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CN-224229730-U - Phosphorus trifluoride filling equipment

CN224229730UCN 224229730 UCN224229730 UCN 224229730UCN-224229730-U

Abstract

The utility model belongs to the technical field of filling equipment, in particular to phosphorus trifluoride filling equipment, which comprises a refrigerating chamber and a trolley, wherein the trolley is arranged on the right side of the refrigerating chamber, a plurality of groups of filling steel cylinders are arranged on the trolley, the utility model monitors the position deviation of the filling steel cylinders in real time in the environment of the low-temperature refrigerating chamber through a four-corner multi-point positioning system of an infrared transmitter and a receiver, ensures the accurate alignment of a liquid inlet of the steel cylinders and a liquid filling port, through the steel bottle is snatched in coordination accuracy of sliding module one, sliding module two and lifting module, combines image recognition sensor real-time calibration route, eliminates manual handling's physical power risk and steel bottle and falls hidden danger, and docking mechanism realizes self-adaptation through electric putter, spring buffering and gear drive and seals, need not the manual intervention and can accomplish the butt joint, stops skew or the leakage because of manual operation leads to.

Inventors

  • WU PINGXIU
  • SHANG JIE
  • YANG HUI
  • Xiao Zuoheng
  • SHAO HUI
  • WANG TENGFEI
  • ZHANG QINGYUAN
  • CHEN XIAOFEI
  • WANG KUNLIN

Assignees

  • 太和气体（荆州）有限公司

Dates

Publication Date
20260512
Application Date
20250519

Claims (10)

  1. 1. The phosphorus trifluoride filling equipment comprises a refrigerating chamber (1) and a trolley (7) and is characterized in that the trolley (7) is arranged on the right side of the refrigerating chamber (1), a plurality of groups of filling steel cylinders (8) are arranged on the trolley (7), a material taking assembly is arranged on the rear side of the trolley (7), a filling bin (10) is arranged on the right side of the refrigerating chamber (1), a bottom plate (12) is fixedly arranged on the bottom side of the filling bin (10), a sliding box (9) is arranged at the top of the bottom plate (12), a placing groove (37) is formed in the top of the sliding box (9), a sliding assembly used for sliding the sliding box (9) left and right is arranged on the bottom plate (12), a filling box (11) is arranged on the top of the filling bin (10) in a sliding mode, a limit groove (18) is formed in the bottom of the filling box (11), a lifting cylinder (2) is fixedly arranged on the top of the refrigerating chamber (1), an output shaft end of the lifting cylinder (2) is fixedly connected with the filling box (11), and the sliding assembly (11) is arranged between the sliding box (11) and the filling box.
  2. 2. The phosphorus trifluoride filling device according to claim 1, wherein the material taking assembly comprises a mounting frame (3), the mounting frame (3) is arranged on the rear side of the cart (7), a first sliding module (4) is arranged on the top of the mounting frame (3), a second sliding module (5) is arranged on the first sliding module (4) in a sliding mode, a lifting module (6) is arranged on the second sliding module (5) in a sliding mode, a clamping jaw air cylinder (29) is fixedly arranged at the bottom of the lifting module (6), and clamping jaws (30) are arranged on the front side and the rear side of the bottom of the clamping jaw air cylinder (29) in a sliding mode.
  3. 3. The phosphorus trifluoride filling device according to claim 1, wherein the sliding component comprises a screw rod (14), the screw rod (14) is rotatably arranged between the left side and the right side of the top of the bottom plate (12), a first driving motor (16) is fixedly arranged on the right side of the bottom plate (12), the output shaft end of the first driving motor (16) is fixedly connected to the right end of the screw rod (14), the bottom thread of the sliding box (9) is sleeved on the screw rod (14), sliding rails (13) are fixedly connected to the front side and the rear side of the top of the bottom plate (12), and the front side and the rear side of the bottom side of the sliding box (9) are respectively and slidably connected to the two groups of sliding rails (13).
  4. 4. A phosphorus trifluoride filling apparatus as claimed in claim 1, characterized in that the positioning assembly comprises an infrared emitter (17) and an infrared receiver (35), the infrared emitter (17) and the infrared receiver (35) being provided with four groups, the four groups of infrared emitters (17) being mounted at the bottom four corners of the filling box (11), the four groups of infrared receivers (35) being mounted at the top four corners of the sliding box (9).
  5. 5. The phosphorus trifluoride filling device according to claim 1, wherein the filling assembly comprises a mounting plate (19), the mounting plate (19) is fixedly connected between the front side and the rear side of the inside of the filling box (11), a driving motor II (20) is fixedly arranged at the top of the mounting plate (19), a rotating plate (33) is fixedly connected to the output shaft end of the driving motor II (20), two groups of fixing rods (34) are fixedly connected to the bottom of the rotating plate (33), electric push rods (21) are respectively arranged on the front side and the rear side of the bottom of the mounting plate (19), and a butt joint mechanism is arranged on the right side of the inside of the filling box (11).
  6. 6. The phosphorus trifluoride filling device according to claim 5, wherein the docking mechanism comprises a push plate (22), the front and rear sides of the push plate (22) are respectively and slidably sleeved on output shafts of two groups of electric push rods (21), the output shaft ends of the two groups of electric push rods (21) are fixedly connected with a first limiting plate (36), the output shafts of the two groups of electric push rods (21) are fixedly sleeved with a second limiting plate (38), the output shafts of the two groups of electric push rods (21) are fixedly sleeved with springs (39), the left sides of the first limiting plate (36) are in butt joint with the right sides of the push plate (22), the two sides of the springs (39) are respectively in butt joint with the right sides of the second limiting plate (38) and the left sides of the push plate (22), and the middle part of the push plate (22) is provided with a screw tightening mechanism.
  7. 7. The phosphorus trifluoride filling device according to claim 6, wherein the screwing mechanism comprises a rotary joint (24), the rotary joint (24) is arranged on the right side of the push plate (22), an output end of the rotary joint (24) is fixedly communicated with a threaded sleeve (23), a first gear (26) is fixedly sleeved on the threaded sleeve (23), an input end of the rotary joint (24) is fixedly communicated with a liquid inlet pipe (25), a third driving motor (28) is fixedly arranged on the right side of the push plate (22), a second gear (27) is fixedly connected to an output shaft end of the third driving motor (28), and the second gear (27) is meshed with the first gear (26).
  8. 8. The phosphorus trifluoride filling device as claimed in claim 1, wherein a handle (31) is arranged at the top of the filling steel cylinder (8), a liquid inlet (15) is formed in the right side of the top of the filling steel cylinder (8), and a thread groove is formed in the outer surface of the liquid inlet (15).
  9. 9. A phosphorus trifluoride filling apparatus as claimed in claim 2, characterized in that an image recognition sensor (32) is mounted on the right side of the jaw cylinder (29).
  10. 10. The phosphorus trifluoride filling device as claimed in claim 1, wherein the inner wall of the placement groove (37) is fixedly connected with a rubber pad I.

