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CN-224229401-U - Flow regulating valve and wafer processing equipment

CN224229401UCN 224229401 UCN224229401 UCN 224229401UCN-224229401-U

Abstract

The utility model provides a flow regulating valve and wafer processing equipment, wherein the flow regulating valve comprises a valve body, a valve core, a valve rod, a sliding rail, a regulating rod and a locking assembly, the valve rod is driven to rotate by the regulating rod to regulate the opening of the flow regulating valve, the regulating rod is limited to slide along the sliding rail, and the regulating rod is locked on the sliding rail by a locking bolt and a locking nut, so that the limiting of the regulating rod can be completed, the regulating rod is not easy to loosen, and the opening of the flow regulating valve is changed. In addition, the locking bolt is further provided with an elastic limiting part for limiting the locking nut, so that the locking nut is clamped between the sliding rail and the elastic limiting part by the elastic limiting part after being in place, and further the locking nut locks the adjusting rod, thereby the adjusting rod is not easy to loosen, and the opening of the flow regulating valve cannot be changed.

Inventors

  • JIN DONGXU

Assignees

  • 成都高真科技有限公司

Dates

Publication Date
20260512
Application Date
20250512

Claims (10)

  1. 1. A flow regulating valve, comprising: A valve body; the valve core is arranged in the valve body; The valve rod penetrates through the valve body, and one end of the valve rod is connected with the valve core; the sliding rail is arranged on the outer surface of the valve body; The first end of the adjusting rod is connected with the sliding rail in a sliding way, the second end of the adjusting rod is connected with the other end of the valve rod, and the opening of the valve core can be adjusted in the sliding process by the adjusting rod; The locking assembly comprises a locking bolt and a locking nut, the locking bolt comprises a bolt body and an elastic limiting part, the bolt body penetrates through the second end of the adjusting rod and is in sliding connection with the sliding rail, the locking nut is in threaded connection with the bolt body, the periphery of the locking bolt is provided with an installation groove, and the elastic limiting part is installed in the installation groove; The elastic limiting part is in a compressed state and an expanded state, in the compressed state, the elastic limiting part is located in the mounting groove, in the expanded state, the part of the elastic limiting part extends out of the mounting groove, and the part of the locking nut is clamped between the adjusting rod and the elastic limiting part.
  2. 2. The flow rate regulating valve according to claim 1, wherein the elastic stopper includes a plate spring piece, one end of the plate spring piece in a longitudinal direction thereof is located in the mounting groove and is connected to the bolt body, and the other end of the plate spring piece in the longitudinal direction thereof is suspended and has the compressed state and the expanded state.
  3. 3. The flow rate regulating valve according to claim 2, wherein the length direction of the leaf spring piece is parallel to the axial direction of the bolt body, and the leaf spring piece is connected to the bolt body at an end thereof facing away from the adjustment lever in the own length direction.
  4. 4. A flow rate regulating valve as defined in claim 3, wherein the number of said mounting grooves and said plate spring pieces is plural, and plural said mounting grooves are provided at intervals in the circumferential direction of said bolt body, one said plate spring piece being provided in each of said mounting grooves.
  5. 5. The flow rate regulating valve according to claim 4, wherein all the mounting grooves are provided at equal intervals in the circumferential direction of the bolt body.
  6. 6. The flow rate regulating valve as claimed in claim 4, wherein the plate spring piece is welded to the bolt body at an end thereof facing away from the adjustment lever in a longitudinal direction thereof.
  7. 7. The flow regulating valve as claimed in claim 1, wherein the valve body is rotatably disposed inside the valve body, a length direction of the regulating rod is perpendicular to a rotation axis of the valve body, the slide rail is arc-shaped, and an arc center of the slide rail is located on the rotation axis of the valve body.
  8. 8. The flow regulating valve of claim 7, further comprising an opening indicating marker disposed on an outer surface of the valve body, and wherein the junction of the adjustment rod and the valve stem is between the opening indicating marker and the slide rail.
  9. 9. A flow regulating valve according to any one of claims 1 to 8, wherein the lock nut is a dished nut.
  10. 10. A wafer processing apparatus comprising a flow regulating valve as claimed in any one of claims 1 to 9.

