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CN-224230940-U - High-precision silicon carbide crystal automatic measuring device

CN224230940UCN 224230940 UCN224230940 UCN 224230940UCN-224230940-U

Abstract

The utility model provides a high-precision silicon carbide crystal automatic measuring device, which relates to the technical field of semiconductor material detection and comprises a fixed base, a singlechip, an X-axis driving mechanism and a full-automatic measuring flow, wherein the singlechip is fixedly arranged on the front surface of the fixed base, a grating ruler terminal and a weighing instrument are sequentially and fixedly arranged on the side surface of the singlechip from top to bottom, the X-axis driving mechanism is arranged above the fixed base, a laser range finder is fixedly arranged at a driving connection part of the X-axis driving mechanism and is used for driving the laser range finder to move and regulate in the X-axis direction, a grating ruler body is arranged on the X, Y-axis driving mechanism and is combined with a stepping motor screw transmission system to form closed-loop control, high-precision three-dimensional coordinate positioning is realized, the problem of large positioning error of traditional equipment is solved, the laser range finder is cooperated with a weighing sensor, multi-parameter synchronous measurement is realized, submicron-level requirements are met, and manual intervention is reduced by combining with the calibration guide of a crystal positioning plate.

Inventors

  • ZHANG DONG
  • LI WENYONG
  • CHEN RONGKUN
  • Tian Mingwen

Assignees

  • 河北天达晶阳半导体技术股份有限公司

Dates

Publication Date
20260512
Application Date
20250611

Claims (7)

  1. 1. An automatic measuring device for high-precision silicon carbide crystals, which is characterized by comprising: a fixed base (10); the singlechip (70) is fixedly arranged on the front surface of the fixed base (10), and a grating ruler terminal and a weighing instrument (80) are sequentially and fixedly arranged on the side surface of the singlechip from top to bottom; the X-axis driving mechanism (30) is arranged above the fixed base (10), and a laser range finder (90) is fixedly arranged at the driving connection part of the X-axis driving mechanism and is used for driving the laser range finder (90) to move and adjust in the X-axis direction; The Y-axis driving mechanism (20) is fixedly arranged on two sides of the top of the fixed base (10) and comprises a driving part and a sliding supporting part, wherein the driving part and the sliding supporting part are used for installing the X-axis driving mechanism (30) and driving the X-axis driving mechanism (30) to move and adjust in the Y-axis direction; The grating ruler body (40) is arranged at the Y-axis driving mechanism (20) and the X-axis driving mechanism (30) and is used for reading the moving data of the Y-axis driving mechanism (20) and the X-axis driving mechanism (30) and transmitting the data to the singlechip (70) in real time; The weighing sensor (50) is arranged at the center of the top of the fixed base (10), the crystal positioning plate (60) is fixedly arranged at the top, the crystal positioning plate (60) is used for positioning silicon crystals, the weighing sensor (50) is used for weighing the silicon crystals at the crystal positioning plate (60), data are displayed on the weighing instrument (80) in real time, and weight data are transmitted to the singlechip (70) in real time.
  2. 2. A high-precision silicon carbide crystal automatic measuring device according to claim 1, characterized in that the driving part comprises: The first mounting seat (201) is fixedly arranged on the left side of the top of the fixed base (10), a containing cavity is formed in the first mounting seat, and an opening of the containing cavity is upward; The first screw rod (202) is arranged in the accommodating cavity of the first mounting seat (201); The first stepping motor (204) is arranged on the front surface of the first mounting seat (201), and the output end of the first stepping motor is connected with the first screw rod (202) and is used for driving the first screw rod (202) to rotate; The first sliding block (203) is arranged at the first screw rod (202) and is in threaded connection with the first screw rod (202), so that movement adjustment is realized.
  3. 3. A high-precision silicon carbide crystal automatic measuring device according to claim 2, the sliding support portion is characterized by comprising: the second mounting seat (205) is fixedly arranged on the right side of the top of the fixed base (10), and the structural shape of the second mounting seat is identical to that of the first mounting seat (201); a linear optical axis (206) fixedly arranged in the second mounting seat (205); The second sliding block (207) is arranged on the linear optical axis (206) and is in sliding connection with the linear optical axis (206), so that movement adjustment is realized.
  4. 4. A high precision silicon carbide crystal automatic measurement device according to claim 3, wherein said X-axis drive mechanism (30) comprises: The bottom of the portal (301) is fixedly connected with the first sliding block (203) and the second sliding block (207) respectively, a placing cavity is formed in the portal, and an opening of the placing cavity is downward; the second screw rod (302) is arranged in the placing cavity of the portal frame (301); The third sliding block (303) is arranged at the second screw rod (302) and is in threaded connection with the second screw rod (302), and the bottom of the third sliding block is fixedly connected with the laser range finder (90); The second stepping motor (304) is arranged on the right side wall of the portal frame (301), and the output end of the second stepping motor is connected with the second screw rod (302) so as to drive the second screw rod (302) to rotate.
  5. 5. The high-precision silicon carbide crystal automatic measurement device according to claim 4, wherein the crystal positioning plate (60) is cylindrical in shape, scales with positive and negative differences in two directions of an XY axis are arranged at the top of the crystal positioning plate, and a positioning zero point is arranged at the circle center of the top of the crystal positioning plate (60) at the junction of the scales in the two directions; When the silicon crystal is required to be measured, the silicon crystal is placed at the zero point of the crystal positioning plate (60), and when the scales on the left side and the right side of the edge of the silicon crystal are the same and the scales on the upper side and the lower side are the same, the silicon crystal is placed at the center of the crystal positioning plate (60).
  6. 6. The automatic measuring device for silicon carbide crystals with high precision according to claim 5, wherein the laser range finder (90) can move to the zero point of the positioning plate according to the selected crystal size, then move to the left by +5mm of the radius of the crystal, zero the position parameter, and measure the heights of the crystals at different positions and the distance from the edge or the center point according to a preset path.
  7. 7. The high-precision silicon carbide crystal automatic measurement device as set forth in claim 6, wherein the single-chip microcomputer (70) further includes: The device comprises a display screen and operation buttons, wherein the display screen and the operation buttons are used for man-machine interaction; And the data transmission module is used for transmitting the measured data to the server or the external storage device through the WIFI or the USB flash disk.

