CN-224230656-U - Process furnace and process equipment

CN224230656UCN 224230656 UCN224230656 UCN 224230656UCN-224230656-U

Abstract

The disclosure relates to the technical field of semiconductors and photovoltaics, in particular to a process furnace and process equipment, and solves the problem that the productivity cannot be further improved due to low annealing efficiency in the related art. The process furnace and the process equipment comprise a furnace body and a plurality of groups of air inlet assemblies, wherein the process chamber of the furnace body comprises a plurality of subchambers which are arranged along a first direction, each subchamber is configured to accommodate a bearing assembly, the air inlet assemblies are oppositely arranged at two sides of each subchamber in the first direction, each air inlet assembly is communicated with a first air inlet, the air inlet assemblies are provided with a plurality of air outlet holes which are communicated with the first air inlet, the air outlet holes face the bearing assembly when the subchambers accommodate the bearing assemblies, and the air outlet holes are configured to enable air entering from the first air inlet to diffuse towards a sheet. The process furnace and the process equipment provided by the disclosure can meet the requirement of annealing uniformity and annealing efficiency of annealing more sheets simultaneously, and further improve the annealing productivity.

Inventors

WANG GUOJIN
LI MING
LI LIANGSHENG

Assignees

拉普拉斯(西安)科技有限责任公司

Dates

Publication Date: 20260512
Application Date: 20250516

Claims (10)