Description

Phosphorus trifluoride filling equipment Technical Field The utility model relates to the technical field of filling equipment, in particular to phosphorus trifluoride filling equipment. Background The phosphorus trifluoride can be used as a fluorinating agent, can be used for ion transfer and applied to the fields of electronic industry, battery manufacturing, high polymer materials, catalysts and the like, can be changed into plasma gas under the action of microwaves to be doped into semiconductors in the aspect of semiconductor manufacturing, can be used as reactants in the field of high polymer materials to synthesize high polymer materials with good corrosion resistance such as fluorinated organic dithiophosphate, terephthalate and the like, and is used as gas at normal temperature, and the liquid is required to be condensed at low temperature for filling during filling, so that the filling process of the phosphorus trifluoride has extremely high requirements on safety, accuracy and automation in the chemical industry. Traditional filling equipment mainly relies on manual work or simple mechanical positioning, is difficult to aim at the inlet of filling steel bottle fast, accurately in the complex environment, leads to filling inefficiency, even causes the leakage risk because of the interface that is not aimed at, and steps such as transport, location, the butt joint of filling in-process steel bottle need artifical assistance, and intensity of labour is big, and has the possibility of human misoperation, influences production safety and continuity, for this we propose a phosphorus trifluoride filling equipment. Disclosure of utility model Aiming at the defects of the prior art, the utility model provides phosphorus trifluoride filling equipment, which is characterized in that the position deviation of a filling steel cylinder is monitored in real time in a low-temperature refrigerating chamber environment through a four-corner multi-point positioning system of an infrared transmitter and a receiver, the accurate alignment of a liquid inlet and a liquid filling port of the steel cylinder is ensured, the steel cylinder is accurately grabbed through the cooperation of a first sliding module, a second sliding module and a lifting module, the real-time calibration path of an image recognition sensor is combined, and a docking mechanism realizes self-adaptive sealing through an electric push rod, spring buffering and gear transmission, so that the background problem is solved. The phosphorus trifluoride filling equipment comprises a refrigerating chamber and a cart, wherein the cart is arranged on the right side of the refrigerating chamber, a plurality of groups of filling steel cylinders are placed on the cart, a material taking assembly is arranged on the rear side of the cart, a filling bin is arranged on the right side of the refrigerating chamber, a bottom plate is fixedly arranged on the bottom side of the filling bin, a sliding box is arranged on the top of the bottom plate, a placing groove is arranged on the top of the sliding box, a sliding assembly for sliding the sliding box left and right is arranged on the bottom plate, a filling box is arranged on the top of the filling bin in a sliding mode, a limiting groove is formed in the bottom of the filling box, a lifting cylinder is fixedly arranged on the top of the refrigerating chamber, the output shaft end of the lifting cylinder is fixedly connected to the top side of the filling box, a positioning assembly is arranged between the sliding box and the filling box, and the filling assembly is arranged in the filling box. Preferably, the material taking assembly comprises a mounting frame, the mounting frame is arranged on the rear side of the cart, a first sliding module is mounted on the top of the mounting frame, a second sliding module is mounted on the first sliding module in a sliding mode, a lifting module is mounted on the second sliding module in a sliding mode, a clamping jaw cylinder is fixedly mounted at the bottom of the lifting module, and clamping jaws are mounted on the front side and the rear side of the bottom of the clamping jaw cylinder in a sliding mode. Preferably, the sliding assembly comprises a screw rod, the screw rod is rotationally arranged between the left side and the right side of the top of the bottom plate, a first driving motor is fixedly arranged on the right side of the bottom plate, the output shaft end of the first driving motor is fixedly connected with the right end of the screw rod, the bottom thread sleeve of the sliding box is arranged on the screw rod, sliding rails are fixedly connected to the front side and the rear side of the top of the bottom plate, and the front side and the rear side of the bottom side of the sliding box are respectively and slidably connected to the two groups of sliding rails. Preferably, the positioning assembly comprises an infrared emitter and an infrared receiver, wherein t