CN-224229490-U - Connecting assembly for epitaxial equipment and epitaxial equipment

Abstract

The application discloses a connecting component for epitaxial equipment and the epitaxial equipment, wherein the connecting component comprises a hollow transfer pipe, the transfer pipe is configured to be conical in axial section, one side of the transfer pipe is provided with a first connecting end, the first connecting end is provided with a first groove, the first groove is used for placing a first sealing ring, the first connecting end is connected with a first flange arranged on a first pipeline, the inner diameter of the first connecting end is larger than that of the first pipeline, one side, opposite to the first connecting end, of the transfer pipe is provided with a second connecting end, the second connecting end is provided with a second groove, the second groove is used for placing a second sealing ring, the second connecting end is connected with a second flange arranged on a second pipeline, and the inner diameter of the side of the first connecting end is larger than that of the second connecting end. The connecting component can be reliably connected with the pipelines at the two sides and simultaneously reduce turbulence in the pipelines.

Inventors

• JIANG JIAWANG
• ZHAO PENG
• ZHENG YINGJIE

Assignees

• 芯三代半导体科技(苏州)股份有限公司

Dates

Publication Date

20260512

Application Date

20250630

Claims (10)

1. 1. A connection assembly for an epitaxial apparatus, comprising: A hollow adapter tube configured to be tapered in its axial cross section, One side of the transfer pipe is provided with a first connecting end, the first connecting end is provided with a first groove, the first groove is used for placing a first sealing ring, the first connecting end is connected with a first flange arranged on a first pipeline, and the inner diameter of the first connecting end is larger than that of the first pipeline; The adapter tube is provided with a second connecting end on one side opposite to the first connecting end, the second connecting end is provided with a second groove, the second groove is used for placing a second sealing ring, the second connecting end is connected with a second flange arranged on a second pipeline, and the inner diameter of the first connecting end side is larger than that of the second connecting end side.
2. 2. A connection assembly for an epitaxial apparatus according to claim 1, The sections of the first groove and the second groove are trapezoid or dovetail-shaped.
3. 3. A connection assembly for an epitaxial apparatus according to claim 1, The first sealing ring and the second sealing ring are respectively fluororubber rings.
4. 4. A connection assembly for an epitaxial apparatus according to claim 1, The inner diameter of the second connecting end is the same as the inner diameter of the second flange.
5. 5. The connection assembly for an epitaxial apparatus of claim 1, further comprising: the fixing piece comprises a first compression ring, a second compression ring and a fastener; The first pressure ring is attached to the outer mounting surface of the first flange, the second pressure ring is attached to the outer mounting surface of the second flange, and the first pressure ring is connected with the second pressure ring through the fastening piece.
6. 6. A connection assembly for an epitaxial apparatus according to claim 5, The outer side of the circumference of the first pressure ring is provided with a first protrusion, the first protrusion is provided with a first perforation extending along the axial direction of the first pressure ring, the outer side of the circumference of the second pressure ring is provided with a second protrusion, the second protrusion is provided with a second perforation extending along the axial direction of the second pressure ring, and the fastener penetrates through the first perforation and the second perforation.
7. 7. A connection assembly for an epitaxial apparatus according to claim 5, A preset gap is arranged between the first pressing ring and the second pressing ring, and the preset gap is 0.5-1mm.
8. 8. The connection assembly for an epitaxial apparatus according to claim 5, comprising: And 2 fixing pieces which are symmetrically arranged along the axial direction of the connecting assembly.
9. 9. An epitaxial device comprising a connection assembly according to any one of claims 1-8.
10. 10. The epitaxial apparatus of claim 9, wherein said epitaxial apparatus has a reaction chamber with an exhaust line having said connection assembly.

Description

Connecting assembly for epitaxial equipment and epitaxial equipment Technical Field The application relates to the technical field of epitaxy, in particular to a connecting component for epitaxy equipment and the epitaxy equipment. Background The CVD equipment for preparing the film material is high-tech equipment integrating vacuum, high temperature, high-speed rotation and other technologies. In the reaction chamber, the reactant gas flows across the heated substrate surface and undergoes a chemical reaction to produce GaN, alN, siC or monocrystalline films of other materials. In the equipment maintenance and transformation process, when the place shown in a in fig. 1 appears, two pipelines need to be connected, and a gap (the distance between two flange surfaces is H) is formed between the two pipelines due to the different sizes of the joints (ISO flanges) of the pipelines. As shown in fig. 1 b, a new straight pipe is introduced, and two ends of the new straight pipe are respectively provided with a joint, and the joints are connected to the joints (at the moment, the joints are provided with sealing rings) on the pipe of the equipment through the central rings and are locked by connecting pieces. The thickness of the center ring, the size of the introduced straight pipe type pipeline and the avoiding size of the connecting piece are required to be confirmed in actual operation, so that the operation is very complicated, and the condition that a gap is too small exists between joints of two pipelines exists. Disclosure of Invention In order to overcome the above disadvantages, the present application aims to provide a connection assembly for an epitaxial device, which is not affected by the distance between the end faces of two flanges, even if the distance is small and reliable. In order to achieve the above purpose, the application adopts the following technical scheme: a connection assembly for an epitaxial apparatus, comprising: A hollow adapter tube configured to be tapered in its axial cross section, One side of the transfer pipe is provided with a first connecting end, the first connecting end is provided with a first groove, the first groove is used for placing a first sealing ring, the first connecting end is connected with a first flange arranged on a first pipeline, and the inner diameter of the first connecting end is larger than the inner diameter of the first pipeline (the inner diameter of the first pipeline is the same as the inner diameter of the first flange); The adapter tube is provided with a second connecting end on one side opposite to the first connecting end, the second connecting end is provided with a second groove, the second groove is used for placing a second sealing ring, the second connecting end is connected with a second flange arranged on a second pipeline, and the inner diameter of the first connecting end side is larger than that of the second connecting end side. Preferably, the cross sections of the first groove and the second groove are trapezoid or dovetail-shaped. Preferably, the first sealing ring and the second sealing ring are respectively fluorine rubber rings. Preferably, the second connection end has an inner diameter identical to the inner diameter of the second flange. Preferably, the connection assembly further comprises: the fixing piece comprises a first compression ring, a second compression ring and a fastener; The first pressure ring is attached to the outer mounting surface of the first flange, the second pressure ring is attached to the outer mounting surface of the second flange, and the first pressure ring is connected with the second pressure ring through the fastening piece. Preferably, the first press ring has a first protrusion on the outer side in the circumferential direction, the first protrusion has a first through hole extending along the axial direction of the first press ring, the second press ring has a second protrusion on the outer side in the circumferential direction, the second protrusion has a second through hole extending along the axial direction of the second press ring, and the fastener passes through the first through hole and the second through hole. Preferably, a preset gap is arranged between the first pressure ring and the second pressure ring, and the preset gap is 0.5-1mm. Preferably, the connecting assembly comprises 2 fixing pieces which are symmetrically arranged along the axial direction of the connecting assembly. Preferably, the present application proposes an epitaxy apparatus comprising the connection assembly described above. Preferably, the epitaxial apparatus has a reaction chamber with an exhaust line having the connection assembly. Advantageous effects Compared with the two connecting components arranged on the pipelines of the existing epitaxial equipment, the connecting component provided by the application can be reliably connected to the pipelines on two sides and simultaneously reduce turbulence in