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CN-224231016-U - Weight and appearance detection device

CN224231016UCN 224231016 UCN224231016 UCN 224231016UCN-224231016-U

Abstract

The utility model discloses a weight and appearance detection device which comprises a detection vertical frame, a first detection platform, a second detection platform, a wafer rotating module and a wafer rotating module, wherein the first detection platform and the second detection platform are vertically spaced, the first detection platform comprises at least one placement table, a light source and a vision camera which are arranged above the placement table, the second detection platform comprises at least one weighing unit and a sealing cover which is arranged above the weighing unit, the detection vertical frame is provided with a sealing lifting assembly connected with the sealing cover, the wafer rotating module comprises an adsorption assembly used for holding and transferring wafers, a rotating assembly connected with the adsorption assembly, the wafer lifting assembly actuates the rotating assembly to move relative to the first detection platform and the second detection platform, and the wafer translation assembly actuates the rotating assembly to enter or move away from the detection vertical frame, and the front and back sides of the rotating assembly move the wafers to be attached to the placement table.

Inventors

  • FAN YI
  • ZHU XIN
  • JIANG MENG
  • YANG RUI
  • ZHU DONGWEI

Assignees

  • 航工智能科技集团有限公司

Dates

Publication Date
20260512
Application Date
20250614

Claims (10)

  1. 1. A weight, topography detection device, comprising: The detection device comprises a detection stand (1), wherein a first detection platform (2) and a second detection platform (3) which are vertically spaced are arranged on the detection stand (1); A first detection platform (2) comprising at least one placement table (2.1), and a light source (2.2) and a vision camera (2.3) arranged above the placement table (2.1); The second detection platform (3) comprises at least one weighing unit (3.1) and a sealing cover (3.2) arranged above the weighing unit (3.1), and the detection vertical frame (1) is provided with a sealing lifting assembly (4) connected with the sealing cover (3.2); The wafer rotating module (5) comprises an adsorption component (5.1) for holding and transferring wafers, a rotating component (5.2) connected to the adsorption component (5.1), a wafer lifting component (5.3) for actuating the rotating component (5.2) to move relative to the first detection platform (2) and the second detection platform (3), and a wafer translation component (5.4) for actuating the rotating component (5.2) to enter or leave the detection stand (1), wherein the front and the back of the rotating component (5.2) transfer wafers are attached to the placing table (2.1).
  2. 2. The weight and appearance detection device according to claim 1, wherein the detection stand (1) is further provided with a static electricity eliminating module (6), and the static electricity eliminating module (6) extends along the arrangement direction of the placement table (2.1) and is arranged towards the first detection platform (2) in an adjustable manner.
  3. 3. A weight and shape detection device according to claim 1, characterized in that the detection stand (1) comprises a first frame (1.1) arranged above the first detection platform (2) and an adjusting frame (6.1) arranged on the first frame (1.1), the adjusting frame (6.1) comprises a rotating hole (6.11) matched with the first frame (1.1), and an arc-shaped channel (6.12) is concentrically arranged with the rotating hole (6.11), and one end, far away from the first frame (1.1), of the adjusting frame (6.1) is fixedly connected to the static electricity eliminating module (6).
  4. 4. The weight and appearance detection device according to claim 1, wherein the number of the placement tables (2.1) is multiple, a translation assembly (7) and a translation frame (7.1) arranged on an action end of the translation assembly (7) are arranged above the first detection table (2), the translation assembly (7) is arranged in the arrangement direction of the placement tables (2.1), and the light source (2.2) and the vision camera (2.3) are both arranged on the translation frame (7.1).
  5. 5. The weight and appearance detection device according to claim 4, wherein the translation frame (7.1) comprises a support frame (7.2), a first visual mounting block (7.3) and a second visual mounting block (7.4) which are connected with the support frame (7.2) and the visual camera (2.3), and a light source (2.2) mounting block which is connected with the support frame (7.2) and the light source (2.2), a horizontal adjusting groove (7.31) is arranged between the first visual mounting block (7.3) and the second visual mounting block (7.4), a first vertical adjusting groove (7.21) is arranged between the first visual mounting block (7.3) and the support frame (7.2), and a second vertical adjusting groove (7.22) is arranged between the light source (2.2) mounting block and the support frame (7.2).
  6. 6. The weight and appearance detection device according to claim 1, wherein a sealing frame (3.3) is arranged above the weighing unit (3.1), a through groove (3.31) for extending out of a weighing part of the weighing unit (3.1) is formed in the sealing frame (3.3), a sealing plate (3.4) is arranged on the periphery of the through groove (3.31), and the sealing cover (3.2) is abutted to the sealing frame (3.3).
  7. 7. The device for detecting the weight and the appearance of the wafer according to claim 1, wherein the wafer rotating module (5) further comprises an adjusting seat (5.5) for connecting the adsorption component (5.1) and the rotating component (5.2), the rotating component (5.2) comprises a gear (5.21) and a rack (5.22) which are arranged on the adjusting seat (5.5), and a linear actuating module (5.23) for actuating the rack (5.22) to linearly reciprocate, and the gear (5.21) is fixedly connected with the adsorption component (5.1) in an axial direction.
  8. 8. The weight and appearance detection device according to claim 1, wherein the suction assembly (5.1) comprises a rotary mounting block (5.11) fixedly connected with the rotary assembly (5.2) and a suction claw (5.12) arranged on the rotary mounting block (5.11), the rotary mounting block (5.11) is further provided with a negative pressure block (5.13) for fixing the suction claw (5.12) on the rotary mounting block (5.11), the negative pressure block (5.13) is connected with a negative pressure assembly, the suction claw (5.12) is provided with a suction area communicated with the negative pressure assembly, and the suction area is matched with the outline of a wafer.
  9. 9. A weight and shape detection device according to claim 1, wherein a sorting storage rack (8) and a wafer carrying module (9) moving between the sorting storage rack (8) and the detecting vertical rack (1) are further arranged on one side of the detecting vertical rack (1), the wafer carrying module (9) comprises a three-axis transfer assembly and an adsorption assembly (5.1) arranged on the three-axis transfer assembly, and the wafer carrying module (9) transfers wafers to the first detecting platform (2) or the second detecting platform (3) and transfers detected wafers to the sorting storage rack (8).
  10. 10. A weight, morphology detection device according to claim 1, characterized in that the light source (2.2) is arranged as a parallel shadowless light source (2.2) and is arranged covering the first detection platform (2).

