CN-224229733-U - Negative pressure type helium recovery system

Abstract

The utility model discloses a negative pressure type helium recovery system which comprises a first pipeline, a negative pressure recovery unit, a helium calibration unit and a helium concentration meter, wherein helium to be recovered is arranged in the first pipeline, the negative pressure recovery unit is used for generating negative pressure and collecting helium in the first pipeline, the negative pressure recovery unit is communicated with a high-pressure tank through a compressor and used for filling helium into a workpiece, the helium calibration unit is used for calibrating working helium concentration of the high-pressure tank and comprises a second pipeline, a third pipeline and a helium concentration meter, the second pipeline is internally provided with pure helium, the third pipeline is internally provided with compressed air, the second pipeline and the third pipeline are respectively connected with the helium concentration meter through concentration meter calibration valves, and the helium concentration meter is also connected with the high-pressure tank. The utility model improves the recovery efficiency and the recycling efficiency of helium. Meanwhile, the working helium concentration of the high-pressure tank is calibrated through the helium calibration unit, so that the use safety is ensured.

Inventors

• SUN HOUTAO

Assignees

• 中创华工智能科技(上海)有限公司

Dates

Publication Date

20260512

Application Date

20250630

Claims (7)

1. 1. A negative pressure helium recovery system, comprising: a first pipe having helium gas to be recovered therein; The negative pressure recovery unit is used for generating negative pressure and collecting helium in the first pipeline, and is communicated with a high-pressure tank through a compressor, and the high-pressure tank is used for filling helium into a workpiece; The helium gas calibration unit is used for calibrating the working helium gas concentration of the high-pressure tank and comprises a second pipeline, a third pipeline and a helium concentration meter, wherein pure helium gas is arranged in the second pipeline, compressed air is arranged in the third pipeline, the second pipeline and the third pipeline are respectively connected with the helium concentration meter through concentration meter calibration valves, and the helium concentration meter is also connected with the high-pressure tank.
2. 2. The negative pressure helium recovery system of claim 1, wherein said negative pressure recovery unit comprises a negative pressure tank and a vacuum pump connected to each other, said negative pressure tank being connected to said first conduit, an outlet of said vacuum pump being connected to said compressor.
3. 3. The negative pressure helium recovery system of claim 2, wherein a shut-off valve is provided between the negative pressure tank and the vacuum pump.
4. 4. The negative pressure helium recovery system of claim 3, wherein the second conduit is connected to the negative pressure tank via a helium make-up valve.
5. 5. The negative pressure helium recovery system of claim 1, wherein a gas return valve is provided on said compressor, and said compressor is further connected to a low pressure tank via an automatic drain valve and an oil filter.
6. 6. The negative pressure helium recovery system of claim 5, wherein said oil filter is connected to an automatic blowdown valve.
7. 7. The negative pressure helium recovery system of claim 1, wherein a detection solenoid valve is provided between the high pressure tank and the helium concentration meter.

Description

Negative pressure type helium recovery system Technical Field The utility model relates to the technical field of helium recovery systems, in particular to a negative pressure type helium recovery system. Background Helium is used as a rare inert gas and has irreplaceable functions in the fields of semiconductor manufacture, aerospace, low-temperature superconductivity, vacuum leak detection and the like. However, helium resources are limited in reserves worldwide and are not renewable, and their market price continues to rise, resulting in significant increases in industrial application costs. Therefore, the efficient helium recovery system has become a key device for reducing production cost and realizing resource recycling in various industries. The traditional helium recovery system is mainly designed for recovering high-pressure helium, and in a low-pressure helium (such as leaked helium in the leak detection process and helium discharged by equipment purging) recovery scene, the problems of low recovery efficiency, poor system integration level and the like exist. Disclosure of utility model In view of the foregoing, it is desirable to provide a negative pressure helium recovery system. A negative pressure helium recovery system comprising: a first pipe having helium gas to be recovered therein; The negative pressure recovery unit is used for generating negative pressure and collecting helium in the first pipeline, and is communicated with a high-pressure tank through a compressor, and the high-pressure tank is used for filling helium into a workpiece; The helium gas calibration unit is used for calibrating the working helium gas concentration of the high-pressure tank and comprises a second pipeline, a third pipeline and a helium concentration meter, wherein pure helium gas is arranged in the second pipeline, compressed air is arranged in the third pipeline, the second pipeline and the third pipeline are respectively connected with the helium concentration meter through concentration meter calibration valves, and the helium concentration meter is also connected with the high-pressure tank. In one embodiment, the negative pressure recovery unit comprises a negative pressure tank and a vacuum pump which are connected with each other, the negative pressure tank is connected with the first pipeline, and an outlet of the vacuum pump is connected with the compressor. In one embodiment, a stop valve is provided between the negative pressure tank and the vacuum pump. In one embodiment, the second conduit is connected to the negative pressure tank via a helium replenishment valve. In one embodiment, the compressor is provided with a gas reflux valve, and the compressor is also connected with a low-pressure tank through an automatic drain valve and an oil pollution filter. In one embodiment, the oil filter is connected to an automatic drain valve. In one embodiment, a detection solenoid valve is provided between the high pressure tank and the helium concentration meter. According to the negative pressure type helium recovery system, negative pressure is generated through the negative pressure recovery unit to rapidly recover the recovered helium, recovery efficiency is effectively improved, and then the helium is pressurized through the compressor and then is sent to the high-pressure tank for use, so that recycling efficiency of the helium is improved. Meanwhile, the working helium concentration of the high-pressure tank is calibrated through the helium calibration unit, so that the use safety is guaranteed, in addition, the helium calibration unit can calibrate pure helium and helium-free concentration, and the accuracy of the helium concentration meter is guaranteed at any time. Drawings In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Fig. 1 is a schematic view of the negative pressure type helium recovery system of the present utility model. Detailed Description In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. Preferred embodiments of the present utility model are shown in the drawings. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is