Description

Flow regulating valve and wafer processing equipment Technical Field The utility model relates to the technical field of wafers, in particular to a flow regulating valve and wafer processing equipment. Background This section provides merely background information related to the present disclosure and is not necessarily prior art. At present, an exhaust pipe of a process chamber of wafer processing equipment is provided with a flow regulating valve, the flow regulating valve is usually required to regulate the opening, after the opening is regulated, a valve core can rotate under some unexpected conditions, so that the flow is abnormal, and the temperature in the process chamber is overhigh, so that the wafer processing is adversely affected. Disclosure of utility model The utility model aims to at least solve the technical problem that the flow regulation of an exhaust flow regulating valve of the existing wafer processing equipment is easy to fail. The aim is achieved by the following technical scheme: a first aspect of the present utility model proposes a flow regulating valve comprising: A valve body; the valve core is arranged in the valve body; The valve rod penetrates through the valve body, and one end of the valve rod is connected with the valve core; the sliding rail is arranged on the outer surface of the valve body; The first end of the adjusting rod is connected with the sliding rail in a sliding way, the second end of the adjusting rod is connected with the other end of the valve rod, and the opening of the valve core can be adjusted in the sliding process by the adjusting rod; The locking assembly comprises a locking bolt and a locking nut, the locking bolt comprises a bolt body and an elastic limiting part, the bolt body penetrates through the second end of the adjusting rod and is in sliding connection with the sliding rail, the locking nut is in threaded connection with the bolt body, and the elastic limiting part is installed in the installation groove; The elastic limiting part is in a compressed state and an expanded state, in the compressed state, the elastic limiting part is located in the mounting groove, in the expanded state, the part of the elastic limiting part extends out of the mounting groove, and the part of the locking nut is clamped between the adjusting rod and the elastic limiting part. According to the flow regulating valve provided by the first aspect of the utility model, the valve rod is driven to rotate by the regulating rod to regulate the opening degree of the flow regulating valve, the regulating rod is limited to slide along the sliding rail, and the regulating rod is locked on the sliding rail through the locking bolt and the locking nut, so that the limiting of the regulating rod can be finished, the regulating rod is not easy to loosen, and the opening degree of the flow regulating valve is changed. In addition, the locking bolt is further provided with an elastic limiting part for limiting the locking nut, so that the locking nut is clamped between the sliding rail and the elastic limiting part by the elastic limiting part after being in place, and further the locking nut locks the adjusting rod, thereby the adjusting rod is not easy to loosen, and the opening of the flow regulating valve cannot be changed. In addition, the flow regulating valve according to the present utility model may have the following additional technical features: in some embodiments of the present utility model, the elastic limiting portion includes a plate spring, one end of the plate spring along a length direction of the plate spring is located in the mounting groove and is connected to the bolt body, and the other end of the plate spring along the length direction of the plate spring is suspended and has the compressed state and the expanded state. In some embodiments of the present utility model, the length direction of the leaf spring piece is parallel to the axial direction of the bolt body, and the leaf spring piece is connected with the bolt body along one end of the leaf spring piece, which is away from the adjusting rod, along the length direction of the leaf spring piece. In some embodiments of the present utility model, the number of the mounting grooves and the number of the plate reeds are all plural, the plurality of the mounting grooves are arranged at intervals along the circumferential direction of the bolt body, and one plate reed is arranged in each mounting groove. In some embodiments of the utility model, all of the mounting grooves are equally spaced along the circumferential direction of the bolt body. In some embodiments of the present utility model, one end of the leaf spring piece, which is far away from the adjusting rod along the length direction of the leaf spring piece, is welded with the bolt body. In some embodiments of the present utility model, the valve core is rotatably disposed inside the valve body, the length direction of the adjusting rod is pe