CN-224231147-U - Negative pressure measuring device and semiconductor preparation system

CN224231147UCN 224231147 UCN224231147 UCN 224231147UCN-224231147-U

Abstract

The application provides a negative pressure measuring device and a semiconductor preparation system, and relates to the technical field of semiconductors. The negative pressure measuring device comprises a differential pressure sensor, a pressure guiding pipe, a first water storage tank, a second water storage tank, a first pipeline and a second pipeline, wherein the first water storage tank is communicated with the negative pressure pipeline through the first pipeline, the first water storage tank is communicated with the second water storage tank through the second pipeline, the differential pressure sensor is communicated with the side edge of the first water storage tank through the pressure guiding pipe, the second water storage tank is located below the first water storage tank, and the differential pressure sensor is located above the first water storage tank. The negative pressure measuring device and the semiconductor preparation system provided by the application have the advantage that condensed water generated inside can not influence the differential pressure sensor.

Inventors

WU HANGFEI
ZHOU HONGLIANG
LIU BO
WU SHENGRONG

Assignees

捷捷微电(南通)科技有限公司

Dates

Publication Date: 20260512
Application Date: 20250625

Claims (10)

1. A negative pressure measuring device is characterized by comprising a differential pressure sensor, a pressure guiding pipe, a first water storage tank, a second water storage tank, a first pipeline and a second pipeline, wherein the first water storage tank is communicated with the negative pressure pipeline through the first pipeline, the first water storage tank is communicated with the second water storage tank through the second pipeline, the differential pressure sensor is communicated with the side edge of the first water storage tank through the pressure guiding pipe, The second water storage tank is positioned below the first water storage tank, and the pressure difference sensor is positioned above the first water storage tank.
2. The negative pressure measurement device of claim 1, further comprising a first valve disposed on the second conduit, a drain opening being provided at a bottom of the second reservoir; when the drain opening is open, the first valve is closed.
3. The negative pressure measurement device of claim 2, further comprising a third conduit in communication with the top of the second reservoir and a second valve disposed on the third conduit; when the drain opening is open, the second valve is open.
4. The negative pressure measurement device of claim 3, further comprising a fourth conduit connected to the drain port of the second valve and a third valve disposed on the fourth conduit.
5. The negative pressure measurement device of claim 4, further comprising a control module electrically connected to the first valve, the second valve, and the third valve, respectively, the control module configured to control the open/close states of the first valve, the second valve, and the third valve.
6. The negative pressure measuring device of claim 5, further comprising a first level sensor and a second level sensor, wherein the first level sensor and the second level sensor are both disposed in the second reservoir and the first level sensor is higher than the second level sensor, wherein the first level sensor and the second level sensor are both electrically connected to the control module, When receiving the liquid level information sent by the first liquid level sensor, the control module controls the first valve to be closed and controls the second valve and the third valve to be opened; And when the liquid level information sent by the second liquid level sensor is not received, the control module controls the first valve to be opened and controls the second valve and the third valve to be closed.
7. The negative pressure measurement device of claim 1, further comprising a fourth valve disposed on the first conduit.
8. The negative pressure measurement device of claim 1, wherein the differential pressure sensor is disposed at 45 ° to the pressure line.
9. The negative pressure measurement device of claim 1, wherein the first conduit and the second conduit are each provided as a transparent conduit.
10. A semiconductor manufacturing system, characterized in that the semiconductor manufacturing system comprises a negative pressure measuring device according to any one of claims 1 to 9.

Description

Negative pressure measuring device and semiconductor preparation system Technical Field The application relates to the technical field of semiconductors, in particular to a negative pressure measuring device and a semiconductor preparation system. Background In semiconductor manufacturing processes, negative pressure piping (used to pump or maintain a sub-atmospheric environment) is an essential component of the proper operation of many critical devices. In order to monitor the pressure difference between the negative pressure pipeline and the atmospheric environment, a differential pressure sensor is required to be arranged, so that the measurement of the pipeline negative pressure is realized. At present, the differential pressure sensor is generally communicated with a negative pressure pipeline through a pressure guiding pipe, so that negative pressure measurement is realized. However, condensed water is easy to generate in the pressure guiding pipe, and the condensed water can influence the measurement accuracy of the differential pressure sensor and even damage the differential pressure sensor. In summary, there is a problem in the prior art that the operation of the differential pressure sensor is affected by the condensate. Disclosure of utility model The application aims to provide a negative pressure measuring device and a semiconductor preparation system, which are used for solving the problem that the work of a differential pressure sensor in the prior art is influenced by condensed water. In order to achieve the above object, the technical scheme adopted by the embodiment of the application is as follows: In one aspect, the embodiment of the application provides a negative pressure measuring device, which comprises a differential pressure sensor, a pressure guiding pipe, a first water storage tank, a second water storage tank, a first pipeline and a second pipeline, wherein the first water storage tank is communicated with the negative pressure pipeline through the first pipeline, the first water storage tank is communicated with the second water storage tank through the second pipeline, the differential pressure sensor is communicated with the side edge of the first water storage tank through the pressure guiding pipe, The second water storage tank is positioned below the first water storage tank, and the pressure difference sensor is positioned above the first water storage tank. Optionally, the negative pressure measuring device further comprises a first valve, the first valve is arranged on the second pipeline, and a water outlet is arranged at the bottom of the second water storage tank; when the drain opening is open, the first valve is closed. Optionally, the negative pressure measurement device further comprises a third pipeline and a second valve, wherein the third pipeline is communicated with the top of the second water storage tank, and the second valve is arranged on the third pipeline; when the drain opening is open, the second valve is open. Optionally, the negative pressure measurement device further comprises a fourth pipeline and a third valve, the fourth pipeline is connected to the water outlet of the second valve, and the third valve is arranged on the fourth pipeline. Optionally, the negative pressure measurement device further includes a control module, the control module is electrically connected with the first valve, the second valve and the third valve respectively, and the control module is used for controlling the opening and closing states of the first valve, the second valve and the third valve. Optionally, the negative pressure measuring device further comprises a first liquid level sensor and a second liquid level sensor, wherein the first liquid level sensor and the second liquid level sensor are both arranged in the second water storage tank, the height of the first liquid level sensor is higher than that of the second liquid level sensor, the first liquid level sensor and the second liquid level sensor are both electrically connected with the control module, When receiving the liquid level information sent by the first liquid level sensor, the control module controls the first valve to be closed and controls the second valve and the third valve to be opened; And when the liquid level information sent by the second liquid level sensor is not received, the control module controls the first valve to be opened and controls the second valve and the third valve to be closed. Optionally, the negative pressure measurement device further comprises a fourth valve, and the fourth valve is arranged on the first pipeline. Optionally, the pressure difference sensor and the pressure guiding pipe are arranged at 45 degrees. Optionally, the first pipe and the second pipe are both transparent pipes. On the other hand, the embodiment of the application also provides a semiconductor preparation system, which comprises the negative pressure measuring device. Compared with the prio