Description

Weight and appearance detection device Technical Field The utility model relates to the technical field of wafer detection equipment, in particular to a weight and appearance detection device. Background The wafer is used as a core base material for manufacturing semiconductors, and is generally manufactured by cutting, grinding, polishing and other processes of high-purity monocrystalline silicon, in the precise manufacturing process, the weight change and the surface morphology feature of the wafer are key process indexes, namely weighing operation can monitor the material increment and decrement of a film deposition or etching process in real time, and morphology detection is used for identifying defects such as surface particle pollution, scratches, warpage and the like. In the prior art, generally in the production manufacturing line of wafer, set up independent weighing station and appearance detection station respectively, the weighing unit needs to dispose high accuracy balance module, and appearance detection then needs independent optical scanning mechanism or laser profiler, and two sets of equipment are listed as in the different positions of production line, lead to clean room space occupancy to increase to, because the circulation stroke between weighing station and the appearance detection station is longer, in wafer transportation process, increased the risk that the wafer surface glues and covers the dust. Disclosure of utility model Aiming at the defects existing in the prior art, the utility model aims to provide a weight and appearance detection device. The technical aim of the utility model is realized by the following technical scheme that the weight and shape detection device comprises: The detection stand is provided with a first detection platform and a second detection platform which are vertically spaced; the first detection platform comprises at least one placement table, and a light source and a vision camera which are arranged above the placement table; the second detection platform comprises at least one weighing unit and a sealing cover arranged above the weighing unit, and a sealing lifting assembly connected to the sealing cover is arranged on the detection vertical frame; The wafer rotating module comprises an adsorption component used for holding and transferring wafers, a rotating component connected to the adsorption component, a wafer lifting component used for actuating the rotating component to move relative to the first detection platform and the second detection platform, and a wafer translation component used for actuating the rotating component to enter or leave the detection stand, wherein the front and back sides of the wafer transferred by the rotating component are attached to the placing table. Further, the detection stand is further provided with a static electricity eliminating module, and the static electricity eliminating module extends relative to the arrangement direction of the placement table and is arranged towards the first detection platform in an adjustable mode. Further, detect the grudging post including setting up the first frame in first testing platform top to and set up the alignment jig on first frame, the alignment jig include with first frame complex change the hole, and with change the hole concentric arc channel that sets up, the alignment jig is kept away from the one end fixed connection of first frame and is got rid of on the module. Further, the quantity of placing the platform is a plurality of, first testing platform top is equipped with translation subassembly to and the translation frame of setting on the action end of translation subassembly, translation subassembly sets up about the direction of arrangement of placing the platform, light source and vision camera all set up on the translation frame. Further, the translation frame includes the support frame to and link up in the first vision installation piece and the second vision installation piece of support frame and vision camera, and link up in the light source installation piece of support frame and light source, be equipped with the horizontal adjustment groove between first vision installation piece and the second vision installation piece, be equipped with first vertical adjustment groove between first vision installation piece and the support frame, be equipped with the vertical adjustment groove of second between light source installation piece and the support frame. Further, the weighing unit top is equipped with the sealing frame, be equipped with the logical groove that is used for supplying weighing unit's weighing position to stretch out on the sealing frame, just logical groove week side is equipped with the closing plate, the sealed cowling butt is in the sealing frame. Further, the wafer rotating module further comprises an adjusting seat for connecting the adsorption assembly and the rotating assembly, the rotating assembly comprises a gear and a rack arran