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CN-224230927-U - Process chamber measuring assembly

CN224230927UCN 224230927 UCN224230927 UCN 224230927UCN-224230927-U

Abstract

The utility model discloses a process chamber measuring assembly, which relates to the technical field of measuring assemblies and comprises a base, wherein a cross is arranged at the middle position of the top end of the base, four sliding rail assemblies are arranged at the edge of the top end of the cross, supporting rods are arranged at the top ends of the four sliding rail assemblies, sliding frames are arranged at one sides of the four supporting rods towards the center position of the cross in a sliding manner, upright posts are arranged at the opposite ends of the four sliding frames, a plurality of first hinge frames are vertically arranged on the outer surfaces of the upright posts, a plurality of second hinge frames are arranged on the outer surfaces of the upright posts inside the first hinge frames, and flexible idler wheels are rotatably connected at one ends of the first hinge frames and the second hinge frames. According to the utility model, a series of structures are arranged, so that the process chamber measuring assembly can position chambers with different shapes, and when the opposite chamber is detected, the manual auxiliary positioning of an operator is not needed, so that the application range of the process chamber measuring assembly is improved.

Inventors

  • GU XINYOU

Assignees

  • 苏州钰达成半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20250627

Claims (6)

  1. 1. The process chamber measurement assembly comprises a base (1) and is characterized in that a cross (12) is arranged at the middle position of the top end of the base (1), four sliding rail assemblies (7) are arranged at the edge of the top end of the cross (12), supporting rods (11) are arranged at the top ends of the sliding rail assemblies (7), sliding brackets (9) are arranged at one side of each supporting rod (11) towards the center position of the cross (12) in a sliding mode, upright posts (16) are arranged at the opposite ends of each sliding bracket (9), a plurality of first hinge brackets (17) are vertically arranged on the outer surface of each upright post (16), a plurality of second hinge brackets (18) are arranged on the outer surface of each upright post (16) in each first hinge bracket (17) and one end of each second hinge bracket (18) in a rotating mode, a carrying platform (3) is detachably arranged at the upper position of the base (1), an electric driving rod (4) is arranged at the top end of each carrying platform (3), a plurality of first hinge brackets (18) are vertically arranged on the outer surface of each upright post (16), a plurality of second hinge brackets (18) are arranged on the outer surface of each electric driving rod (4), and a push rod (5) is arranged at the bottom of each electric driving rod (5).
  2. 2. The process chamber measurement assembly of claim 1, wherein four screws (8) are rotatably connected to the four corners of the top end of the base (1), positioning columns (2) are detachably mounted on the top ends of the four screws (8), and the four positioning columns (2) are respectively mounted on the four corners of the bottom end of the carrying platform (3).
  3. 3. The process chamber measurement assembly according to claim 1, wherein a telescopic rod (14) is hinged between one side of each group of the first hinge frame (17) and the second hinge frame (18) and the sliding frame (9), and a spring (13) is arranged on the outer surface of the telescopic rod (14).
  4. 4. The process chamber measurement assembly of claim 1, wherein the top end of the electric push rod (5) is provided with a bracket (6), the bottom end of the bracket (6) is arranged at the top end of the upper frame (4), and the output end of the electric push rod (5) extends out of the bottom end of the upper frame (4).
  5. 5. The process chamber measurement assembly according to claim 1, wherein a rubber pad (20) is provided at a top intermediate position of the carrier (3).
  6. 6. The process chamber measurement assembly according to claim 1, wherein screw rods (10) are mounted inside the four support rods (11), and the outer surfaces of the screw rods (10) are connected with the sliding frame (9) through sliding blocks.

Description

Process chamber measuring assembly Technical Field The utility model relates to the technical field of measuring components, in particular to a process chamber measuring component. Background The process chamber measurement assembly refers to a device or system for monitoring, calibrating or controlling key parameters in a process chamber, and has the core function of ensuring the stability and the precision of a process, and is particularly important in the precision industrial fields of semiconductor manufacturing, vacuum coating and the like Most of the existing process chamber measuring components are fixed in the chamber to be measured through the rigid clamp, the cavity with regular shape can be fixed inside the measuring components in the fixing mode, the opposite cavity cannot be effectively fixed, sometimes, an operator is required to carry out auxiliary positioning by hand, the cavity can shake in the detecting process, and then the detecting precision is affected. Disclosure of utility model The present utility model is directed to a process chamber measurement assembly that solves the above-mentioned problems. In order to achieve the purpose, the technical scheme is that the process chamber measuring assembly comprises a base, a cross is arranged at the middle position of the top end of the base, four sliding rail assemblies are arranged at the edge of the top end of the cross, supporting rods are arranged at the top ends of the four sliding rail assemblies, sliding frames are arranged at one sides of the four supporting rods towards the center position of the cross in a sliding mode, upright posts are arranged at the opposite ends of the four sliding frames, a plurality of first hinge frames are vertically arranged on the outer surfaces of the upright posts, a plurality of second hinge frames are arranged on the outer surfaces of the upright posts inside the first hinge frames, flexible idler wheels are rotatably connected to one ends of the first hinge frames and the second hinge frames, a carrying platform is detachably arranged at the upper position of the base, an upper frame is arranged at the top of the carrying platform, an electric push rod is arranged at the top of the upper frame, the bottom of the electric push rod penetrates through the upper frame, and a line laser displacement sensor is arranged at the bottom of the electric push rod. Preferably, the top four corners position department of base rotates and is connected with four screws, four the equal detachable mounting in top of screw has the reference column, four the reference column is installed respectively in the bottom four corners position department of microscope carrier, and the bottom of reference column is provided with the screw with screw assorted, and the reference column uses with the screw cooperation, can fix the microscope carrier, convenient to detach overhauls. Preferably, each group of the first hinge frame and the second hinge frame are hinged with the sliding frame respectively, a telescopic rod is mounted on one side of the first hinge frame and one side of the second hinge frame, a spring is mounted on the outer surface of the telescopic rod, when the supporting rod moves to the middle position of the cross frame to detect a cavity to be detected, the flexible roller contacts with the outer surface of the cavity, the first hinge frame and the second hinge frame rotate, the telescopic rod stretches out and draws back, and the spring applies pressure to position the cavity. Preferably, the support is installed on the top of electric putter, the top at last frame is installed to the bottom of support, electric putter's output extends the bottom of going up the frame, and the support supports electric putter, and drive line laser displacement sensor carries out vertical linear motion when electric putter moves. Preferably, a rubber pad is arranged at the middle position of the top end of the carrying platform, if an opening is arranged at the bottom of the cavity to be detected, the bottom of the cavity can be contacted with the rubber pad, the rubber pad is deformed by the downward pressure, the bottom of the cavity is sealed, and the detection is convenient. Preferably, the four stay bars are internally provided with screw rods, the outer surfaces of the screw rods are connected with the sliding frame through sliding blocks, and the sliding frame is driven to vertically linearly move by the sliding blocks during the running of the screw rods. Compared with the prior art, the utility model has the beneficial effects that: This technology cavity measurement subassembly, through four vaulting poles, four vaulting poles all can carry out linear motion, one side of four vaulting poles all is provided with the carriage that can vertical linear motion, one side of carriage is provided with first hinge frame and second hinge frame through the stand, when carrying out the cavity measurement, through moving the posi