CN-224230641-U - Semiconductor grade silicon dioxide vacuum sintering furnace

Abstract

The application provides a semiconductor grade silicon dioxide vacuum sintering furnace which comprises a furnace body, a dragging vehicle, a front door body and a pressing rotating assembly, wherein a heating cavity is formed in the middle of the furnace body, a rear door body is arranged at the first end of the furnace body, the dragging vehicle is arranged in the furnace body in a sliding mode, a workpiece is placed on the dragging vehicle, the front door body is arranged on one side of the dragging vehicle, when the dragging vehicle slides into the heating cavity, the front door body seals the second end of the furnace body, and the pressing rotating assembly has the advantages that the workpiece on the dragging vehicle can be fixed from two ends through the pressing rotating assembly, so that the workpiece is ensured to be kept stable all the time in the heating process, and the workpiece can be driven to rotate. In the heating process, the workpiece can be heated more uniformly by rotating, the heating effect and the product quality are improved, the setting of the towing vehicle can realize automatic workpiece loading and unloading, the labor intensity of workers is reduced, and the working efficiency is improved.

Inventors

• WANG BING
• LIU SHUNGANG

Assignees

• 沈阳广泰真空科技股份有限公司

Dates

Publication Date

20260512

Application Date

20250430

Claims (10)

1. 1. A semiconductor grade silica vacuum sintering furnace, comprising: the heating furnace comprises a furnace body (1), wherein a heating cavity is formed in the middle of the furnace body (1), a supporting seat is arranged at the bottom of the furnace body (1), and a rear door body (2) is arranged at the first end of the furnace body (1); the dragging vehicle (3) is arranged in the furnace body (1) in a sliding manner, and a workpiece is placed on the dragging vehicle (3); The front door body (4) is arranged on one side of the towing vehicle (3), and when the towing vehicle (3) slides into the heating cavity, the front door body (4) seals the second end of the furnace body (1); The compressing and rotating assembly is arranged on the front door body (4) and the rear door body (2) and can fix and drive the workpiece in the heating cavity to rotate along the axial direction.
2. 2. The semiconductor grade silicon dioxide vacuum sintering furnace of claim 1, wherein the compaction rotating assembly comprises: The first pressure head (5) is arranged on the rear door body (2), a first driving piece (6) is arranged on one side of the first pressure head (5), and the first driving piece (6) is used for driving the first pressure head (5) to rotate; The second pressure head (7), second pressure head (7) set up in on the preceding door body (4), be provided with second driving piece (8) on second pressure head (7), second driving piece (8) are used for driving second pressure head (7) are followed work piece axial direction removes.
3. 3. The vacuum sintering furnace for semiconductor grade silicon dioxide according to claim 1, further comprising a third driving member (9), wherein the third driving member (9) is disposed on one side of the front door body (4) away from the pallet truck (3) and is used for driving the pallet truck (3) and the front door body (4) to move.
4. 4. The semiconductor grade silicon dioxide vacuum sintering furnace according to claim 1, further comprising a guide rail (10), wherein the pallet truck (3) is arranged on the guide rail (10), and the guide rail (10) is slidingly connected with the furnace body (1).
5. 5. The vacuum sintering furnace for semiconductor grade silicon dioxide according to claim 4, characterized in that a fourth driving piece (11) is arranged between the guide rail (10) and the towing vehicle (3), and the fourth driving piece (11) is used for driving the towing vehicle (3) to lift on the guide rail (10).
6. 6. The vacuum sintering furnace for semiconductor grade silicon dioxide according to claim 1, wherein a heater (12) is arranged in the furnace body (1), and the heater (12) is used for heating the heating cavity.
7. 7. The semiconductor grade silicon dioxide vacuum sintering furnace according to claim 6, characterized in that an insulating layer (13) is arranged in the furnace body (1), and the insulating layer (13) is arranged between the heater (12) and the furnace body (1).
8. 8. The vacuum sintering furnace for semiconductor grade silicon dioxide according to claim 1, wherein the furnace body (1) is also connected with a vacuum pumping system (14).
9. 9. The vacuum sintering furnace for semiconductor grade silicon dioxide according to claim 1, wherein the furnace body (1) is further provided with an air charging and discharging system (15) and an air cooling heat exchange system (16).
10. 10. The vacuum sintering furnace for semiconductor grade silicon dioxide according to claim 1, wherein a locking piece (17) is arranged on the furnace body (1), and the locking piece (17) is used for locking and fixing the front door body (4) and the rear door body (2) on the furnace body (1).