1. A process furnace configured to process sheets of material, a plurality of said sheets of material being carried by carriers, each of one or more of said carriers being a carrier assembly, said process furnace comprising: A furnace having at least one process chamber provided with at least one first gas inlet, the process chamber comprising a plurality of sub-chambers arranged along a first direction, each of the sub-chambers being configured to house one of the carrier assemblies with the direction of extension of the sheet carried in the housed carrier assembly being parallel to the first direction, and The multi-group air inlet assembly is oppositely arranged at two sides of each subchamber in the first direction, each air inlet assembly is communicated with the first air inlet, the air inlet assembly is provided with a plurality of air outlet holes communicated with the first air inlet, under the condition that the subchamber is accommodated with the bearing assembly, the air outlet holes face the bearing assembly, and the air outlet holes are configured to enable air entering from the first air inlet to diffuse towards the sheet.
2. The process furnace of claim 1, wherein the air intake assembly comprises: The two groups of first air inlet assemblies are oppositely arranged on two side walls of the process chamber in the first direction, the first air inlet assemblies are communicated with the first air inlet, and a plurality of air outlet holes are distributed on one side, facing the process chamber, of the first air inlet assemblies in the first direction; The second air inlet assembly is arranged between the two groups of first air inlet assemblies in the first direction, the second air inlet assembly is configured to divide the process chamber into a plurality of subchambers which are communicated with each other, the second air inlet assembly is communicated with the first air inlet, and the second air inlet assembly is respectively distributed with a plurality of air outlet holes on two opposite sides of the first direction.
3. The process furnace of claim 2, wherein the number of first inlets is plural, the plurality of first inlets includes a plurality of first sub-inlets and a plurality of second sub-inlets, the first sub-inlets are disposed on both side walls of the process chamber in the first direction, the second sub-inlets are disposed on a top wall of the process chamber, The first air intake assembly includes: The first uniform flow piece is arranged on two side walls of the process chamber in the first direction and is provided with a first uniform flow chamber communicated with the first sub-air inlet, and the first uniform flow piece is provided with the air outlet communicated with the first uniform flow chamber at one side away from the first sub-air inlet; The first air homogenizing pipe group is provided with a first air inlet pipe orifice and a plurality of first air outlet pipe orifices, the first air inlet pipe orifice is communicated with the first sub-air inlet, at least part of the first air homogenizing pipe group stretches into the first uniform flow chamber so that the plurality of first air outlet pipe orifices are distributed in the first uniform flow chamber, and/or, The second air intake assembly includes: The second uniform flow piece is arranged on the top wall of the process chamber and extends towards the bottom wall of the process chamber, the second uniform flow piece is positioned between the two groups of first air inlet assemblies in the first direction, the second uniform flow piece is provided with a second uniform flow chamber communicated with the second sub-air inlets, and the second uniform flow piece is provided with the air outlet holes communicated with the second uniform flow chamber on two sides of the first direction; The second air homogenizing pipe group is provided with a second air inlet pipe orifice and a plurality of second air outlet pipe orifices, the second air inlet pipe orifices are communicated with the second sub-air inlets, and at least part of the second air homogenizing pipe group stretches into the second uniform flow chamber so that the plurality of second air outlet pipe orifices are distributed in the second uniform flow chamber.
4. The process furnace according to claim 3, wherein the process chamber is provided with first air outlets on both side walls in the first direction, the first air outlet on each side wall is arranged on one side of the first sub-air inlet in the second direction, the first direction is perpendicular to the second direction, and the second flow homogenizing member is in orthographic projection of the first direction to the side wall of the process chamber, the first air outlet and the second flow homogenizing member are not overlapped, and in the case that the first air inlet assembly comprises the first flow homogenizing member and the second air inlet assembly comprises the second flow homogenizing member, The first uniform flow member includes: a first uniform flow box having a first opening; The first uniform flow plate is covered on the first opening to form the first uniform flow chamber in a surrounding mode, and the plurality of air outlet holes are distributed on the first uniform flow plate; The second uniform flow member includes: the second uniform flow box is provided with second openings at two opposite sides of the first direction respectively; Two second uniform flow plates respectively covered on the second openings to form the second uniform flow chamber, and a plurality of air outlet holes are distributed on the second uniform flow plates; In the orthographic projection of the first flow homogenizing element and the second flow homogenizing element to the bottom wall of the process chamber in the vertical direction, the two first flow homogenizing plates incline at a first included angle respectively relative to the second direction, the incline directions of the two first flow homogenizing plates are opposite, the two second flow homogenizing plates of each second flow homogenizing box incline at a second included angle respectively relative to the second direction, the incline directions of the two second flow homogenizing plates are opposite, and the incline directions of the first flow homogenizing plates and the second flow homogenizing plates which are positioned in the same subchamber are opposite relative to the second direction, so that the gas led out from the gas outlet hole diffuses towards the first gas outlet.
5. The process furnace according to claim 4, wherein the furnace is a furnace, The first included angle is the same as the second included angle, and/or, The first uniform flow plate is rotatably connected with the first uniform flow box, the first included angle is adjustable, and/or, The second uniform flow plate is rotatably connected with the second uniform flow box, the second included angle is adjustable, and/or, The first included angle is less than or equal to 5 degrees, and/or, The second included angle is less than or equal to 5 degrees.
6. A process furnace according to claim 3, wherein, The first air intake assembly further includes: A first heating element arranged in the first uniform flow chamber and configured to heat the gas before being led out from the gas outlet hole, and/or, The second air intake assembly further includes: and the second heating piece is arranged in the second uniform flow chamber and is configured to heat the gas before being led out from the gas outlet hole.
7. The process furnace of claim 4, further comprising: The third uniform flow piece is arranged on two side walls of the process chamber in the first direction, the third uniform flow piece is arranged on one side of the first uniform flow piece in the second direction, the third uniform flow piece is communicated with the first air outlet, the third uniform flow piece is provided with a third uniform flow chamber communicated with the first air outlet, one side of the third uniform flow piece, which is away from the first air outlet, is provided with a plurality of air inlets communicated with the third uniform flow chamber, and the air inlets are configured to guide the air of each subchamber into the third uniform flow chamber from the air inlets.
8. The process furnace of any one of claims 1 to 7, further comprising: A conveying assembly arranged on the furnace body, wherein the conveying assembly is configured to bear a plurality of groups of bearing assemblies which are arranged at intervals along the first direction, and move the bearing assemblies along a second direction so as to simultaneously input or output a plurality of subchambers, the first direction and the second direction are intersected, and/or, And a heating assembly disposed at a top wall and/or a bottom wall of each of the sub-chambers, the heating assembly configured to heat the corresponding sub-chamber.
9. The process furnace of claim 8, wherein, where the process furnace includes the transport assembly, the furnace body further comprises: A first buffer chamber disposed on one side of the process chamber along the second direction, the first buffer chamber configured to accommodate a plurality of groups of the carrier assemblies arranged at intervals along the first direction, the first buffer chamber being provided with a second air inlet configured to allow air to enter the first buffer chamber; A first flap valve assembly disposed between the first buffer chamber and the process chamber, the first flap valve assembly being configured to connect or disconnect the first buffer chamber and the process chamber, the transport assembly being configured to transport multiple sets of the carrier assemblies to the process chamber in the second direction with the first flap valve assembly connecting the first buffer chamber and the process chamber, and/or, A second buffer chamber disposed on the other side of the process chamber along the second direction, the second buffer chamber configured to accommodate a plurality of groups of the carrier assemblies arranged at intervals along the first direction, the second buffer chamber being provided with a third air inlet configured to allow air to enter the second buffer chamber; A second flap valve assembly disposed between the second buffer chamber and the process chamber, the second flap valve assembly configured to connect or disconnect the second buffer chamber and the process chamber, the transport assembly configured to transport multiple sets of the carrier assemblies of the process chamber to the second buffer chamber with the second flap valve assembly connecting the second buffer chamber and the process chamber.
10. A process apparatus, comprising: The process furnace of any one of claims 1-9, configured to process sheets carried on multiple sets of carrier assemblies; The loading and unloading assembly is arranged on at least one side of the process furnace and is configured to load the bearing assembly to the process furnace or unload the bearing assembly from the process furnace.