Description

High-precision silicon carbide crystal automatic measuring device Technical Field The utility model relates to the technical field of semiconductor material detection, in particular to a high-precision silicon carbide crystal automatic measuring device. Background The weight, size and surface shape of silicon carbide crystals are important parameters that characterize the quality of crystal growth. The existing crystal body parameter measuring method needs to place the crystal on a thickness meter platform, measure the thickness of a specified point to calculate the characteristic parameters of the crystal, then transfer the crystal to an electronic scale to measure the weight of the crystal, finally judge the grade of the crystal according to the body parameters of the crystal, and accordingly formulate the growth process of the next furnace. The measurement process completely depends on manual operation, and larger system errors and human errors exist to influence the accuracy of the measurement result. Meanwhile, the crystal needs to be transferred and rotated for multiple times in the measuring process, and the risk of damage of the crystal exists. Therefore, we propose a high-precision silicon carbide crystal automatic measuring device. Disclosure of utility model The utility model aims to solve the problems that the measurement process in the prior art depends on manual operation, systematic errors and human errors are easy to generate, and crystal damage is easy to be caused by repeated transfer and rotation of crystals. In order to achieve the above purpose, the present utility model adopts the following technical scheme: The high-precision silicon carbide crystal automatic measuring device comprises a fixed base, a singlechip, a measuring instrument and a measuring instrument, wherein the singlechip is fixedly arranged on the front surface of the fixed base, and a grating ruler terminal and the measuring instrument are sequentially and fixedly arranged on the side surface of the singlechip from top to bottom; the X-axis driving mechanism is arranged above the fixed base, and a laser range finder is fixedly arranged at the driving connection part of the X-axis driving mechanism and used for driving the laser range finder to move and adjust in the X-axis direction; The Y-axis driving mechanism is fixedly arranged on two sides of the top of the fixed base and comprises a driving part and a sliding supporting part, wherein the driving part and the sliding supporting part are used for installing the X-axis driving mechanism and driving the X-axis driving mechanism to move and adjust in the Y-axis direction; The optical grating ruler comprises a grating ruler body, a weighing sensor, a crystal positioning plate and a weighing instrument, wherein the grating ruler body is arranged at the positions of a Y-axis driving mechanism and an X-axis driving mechanism and used for reading moving data of the Y-axis driving mechanism and the X-axis driving mechanism and transmitting the data to the singlechip in real time, the weighing sensor is arranged at the center of the top of a fixed base and is fixedly provided with the crystal positioning plate at the top, the crystal positioning plate is used for positioning silicon crystals, the weighing sensor is used for weighing the silicon crystals at the crystal positioning plate, and the data are displayed on the weighing instrument in real time and transmitted to the singlechip in real time. As a preferred embodiment of the present utility model, the driving unit includes: the first mounting seat is fixedly arranged on the left side of the top of the fixed base, a containing cavity is formed in the first mounting seat, and an opening of the containing cavity faces upwards; the first screw rod is arranged in the accommodating cavity of the first mounting seat; the first stepping motor is arranged on the front surface of the first mounting seat, and the output end of the first stepping motor is connected with the first screw rod and used for driving the first screw rod to rotate; The first sliding block is arranged at the first screw rod and is in threaded connection with the first screw rod, so that movable adjustment is realized. As a preferred embodiment of the present utility model, the sliding support portion includes: The second mounting seat is fixedly arranged on the right side of the top of the fixed base, and the structural shape of the second mounting seat is identical to that of the first mounting seat; The linear optical axis is fixedly arranged in the second mounting seat; And the second sliding block is arranged on the linear optical axis and is in sliding connection with the linear optical axis, so that movement adjustment is realized. As a preferred embodiment of the present utility model, the X-axis driving mechanism includes: The bottom of the portal is fixedly connected with the first sliding block and the second sliding block respectively, a placin