Description

Semiconductor grade silicon dioxide vacuum sintering furnace Technical Field The application belongs to the technical field of vacuum furnaces, and particularly relates to a semiconductor grade silicon dioxide vacuum sintering furnace. Background Along with the continuous improvement of the requirements of the high-end manufacturing field on the material performance, the high-temperature sintering and heat treatment process of the silicon dioxide powder workpiece under vacuum or protective atmosphere becomes a key technical link. The prior art has the outstanding problems that under a static heating mode, the distance between the circumferential surface of the workpiece and a heat source is different, the temperature difference is easy to form, the problems of coating material decomposition, interface binding force reduction and the like are caused, and the functionality of a precision part is influenced. Traditional equipment relies on people's frock to unload, and not only inefficiency, and the heating chamber exposes atmospheric time long, reduces product quality. Disclosure of utility model The present utility model aims to solve at least one of the technical problems existing in the prior art or related art. In order to solve the above problems, the present application provides a semiconductor grade silicon dioxide vacuum sintering furnace comprising: the heating cavity is formed in the middle of the furnace body, the supporting seat is arranged at the bottom of the furnace body, and the rear door body is arranged at the first end of the furnace body; The dragging trolley is arranged in the furnace body in a sliding manner, and a workpiece is placed on the dragging trolley; The front door body is arranged on one side of the towing vehicle, and seals the second end of the furnace body when the towing vehicle slides into the heating cavity; The pressing rotating assembly is arranged on the front door body and the rear door body, and can fix and drive the workpiece in the heating cavity to rotate along the axial direction. Optionally, the pressing rotation assembly includes: The first pressure head is arranged on the rear door body, one side of the first pressure head is provided with a first driving piece, and the first driving piece is used for driving the first pressure head to rotate; The second pressure head is arranged on the front door body, a second driving piece is arranged on the second pressure head and is used for driving the second pressure head to move along the axial direction of the workpiece. Optionally, the device further comprises a third driving piece, wherein the third driving piece is arranged on one side of the front door body away from the towing vehicle and is used for driving the towing vehicle and the front door body to move. Optionally, the furnace body comprises a guide rail, wherein the towing vehicle is arranged on the guide rail, and the guide rail is in sliding connection with the furnace body. Optionally, a fourth driving piece is arranged between the guide rail and the towing vehicle, and the fourth driving piece is used for driving the towing vehicle to lift on the guide rail. Optionally, a heater is arranged in the furnace body, and the heater is used for heating the heating cavity. Optionally, an insulating layer is arranged in the furnace body, and the insulating layer is arranged between the heater and the furnace body. Optionally, a vacuum pumping system is further connected to the furnace body. Optionally, the furnace body is also provided with an air charging and discharging system and an air cooling heat exchange system. Optionally, a locking member is arranged on the furnace body, and the locking member is used for locking and fixing the front door body and the rear door body on the furnace body. Advantageous effects According to the semiconductor grade silicon dioxide vacuum sintering furnace provided by the embodiment of the utility model, through the arrangement of the compression rotating assembly, the workpiece on the towing vehicle can be fixed from two ends, so that the workpiece is ensured to be stable all the time in the heating process, and the workpiece can be driven to rotate. In the heating process, the workpiece can be heated more uniformly by rotating, the heating effect and the product quality are improved, the setting of the towing vehicle can realize automatic workpiece loading and unloading, the labor intensity of workers is reduced, and the working efficiency is improved. Drawings FIG. 1 is a diagram showing the open state of a front door and a furnace body according to the present utility model; FIG. 2 is a view showing a structure of a front door body and a furnace body in a sealed state. The reference numerals are expressed as: 1. A furnace body; 2, a rear door body, 3, a towing vehicle, 4, a front door body, 5, a first pressure head, 6, a first driving piece, 7, a second pressure head, 8, a second driving piece, 9, a third driving piece,