CN-224231128-U - Capacitive three-dimensional force lattice sensor, electronic skin and robot

CN224231128UCN 224231128 UCN224231128 UCN 224231128UCN-224231128-U

Abstract

The utility model relates to a capacitive three-dimensional force lattice sensor, an electronic skin and a robot, which comprises a sensing unit, a switch array, a CDC and a digital processing circuit, wherein the sensing unit is provided with a flexible conducting layer, the conducting layer downwards forms a plurality of elastic curved surfaces which are arranged into a lattice, a first detection electrode, a second detection electrode, a third detection electrode and a fourth detection electrode are sequentially arranged below each elastic curved surface, the first detection electrodes which are in the same row in the lattice are mutually coupled into a row line, the third detection electrodes are mutually coupled into another row line, the second detection electrodes which are in the same column in the lattice are mutually coupled into a column line, the fourth detection electrodes are mutually coupled into another column line, the CDC is respectively coupled with each column line in a network through the switch array, each elastic curved surface is insulated from the corresponding detection electrode, the flexible conducting layer is deformed by external force to change the change of the density and the spatial distribution of substances of the elastic curved surfaces in a mutual capacitance electric field, and the digital processing circuit is coupled with the CDC.

Inventors

ZENG FANYOU
SUN TENGCHEN
ZHANG DAHUA

Assignees

北京他山科技有限公司

Dates

Publication Date: 20260512
Application Date: 20250609

Claims (12)

1. A capacitive three-dimensional force lattice sensor, characterized by: The capacitive digital conversion circuit comprises a sensing unit, a switch array, a capacitive digital conversion circuit and a digital processing circuit; The sensing unit is provided with at least one flexible conductive layer, the flexible conductive layer protrudes downwards to form a plurality of elastic curved surfaces, and each elastic curved surface is arranged to form a lattice meeting the requirement of spatial resolution; The first detection electrodes, the second detection electrodes, the third detection electrodes and the fourth detection electrodes which are sequentially arranged along the circumferential direction of the elastic curved surface are arranged below each elastic curved surface, the first detection electrodes in the same row in the lattice are mutually coupled to form one row line in a row-column staggered circuit topology network, the third detection electrodes are mutually coupled to form the other row line, the second detection electrodes in the same column in the lattice are mutually coupled to form one column line in the network, and the fourth detection electrodes are mutually coupled to form the other column line; The capacitance-to-digital conversion circuit is respectively coupled with each row line and each column line in the network through a switch array and is used for acquiring the plane mutual capacitance formed by every two detection electrodes on each point position; The elastic curved surfaces are insulated from the corresponding detection electrodes, the downward projection of the elastic curved surfaces at least covers part of the area of each corresponding detection electrode, and the flexible conductive layer is subjected to the change of external force deformation to change the density and the spatial distribution of substances in the mutual capacitance electric field between each pair of corresponding detection electrodes; and the digital processing circuit is coupled with the capacitance-to-digital conversion circuit.
2. The capacitive three-dimensional force lattice sensor of claim 1, wherein: The top surface of the flexible conductive layer is provided with a flexible insulating protective layer, and the bottom surface of the protective layer is provided with downward bulges at positions corresponding to each elastic curved surface; the flexible conductive layer is formed on the bottom surface of the protective layer in a conductive material coating mode, and the elastic curved surface is formed under the influence of the protruding shape.
3. The capacitive three-dimensional force lattice sensor according to claim 1 or 2, characterized in that the gaps between the respective elastic curved surfaces and the detection electrodes are filled with flexible insulating material.
4. The capacitive three-dimensional force lattice sensor of claim 1, wherein flexible conductive layers act as electric field perturbation electrodes.
5. The capacitive three-dimensional force lattice sensor of claim 4, wherein: the capacitance-to-digital conversion circuit is coupled with the flexible conducting layer through the switch array, the flexible conducting layer is used as a multiplexing electrode close to the detection electrode and the electric field disturbance electrode, and the switch array is used as a time-sharing gating channel of the flexible conducting layer coupled with the capacitance-to-digital conversion circuit or the ground.
6. The capacitive three-dimensional force lattice sensor of claim 5, wherein: The flexible conductive layers are at least two and insulated from each other; The flexible conductive layer serves as a self-capacitance electrode for detecting proximity and/or as a mutual capacitance electrode of two-by-two composition.
7. The capacitive three-dimensional force lattice sensor of claim 4, wherein the flexible conductive layer is coupled to ground through a gating switch.
8. The capacitive three-dimensional force lattice sensor of claim 1, wherein: The flexible conductive layer comprises a corresponding area, and each detection electrode is arranged inside one or more flexible conductive layers.
9. The capacitive three-dimensional force lattice sensor of claim 8, wherein: Each detection electrode is arranged on the top surface of the circuit board; the top surface of the circuit board is provided with wiring at the periphery of the dot matrix, and the outer edge of the flexible conductive layer is pressed and connected on the wiring to form electric coupling.
10. The capacitive three-dimensional force lattice sensor of claim 1, wherein the elastic curved surface is a spherical or ellipsoidal curved surface.
11. An electronic skin comprising a capacitive three-dimensional force lattice sensor according to any one of claims 1-10.
12. A robot comprising the electronic skin of claim 11.