Description

Process furnace and process equipment Technical Field The present disclosure relates to the field of semiconductor and photovoltaic technologies, and in particular, to a process furnace and process equipment. Background Photovoltaic power generation technology is one of the important renewable energy technologies. Compared with the traditional energy, the solar power generation cost is still high at present, and the development and application of the solar power generation system are severely restricted. For this reason, the industry and scientific community have been working on improving the photoelectric conversion efficiency of solar cells and reducing the manufacturing cost of solar cells. In order to improve the photoelectric conversion efficiency of the battery, process equipment is needed to process the battery piece, and taking annealing treatment as an example, a traditional annealing furnace adopts a flow line mode to anneal single sheets in sequence, and if the productivity is increased, the length of the flow line needs to be lengthened, so that the occupied area is increased. If the annealing furnace is used for annealing a plurality of sheets at the same time, the time required for forming uniform and stable geothermal fields in the chamber is long, the annealing efficiency is reduced, and the productivity cannot be effectively improved. Disclosure of utility model In view of the above, the embodiments of the present disclosure provide a process furnace and a process apparatus, so as to solve the problem that the productivity cannot be further improved due to the low annealing efficiency in the related art. In a first aspect, an embodiment of the present disclosure provides an annealing furnace configured to process sheets, a plurality of sheets being carried by carriers, each of the one or more carriers serving as a carrier, the process furnace including a furnace body having at least one process chamber provided with at least one first gas inlet, the process chamber including a plurality of subchambers arranged along a first direction, each subchamber being configured to house a carrier, and an extension direction of a sheet carried in the housed carrier being parallel to the first direction, and a plurality of sets of gas inlet assemblies disposed opposite each subchamber on both sides of the first direction, each gas inlet assembly being in communication with the first gas inlet, the gas inlet assemblies being provided with a plurality of gas outlet holes in communication with the first gas inlet, the gas outlet holes being oriented towards the carrier with the subchambers housing the carrier, the plurality of gas outlet holes being configured to diffuse gas entering from the first gas inlet towards the sheets. In some embodiments, the air inlet assembly comprises two groups of first air inlet assemblies which are oppositely arranged on two side walls of the process chamber in a first direction, the first air inlet assemblies are communicated with the first air inlets, the first air inlet assemblies are distributed with a plurality of air outlet holes on one side of the first air inlet assemblies facing the process chamber in the first direction, at least one group of second air inlet assemblies are arranged between the two groups of first air inlet assemblies in the first direction, the second air inlet assemblies are configured to divide the process chamber into a plurality of subchambers which are communicated with each other, the second air inlet assemblies are communicated with the first air inlets, and the second air inlet assemblies are respectively distributed with a plurality of air outlet holes on two sides of the second air inlet assemblies opposite to the first direction. In some embodiments, the first air inlets are multiple, the first air inlets comprise a plurality of first sub-air inlets and a plurality of second sub-air inlets, the first sub-air inlets are arranged on two side walls of the process chamber in a first direction, the second sub-air inlets are arranged on the top wall of the process chamber, the first air inlet assembly comprises a first uniform flow piece which is arranged on two side walls of the process chamber in the first direction, the first uniform flow piece is provided with a first uniform flow chamber communicated with the first sub-air inlets, the first uniform flow piece is provided with air outlet holes communicated with the first uniform flow chamber on one side away from the first sub-air inlets, the first uniform flow pipe group is provided with a first air inlet pipe opening and a plurality of first air outlet pipe openings, the first air inlet pipe opening is communicated with the first sub-air inlets, at least part of the first uniform flow pipe group extends into the first uniform flow chamber so that the plurality of first air outlet pipe openings are distributed in the first uniform flow chamber, and/or the second air inlet assembly compr