a support plate located at an upper position) is frequently fallen off because the support plate is used to push the sealing disk. Disclosure of utility model Accordingly, one or more objects of the present utility model are to provide a valve mechanism that solves many of the problems of the conventional art. In order to achieve the above object, the present utility model provides a valve mechanism adapted to selectively seal or open a first opening port on a cavity, the valve mechanism comprising a displacement member, two carrier plates, respectively movably disposed on both sides of the displacement member, for performing a second reciprocating motion along the first axis along with the first reciprocating motion performed by the displacement member, the displacement member further driving the two carrier plates to perform a third reciprocating motion in opposite directions along a second axis, a sealing disk, the sealing disk performing the second reciprocating motion along the first axis along with the first reciprocating motion performed by the displacement member, and the sealing disk performing a fourth reciprocating motion between a half open/close position and a hard sealing position by means of the third reciprocating motion of one of the two carrier plates, respectively, and a guide member, the guide member performing the fourth reciprocating motion in the sealing disk and moving from the half open/close position to the hard sealing surface on the sealing disk in a direction corresponding to one of the sealing surfaces on the sealing disk, the sealing disk being positioned on the sealing surface of the sealing disk in a direction corresponding to one of the opening ports on the sealing disk. As described above, the valve mechanism according to the present utility model has one or more advantages or technical effects: (1) The valve mechanism is provided with a guide component (or called a correction component or a guide component), and the guide component can adjust (or called a correction component) the position of the sealing disc arranged on the second elastic sheet in advance according to the position of the first opening port of the cavity when the sealing disc contacts the first opening port or before the sealing disc contacts the first opening port, so that the sealing disc is kept completely parallel to the first opening port. (2) The sealing disc can be parallel to the first opening port on the cavity, and can be contacted with the first opening port on the cavity in a uniform stress distribution and contact pressure distribution manner to symmetrically apply force to seal the first opening port, and can reduce the abrasion phenomenon caused when the sealing disc is contacted with the first opening port. (3) The guide component of the valve mechanism can be a second elastic sheet with a bending area, so as to achieve the effect of pre-adjusting (or correcting) the position of the sealing disc arranged on the second elastic sheet. (4) The guide component of the valve mechanism can be a sleeve frame body and is provided with a reset component for abutting against the carrier plate according to the position of the first opening port of the cavity so as to realize the effect of pre-adjusting (or correcting) the position of the sealing disc arranged on the carrier plate, and the guide component can be selectively provided with a structural design which is completely attached with the first opening part of the cavity. (5) The guide assembly may have an extension plate extending laterally or longitudinally outwardly to prevent the sealing disk from contacting the first opening of the cavity earlier than the guid