Description

Capacitive three-dimensional force lattice sensor, electronic skin and robot Technical Field The utility model relates to machine touch, in particular to a capacitive three-dimensional force lattice sensor, electronic skin and a robot. Background With the rapid development of robotics, the haptic sensing capability has become a key to improving the level of intelligent interaction in the robotic environment. The traditional robot touch sensor is commonly based on modes such as piezoresistance, piezoelectricity, photoelectricity, parallel plate mutual capacitance and the like to realize force detection, I previously applied for CN119827015A patent, propose the touch sensor that utilizes plane mutual capacitance to carry out force detection, the plane mutual capacitance field that constructs through double helix electrode structure reaches high sensitivity, high accuracy's force detection, it forms high density multi-point measurement to cooperate row and column scanning circuit topology network to realize a small amount of CDC passageway, satisfy the touch space resolution requirement of robot electronic skin, but the scheme mainly surrounds the force detection of single dimension, can't catch the three-dimensional force (normal force and shearing force) distribution of contact surface, be difficult to satisfy precision operation (like flexible snatch) and complex environment perception's demand. Disclosure of utility model In order to overcome the defects in the prior art, a sensor for measuring a three-dimensional force lattice by using a planar mutual capacitance is provided. The capacitive three-dimensional force lattice sensor comprises a sensing unit, a switch array, a capacitance digital conversion circuit and a digital processing circuit, wherein the sensing unit is provided with at least one flexible conducting layer, the flexible conducting layer protrudes downwards to form a plurality of elastic curved surfaces, each elastic curved surface is arranged to form a lattice meeting the requirement of spatial resolution, a first detection electrode, a second detection electrode, a third detection electrode and a fourth detection electrode which are sequentially arranged along the circumferential direction of each elastic curved surface are arranged below each elastic curved surface, the first detection electrodes in the same row in the lattice are mutually coupled to form one row line in a row-column staggered circuit topology network, the third detection electrodes are mutually coupled to form the other row line, the second detection electrodes in the same column in the lattice are mutually coupled to form one column line in the network, the fourth detection electrodes are mutually coupled to form the other column line in the network, the capacitance digital conversion circuit is respectively coupled to each column line in the network through the switch array and used for obtaining planar mutual capacitance formed by two detection electrodes on each point, the downward projection of each elastic curved surface at least covers part of each corresponding detection electrode, the elastic curved surface is subjected to the mutual capacitance, the capacitance of the elastic curved surface is subjected to the mutual capacitance of the corresponding detection electrode, and the capacitance of the capacitive digital conversion circuit is subjected to change in the spatial conversion between the corresponding detection electrode, and the capacitance of the digital conversion circuit is subjected to change, and the capacitance change. The utility model relates to a capacitive three-dimensional force lattice sensor, which also comprises the following auxiliary schemes: The flexible conductive layer is formed on the bottom surface of the protective layer in a conductive material coating mode, and the elastic curved surfaces are formed under the influence of the protruding shapes. Wherein, the gaps between each elastic curved surface and the detection electrode are filled with flexible insulating materials. Wherein the flexible conductive layer acts as an electric field perturbation electrode. The capacitive digital conversion circuit is coupled with the flexible conductive layer through the switch array, the flexible conductive layer is used as a multiplexing electrode close to the detection electrode and the electric field disturbance electrode, and the switch array is used as a time-sharing gating channel of the flexible conductive layer coupled with the capacitive digital conversion circuit or the ground. The flexible conductive layers are used as self-capacitance electrodes for detecting proximity and/or two-by-two mutual capacitance electrodes. Wherein the flexible conductive layer is coupled to ground through a gating switch. The flexible conductive layer comprises a corresponding area, and each detection electrode is arranged inside one or more flexible conductive layers. The circuit board top surface is pr